FR2056551A5 - - Google Patents

Info

Publication number
FR2056551A5
FR2056551A5 FR7028702A FR7028702A FR2056551A5 FR 2056551 A5 FR2056551 A5 FR 2056551A5 FR 7028702 A FR7028702 A FR 7028702A FR 7028702 A FR7028702 A FR 7028702A FR 2056551 A5 FR2056551 A5 FR 2056551A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7028702A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Application granted granted Critical
Publication of FR2056551A5 publication Critical patent/FR2056551A5/fr
Priority to US00188818A priority Critical patent/US3738719A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
FR7028702A 1969-08-05 1970-08-04 Expired FR2056551A5 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US00188818A US3738719A (en) 1970-08-04 1971-10-13 Ball bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3926069 1969-08-05

Publications (1)

Publication Number Publication Date
FR2056551A5 true FR2056551A5 (enrdf_load_stackoverflow) 1971-05-14

Family

ID=10408572

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7028702A Expired FR2056551A5 (enrdf_load_stackoverflow) 1969-08-05 1970-08-04

Country Status (4)

Country Link
DE (2) DE2037864A1 (enrdf_load_stackoverflow)
FR (1) FR2056551A5 (enrdf_load_stackoverflow)
GB (1) GB1290863A (enrdf_load_stackoverflow)
SE (1) SE354435B (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151162A (enrdf_load_stackoverflow) * 1974-05-27 1975-12-04
JPS5531154A (en) * 1978-08-28 1980-03-05 Hitachi Ltd Plasma etching apparatus
CH658545A5 (de) * 1982-09-10 1986-11-14 Balzers Hochvakuum Verfahren zum gleichmaessigen erwaermen von heizgut in einem vakuumrezipienten.
DE3427587A1 (de) * 1984-07-26 1986-02-06 Leybold-Heraeus GmbH, 5000 Köln Zerstaeubungseinrichtung fuer katodenzerstaeubungsanlagen
GB2188925B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass and process of manufacturing same
GB2188924B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
US7863587B2 (en) 2007-01-31 2011-01-04 Hitachi Global Storage Technologies, Netherlands, B.V. Symmetrical shaper for an ion beam deposition and etching apparatus

Also Published As

Publication number Publication date
SE354435B (enrdf_load_stackoverflow) 1973-03-12
GB1290863A (enrdf_load_stackoverflow) 1972-09-27
DE2037864A1 (de) 1971-02-18
DE7028721U (de) 1970-11-26

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Legal Events

Date Code Title Description
ST Notification of lapse