GB1290863A - - Google Patents

Info

Publication number
GB1290863A
GB1290863A GB1290863DA GB1290863A GB 1290863 A GB1290863 A GB 1290863A GB 1290863D A GB1290863D A GB 1290863DA GB 1290863 A GB1290863 A GB 1290863A
Authority
GB
United Kingdom
Prior art keywords
lens
mask
ion
grid
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1290863A publication Critical patent/GB1290863A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
GB1290863D 1969-08-05 1969-08-05 Expired GB1290863A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3926069 1969-08-05

Publications (1)

Publication Number Publication Date
GB1290863A true GB1290863A (enrdf_load_stackoverflow) 1972-09-27

Family

ID=10408572

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1290863D Expired GB1290863A (enrdf_load_stackoverflow) 1969-08-05 1969-08-05

Country Status (4)

Country Link
DE (2) DE7028721U (enrdf_load_stackoverflow)
FR (1) FR2056551A5 (enrdf_load_stackoverflow)
GB (1) GB1290863A (enrdf_load_stackoverflow)
SE (1) SE354435B (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151162A (enrdf_load_stackoverflow) * 1974-05-27 1975-12-04
GB2188925A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass and process of manufacturing same
GB2188924A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
US7863587B2 (en) 2007-01-31 2011-01-04 Hitachi Global Storage Technologies, Netherlands, B.V. Symmetrical shaper for an ion beam deposition and etching apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531154A (en) * 1978-08-28 1980-03-05 Hitachi Ltd Plasma etching apparatus
CH658545A5 (de) * 1982-09-10 1986-11-14 Balzers Hochvakuum Verfahren zum gleichmaessigen erwaermen von heizgut in einem vakuumrezipienten.
DE3427587A1 (de) * 1984-07-26 1986-02-06 Leybold-Heraeus GmbH, 5000 Köln Zerstaeubungseinrichtung fuer katodenzerstaeubungsanlagen

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151162A (enrdf_load_stackoverflow) * 1974-05-27 1975-12-04
GB2188925A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass and process of manufacturing same
GB2188924A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
US4880677A (en) * 1986-04-08 1989-11-14 Glaverbel Matted glass
US4882214A (en) * 1986-04-08 1989-11-21 Glaverbel Matted glass
GB2188924B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
GB2188925B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass and process of manufacturing same
US7863587B2 (en) 2007-01-31 2011-01-04 Hitachi Global Storage Technologies, Netherlands, B.V. Symmetrical shaper for an ion beam deposition and etching apparatus

Also Published As

Publication number Publication date
FR2056551A5 (enrdf_load_stackoverflow) 1971-05-14
DE7028721U (de) 1970-11-26
DE2037864A1 (de) 1971-02-18
SE354435B (enrdf_load_stackoverflow) 1973-03-12

Similar Documents

Publication Publication Date Title
US4074139A (en) Apparatus and method for maskless ion implantation
EP0167360A2 (en) Programmable ion beam patterning system
GB1290863A (enrdf_load_stackoverflow)
GB1499847A (en) Selective removal of material by sputter etching
GB1279449A (en) Apparatus for ion implantation
EP0094473B1 (en) Apparatus and method for producing a stream of ions
JPS56139673A (en) Manufacture of lead coat
JPS52143776A (en) Electron beam exposure apparatus
US3629095A (en) In or relating to vacuum apparatus
JPS5466385A (en) Outer parts for pocket watch
GB1295465A (enrdf_load_stackoverflow)
JPS5333689A (en) Composite ion source for mass spectrometer
GB1265834A (enrdf_load_stackoverflow)
JPS60262963A (ja) 化合物薄膜蒸着装置
GB1272383A (en) Ion propulsion unit
JP2765111B2 (ja) イオン注入装置
GB1256887A (enrdf_load_stackoverflow)
GB1561784A (en) Optical components
MILLER Dispensing targets for ion beam particle generators[Patent]
JPS56153652A (en) Electron gun frame for color cathode-ray tube
JPS5685828A (en) Electrostatic wafer holder
VYSOTSKII et al. The use of a modified Lax-Wendroff method to obtain a numerical solution for the electron energy distribution equation in the case of the deceleration of high-energy electrons. I
FR2335942A2 (fr) Source d'ions de masse elevee, notamment d'ions d'oxyde d'uranium uo2, a reflexions multiples
FR2319194A1 (fr) Source d'ions de masse elevee, notamment d'ions d'oxyde d'uranium uo2
JPS5776834A (en) Method of electron beam exposure

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee