DE2042023A1 - Vorrichtung zum Aufspruehen von Kathodenmaterial auf ein Werkstueck - Google Patents

Vorrichtung zum Aufspruehen von Kathodenmaterial auf ein Werkstueck

Info

Publication number
DE2042023A1
DE2042023A1 DE19702042023 DE2042023A DE2042023A1 DE 2042023 A1 DE2042023 A1 DE 2042023A1 DE 19702042023 DE19702042023 DE 19702042023 DE 2042023 A DE2042023 A DE 2042023A DE 2042023 A1 DE2042023 A1 DE 2042023A1
Authority
DE
Germany
Prior art keywords
spray
cathode
workpiece
anode
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19702042023
Other languages
German (de)
English (en)
Inventor
Elmgren Jare Avard
Rodite Robert Richard Rudolph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE2042023A1 publication Critical patent/DE2042023A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3471—Introduction of auxiliary energy into the plasma
    • C23C14/3478—Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)
DE19702042023 1969-09-10 1970-08-25 Vorrichtung zum Aufspruehen von Kathodenmaterial auf ein Werkstueck Pending DE2042023A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85676269A 1969-09-10 1969-09-10

Publications (1)

Publication Number Publication Date
DE2042023A1 true DE2042023A1 (de) 1971-03-11

Family

ID=25324445

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19702042023 Pending DE2042023A1 (de) 1969-09-10 1970-08-25 Vorrichtung zum Aufspruehen von Kathodenmaterial auf ein Werkstueck

Country Status (5)

Country Link
US (1) US3669871A (enrdf_load_stackoverflow)
JP (1) JPS4817987B1 (enrdf_load_stackoverflow)
DE (1) DE2042023A1 (enrdf_load_stackoverflow)
FR (1) FR2060928A5 (enrdf_load_stackoverflow)
GB (1) GB1257766A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1985002866A1 (en) * 1983-12-23 1985-07-04 Ion Tech Limited Sputter deposition

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4026787A (en) * 1974-01-25 1977-05-31 Coulter Information Systems, Inc. Thin film deposition apparatus using segmented target means
US3988232A (en) * 1974-06-25 1976-10-26 Matsushita Electric Industrial Co., Ltd. Method of making crystal films
US4096055A (en) * 1976-12-29 1978-06-20 Johnson Andrew G Electron microscopy coating apparatus and methods
JPS54144891U (enrdf_load_stackoverflow) * 1978-03-31 1979-10-08
US4201654A (en) * 1978-10-06 1980-05-06 The United States Of America As Represented By The Secretary Of The Air Force Anode assisted sputter etch and deposition apparatus
US5215639A (en) * 1984-10-09 1993-06-01 Genus, Inc. Composite sputtering target structures and process for producing such structures
US4597847A (en) * 1984-10-09 1986-07-01 Iodep, Inc. Non-magnetic sputtering target
US4610774A (en) * 1984-11-14 1986-09-09 Hitachi, Ltd. Target for sputtering
US4957605A (en) * 1989-04-17 1990-09-18 Materials Research Corporation Method and apparatus for sputter coating stepped wafers
US6024843A (en) * 1989-05-22 2000-02-15 Novellus Systems, Inc. Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile
US5196400A (en) * 1990-08-17 1993-03-23 At&T Bell Laboratories High temperature superconductor deposition by sputtering
CA2098725A1 (en) * 1991-01-28 1992-07-29 Daniel R. Marx Target for cathode sputtering
CA2065581C (en) * 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5556525A (en) * 1994-09-30 1996-09-17 Advanced Micro Devices, Inc. PVD sputter system having nonplanar target configuration and methods for operating same
US6042706A (en) * 1997-01-14 2000-03-28 Applied Materials, Inc. Ionized PVD source to produce uniform low-particle deposition
US5985115A (en) * 1997-04-11 1999-11-16 Novellus Systems, Inc. Internally cooled target assembly for magnetron sputtering
US6217716B1 (en) 1998-05-06 2001-04-17 Novellus Systems, Inc. Apparatus and method for improving target erosion in hollow cathode magnetron sputter source
US6500321B1 (en) * 1999-05-26 2002-12-31 Novellus Systems, Inc. Control of erosion profile and process characteristics in magnetron sputtering by geometrical shaping of the sputtering target
US6277253B1 (en) * 1999-10-06 2001-08-21 Applied Materials, Inc. External coating of tungsten or tantalum or other refractory metal on IMP coils
US6699375B1 (en) 2000-06-29 2004-03-02 Applied Materials, Inc. Method of extending process kit consumable recycling life
US7244344B2 (en) 2005-02-03 2007-07-17 Applied Materials, Inc. Physical vapor deposition plasma reactor with VHF source power applied through the workpiece
US8821701B2 (en) 2010-06-02 2014-09-02 Clifton Higdon Ion beam sputter target and method of manufacture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3250694A (en) * 1962-10-17 1966-05-10 Ibm Apparatus for coating articles by cathode sputtering
FR1502647A (enrdf_load_stackoverflow) * 1965-12-17 1968-02-07
US3483114A (en) * 1967-05-01 1969-12-09 Victory Eng Corp Rf sputtering apparatus including a wave reflector positioned behind the target

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1985002866A1 (en) * 1983-12-23 1985-07-04 Ion Tech Limited Sputter deposition

Also Published As

Publication number Publication date
US3669871A (en) 1972-06-13
JPS4817987B1 (enrdf_load_stackoverflow) 1973-06-02
GB1257766A (enrdf_load_stackoverflow) 1971-12-22
FR2060928A5 (enrdf_load_stackoverflow) 1971-06-18

Similar Documents

Publication Publication Date Title
DE2042023A1 (de) Vorrichtung zum Aufspruehen von Kathodenmaterial auf ein Werkstueck
DE3050343C2 (de) Einrichtung zur Elektronenbestrahlung von Objekten
DE3506227A1 (de) Anordnung zur beschichtung von substraten mittels kathodenzerstaeubung
DE2102352C3 (de) Hochfrequenzbetriebene Sprühvorrichtung
EP0211057B1 (de) Sputteranlage zum reaktiven beschichten eines substrates mit hartstoffen
DE3338377A1 (de) Sputtervorrichtung
DE3330806C2 (enrdf_load_stackoverflow)
DE2520556A1 (de) Verfahren zum selektiven entfernen von material von der oberflaeche eines werkstueckes
DE112016007058B4 (de) Ionenätzvorrichtung
DE1765417A1 (de) Maskenloses Aufdampfverfahren
DE2307649A1 (de) Anordnung zur zerstaeubung von verschiedenen materialien
DE4135939C2 (enrdf_load_stackoverflow)
DE3242854A1 (de) Verfahren und vorrichtung zur konturierung der dicke von aufgespruehten schichten
DE2407924A1 (de) Vorrichtung zur herstellung eines ueberzugs durch ionenbeschuss
DE1515295B1 (de) Vorrichtung zum Aufbringen dünner Schichten aus dem Material einer Zerstäubungskathode auf eine senkrecht zu einer Anode angeordnete Unterlage
DE4202349C2 (de) Vorrichtung zur Kathodenzerstäubung
DE69715180T2 (de) Magnetanordnung für magnetrone
DE69019557T2 (de) Vorrichtung zur Kontrolle der Strahlquerschnittseigenschaften in einem Ionenimplantierungsgerät.
EP0043351A2 (de) Elektrostatisches Austastsystem für einen sich in einer Ebene bewegenden oder viele in einer Ebene angeordnete statische Korpuskularstrahlen
DE69207616T2 (de) Schnelle Atomstrahlquelle
DE69305725T2 (de) Magnetron-Zerstäubungsvorrichtung und Dünnfilm-Beschichtungsverfahren
DE2655942C2 (enrdf_load_stackoverflow)
DE10145050C1 (de) Einrichtung zum Beschichten von Substraten mit gekrümmter Oberfläche durch Pulsmagnetron- Zerstäuben
DD220454A5 (de) Einrichtung zur ionenstrahlbearbeitung von festkoerperproben und die ionenquelle zur einrichtung
DE3030454C2 (de) Vorrichtung zur großflächigen Abscheidung von haftfesten, insbesondere harten Kohlenstoffschichten