DE2037864A1 - Vorrichtung zum Bearbeiten von Werk stoffen mittels Ionenstrahlen - Google Patents
Vorrichtung zum Bearbeiten von Werk stoffen mittels IonenstrahlenInfo
- Publication number
- DE2037864A1 DE2037864A1 DE19702037864 DE2037864A DE2037864A1 DE 2037864 A1 DE2037864 A1 DE 2037864A1 DE 19702037864 DE19702037864 DE 19702037864 DE 2037864 A DE2037864 A DE 2037864A DE 2037864 A1 DE2037864 A1 DE 2037864A1
- Authority
- DE
- Germany
- Prior art keywords
- ion beam
- housing
- masking
- mask
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 title claims description 36
- 238000012545 processing Methods 0.000 title claims description 7
- 239000000463 material Substances 0.000 title description 12
- 150000002500 ions Chemical class 0.000 claims description 24
- 230000000873 masking effect Effects 0.000 claims description 14
- 239000007921 spray Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 6
- 230000003628 erosive effect Effects 0.000 description 5
- 238000007493 shaping process Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010849 ion bombardment Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 241000272194 Ciconiiformes Species 0.000 description 1
- 206010073306 Exposure to radiation Diseases 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007519 figuring Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229940028444 muse Drugs 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- GMVPRGQOIOIIMI-DWKJAMRDSA-N prostaglandin E1 Chemical compound CCCCC[C@H](O)\C=C\[C@H]1[C@H](O)CC(=O)[C@@H]1CCCCCCC(O)=O GMVPRGQOIOIIMI-DWKJAMRDSA-N 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB3926069 | 1969-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE2037864A1 true DE2037864A1 (de) | 1971-02-18 |
Family
ID=10408572
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19707028721 Expired DE7028721U (de) | 1969-08-05 | 1970-07-30 | Vorrichtung zum bearbeiten von werkstoffen mittels ionenstrahlen. |
| DE19702037864 Pending DE2037864A1 (de) | 1969-08-05 | 1970-07-30 | Vorrichtung zum Bearbeiten von Werk stoffen mittels Ionenstrahlen |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19707028721 Expired DE7028721U (de) | 1969-08-05 | 1970-07-30 | Vorrichtung zum bearbeiten von werkstoffen mittels ionenstrahlen. |
Country Status (4)
| Country | Link |
|---|---|
| DE (2) | DE7028721U (enrdf_load_stackoverflow) |
| FR (1) | FR2056551A5 (enrdf_load_stackoverflow) |
| GB (1) | GB1290863A (enrdf_load_stackoverflow) |
| SE (1) | SE354435B (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2933850A1 (de) * | 1978-08-28 | 1980-03-13 | Hitachi Ltd | Plasma-aetzvorrichtung |
| FR2533103A1 (fr) * | 1982-09-10 | 1984-03-16 | Balzers Hochvakuum | Procede et dispositif pour le rechauffement uniforme d'un materiau dans un recipient sous vide |
| DE3427587A1 (de) * | 1984-07-26 | 1986-02-06 | Leybold-Heraeus GmbH, 5000 Köln | Zerstaeubungseinrichtung fuer katodenzerstaeubungsanlagen |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50151162A (enrdf_load_stackoverflow) * | 1974-05-27 | 1975-12-04 | ||
| GB2188924B (en) * | 1986-04-08 | 1990-05-09 | Glaverbel | Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell |
| GB2188925B (en) * | 1986-04-08 | 1990-05-09 | Glaverbel | Matted glass and process of manufacturing same |
| US7863587B2 (en) | 2007-01-31 | 2011-01-04 | Hitachi Global Storage Technologies, Netherlands, B.V. | Symmetrical shaper for an ion beam deposition and etching apparatus |
-
1969
- 1969-08-05 GB GB1290863D patent/GB1290863A/en not_active Expired
-
1970
- 1970-07-30 DE DE19707028721 patent/DE7028721U/de not_active Expired
- 1970-07-30 DE DE19702037864 patent/DE2037864A1/de active Pending
- 1970-08-04 FR FR7028702A patent/FR2056551A5/fr not_active Expired
- 1970-08-04 SE SE1068670A patent/SE354435B/xx unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2933850A1 (de) * | 1978-08-28 | 1980-03-13 | Hitachi Ltd | Plasma-aetzvorrichtung |
| FR2533103A1 (fr) * | 1982-09-10 | 1984-03-16 | Balzers Hochvakuum | Procede et dispositif pour le rechauffement uniforme d'un materiau dans un recipient sous vide |
| DE3427587A1 (de) * | 1984-07-26 | 1986-02-06 | Leybold-Heraeus GmbH, 5000 Köln | Zerstaeubungseinrichtung fuer katodenzerstaeubungsanlagen |
Also Published As
| Publication number | Publication date |
|---|---|
| DE7028721U (de) | 1970-11-26 |
| SE354435B (enrdf_load_stackoverflow) | 1973-03-12 |
| GB1290863A (enrdf_load_stackoverflow) | 1972-09-27 |
| FR2056551A5 (enrdf_load_stackoverflow) | 1971-05-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OHW | Rejection |