DE204103T1 - Werkstoff mit niedrigem dielektrischem verlust auf der basis von siliziumnitrid. - Google Patents

Werkstoff mit niedrigem dielektrischem verlust auf der basis von siliziumnitrid.

Info

Publication number
DE204103T1
DE204103T1 DE198686104811T DE86104811T DE204103T1 DE 204103 T1 DE204103 T1 DE 204103T1 DE 198686104811 T DE198686104811 T DE 198686104811T DE 86104811 T DE86104811 T DE 86104811T DE 204103 T1 DE204103 T1 DE 204103T1
Authority
DE
Germany
Prior art keywords
silicon nitride
low dielectric
dielectric loss
material based
loss material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE198686104811T
Other languages
English (en)
Inventor
Martin Y. Palo Alto California 94306 Us Hsieh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram Sylvania Inc
Original Assignee
GTE Products Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GTE Products Corp filed Critical GTE Products Corp
Publication of DE204103T1 publication Critical patent/DE204103T1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/6261—Milling
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
    • C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3227—Lanthanum oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3241—Chromium oxides, chromates, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3241—Chromium oxides, chromates, or oxide-forming salts thereof
    • C04B2235/3243—Chromates or chromites, e.g. aluminum chromate, lanthanum strontium chromite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3272—Iron oxides or oxide forming salts thereof, e.g. hematite, magnetite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40—Metallic constituents or additives not added as binding phase
    • C04B2235/404—Refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40—Metallic constituents or additives not added as binding phase
    • C04B2235/405—Iron group metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Inorganic Insulating Materials (AREA)
DE198686104811T 1985-04-08 1986-04-08 Werkstoff mit niedrigem dielektrischem verlust auf der basis von siliziumnitrid. Pending DE204103T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/721,118 US4654315A (en) 1985-04-08 1985-04-08 Low dielectric loss silicon nitride based material

Publications (1)

Publication Number Publication Date
DE204103T1 true DE204103T1 (de) 1987-04-09

Family

ID=24896614

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8686104811T Expired - Fee Related DE3675982D1 (de) 1985-04-08 1986-04-08 Verwendung eines siliziumnitrid-materials mit niedrigem dielektischen verlust als antennenkuppel-werkstoff.
DE198686104811T Pending DE204103T1 (de) 1985-04-08 1986-04-08 Werkstoff mit niedrigem dielektrischem verlust auf der basis von siliziumnitrid.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE8686104811T Expired - Fee Related DE3675982D1 (de) 1985-04-08 1986-04-08 Verwendung eines siliziumnitrid-materials mit niedrigem dielektischen verlust als antennenkuppel-werkstoff.

Country Status (4)

Country Link
US (1) US4654315A (de)
EP (1) EP0204103B1 (de)
CA (1) CA1273193A (de)
DE (2) DE3675982D1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2577899B2 (ja) * 1987-01-28 1997-02-05 本田技研工業株式会社 窒化珪素質焼結体及びその製造法
US4949095A (en) * 1988-11-29 1990-08-14 Gte Laboratories Incorporated Fused silica radome
JP2777076B2 (ja) * 1995-01-27 1998-07-16 京セラ株式会社 高周波用低損失誘電体材料
US5573986A (en) * 1995-02-13 1996-11-12 The United States Of America As Represented By The Secretary Of The Navy Electromagnetic window
DE69605076T2 (de) * 1995-04-24 2000-07-06 Kyocera Corp Dielektrisches Material mit niedrigem dielektrischem Verlust für Hochfrequenzanwendungen
US5834840A (en) * 1995-05-25 1998-11-10 Massachusetts Institute Of Technology Net-shape ceramic processing for electronic devices and packages
US6447254B1 (en) * 2001-05-18 2002-09-10 Sikorsky Aircraft Corporation Low dieletric constant erosion resistant material
US20060014624A1 (en) * 2004-07-15 2006-01-19 Biljana Mikijelj High dielectric strength monolithic Si3N4
US20110315808A1 (en) 2010-06-23 2011-12-29 Zelinski Brian J Solid solution-based nanocomposite optical ceramic materials
US8445822B2 (en) * 2010-06-23 2013-05-21 Raytheon Company One-piece Nano/Nano class Nanocomposite Optical Ceramic (NNOC) extended dome having seamless non-complementary geometries for electro-optic sensors
US9403724B2 (en) * 2012-02-22 2016-08-02 Mbda Italia S.P.A. Ceramic material for radome, radome and process for the production thereof
DE102012207802A1 (de) * 2012-05-10 2013-11-28 Schaeffler Technologies AG & Co. KG Siliziumnitridkeramik sowie Verfahren zu deren Herstellung
US9012823B2 (en) 2012-07-31 2015-04-21 Raytheon Company Vehicle having a nanocomposite optical ceramic dome
US9385000B2 (en) * 2014-01-24 2016-07-05 United Microelectronics Corp. Method of performing etching process
US10144850B2 (en) 2015-09-25 2018-12-04 Versum Materials Us, Llc Stop-on silicon containing layer additive
CN117466635B (zh) * 2023-12-28 2024-03-08 天津包钢稀土研究院有限责任公司 一种稀土改性煤矸石制备致密莫来石的方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4025351A (en) * 1972-10-24 1977-05-24 Kabushiki Kaisha Toyota Chuo Kenkyusho Sintered silicon nitride base ceramic and said ceramic
JPS5823349B2 (ja) * 1975-08-11 1983-05-14 新日本製鐵株式会社 タイカブツノシヨウケツホウホウ
GB2010913B (en) * 1977-12-23 1982-06-23 Fiat Spa Process for sintering silicon nitride compacts
US4376652A (en) * 1979-01-08 1983-03-15 Gte Products Corporation High density high strength Si3 N4 ceramics prepared by pressureless sintering of amorphous Si3 N4 powder and Ti
JPS5823345B2 (ja) * 1979-02-22 1983-05-14 株式会社東芝 セラミックス焼結体の製造方法
US4358772A (en) * 1980-04-30 1982-11-09 Hughes Aircraft Company Ceramic broadband radome
EP0045518B1 (de) * 1980-08-06 1984-02-22 Feldmühle Aktiengesellschaft Dichter, Yttriumoxid enthaltender Formkörper aus Siliziumnitrid und Verfahren zu seiner Herstellung
JPS5826077A (ja) * 1981-08-10 1983-02-16 株式会社東芝 セラミツクス焼結体及びその製造方法
JPS5860676A (ja) * 1981-09-30 1983-04-11 日本特殊陶業株式会社 窒化珪素焼結体及びその製造方法
US4383958A (en) * 1981-12-21 1983-05-17 Gte Laboratories Incorporated Method of producing dense silicon nitride ceramic articles having controlled surface layer composition
JPS58123602A (ja) * 1982-01-19 1983-07-22 株式会社デンソー 点火プラグ用焼結質窒化けい素絶縁碍子
JPS5934678B2 (ja) * 1982-08-12 1984-08-23 工業技術院長 高耐食性室化珪素焼結体の製造方法
EP0148831B1 (de) * 1983-07-19 1988-05-25 Ford Motor Company Verfahren zur herstellung eines verdichteten silizium-nitrid/oxynitrid-komposits
US4552851A (en) * 1984-05-02 1985-11-12 Gte Products Corporation Formation of yttrium aluminate as sintering aid for silicon nitride bodies
US4879080A (en) * 1984-05-02 1989-11-07 Gte Products Corporation High density silicon nitride bodies
US4542072A (en) * 1984-05-09 1985-09-17 Gte Products Corporation Processing silicon nitride by use of boron nitride as a barrier layer
US4521525A (en) * 1984-05-29 1985-06-04 Gte Products Corporation Silicon nitride bodies
US4749539A (en) * 1984-05-29 1988-06-07 Gte Products Corporation Process for producing corrosion resistant silicon nitride bodies containing La2 O3

Also Published As

Publication number Publication date
EP0204103A2 (de) 1986-12-10
EP0204103A3 (en) 1987-03-04
US4654315A (en) 1987-03-31
EP0204103B1 (de) 1990-12-05
CA1273193A (en) 1990-08-28
DE3675982D1 (de) 1991-01-17

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