SE354435B - - Google Patents

Info

Publication number
SE354435B
SE354435B SE1068670A SE1068670A SE354435B SE 354435 B SE354435 B SE 354435B SE 1068670 A SE1068670 A SE 1068670A SE 1068670 A SE1068670 A SE 1068670A SE 354435 B SE354435 B SE 354435B
Authority
SE
Sweden
Application number
SE1068670A
Inventor
J Maskrey
S Ford
R Dugdale
Original Assignee
Atomic Energy Authority Uk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Authority Uk filed Critical Atomic Energy Authority Uk
Publication of SE354435B publication Critical patent/SE354435B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
SE1068670A 1969-08-05 1970-08-04 SE354435B (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3926069 1969-08-05

Publications (1)

Publication Number Publication Date
SE354435B true SE354435B (enrdf_load_stackoverflow) 1973-03-12

Family

ID=10408572

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1068670A SE354435B (enrdf_load_stackoverflow) 1969-08-05 1970-08-04

Country Status (4)

Country Link
DE (2) DE2037864A1 (enrdf_load_stackoverflow)
FR (1) FR2056551A5 (enrdf_load_stackoverflow)
GB (1) GB1290863A (enrdf_load_stackoverflow)
SE (1) SE354435B (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151162A (enrdf_load_stackoverflow) * 1974-05-27 1975-12-04
JPS5531154A (en) * 1978-08-28 1980-03-05 Hitachi Ltd Plasma etching apparatus
CH658545A5 (de) * 1982-09-10 1986-11-14 Balzers Hochvakuum Verfahren zum gleichmaessigen erwaermen von heizgut in einem vakuumrezipienten.
DE3427587A1 (de) * 1984-07-26 1986-02-06 Leybold-Heraeus GmbH, 5000 Köln Zerstaeubungseinrichtung fuer katodenzerstaeubungsanlagen
GB2188925B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass and process of manufacturing same
GB2188924B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
US7863587B2 (en) 2007-01-31 2011-01-04 Hitachi Global Storage Technologies, Netherlands, B.V. Symmetrical shaper for an ion beam deposition and etching apparatus

Also Published As

Publication number Publication date
DE7028721U (de) 1970-11-26
DE2037864A1 (de) 1971-02-18
FR2056551A5 (enrdf_load_stackoverflow) 1971-05-14
GB1290863A (enrdf_load_stackoverflow) 1972-09-27

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