DE2034633C3 - Kartusche für eine Getterpumpe - Google Patents
Kartusche für eine GetterpumpeInfo
- Publication number
- DE2034633C3 DE2034633C3 DE2034633A DE2034633A DE2034633C3 DE 2034633 C3 DE2034633 C3 DE 2034633C3 DE 2034633 A DE2034633 A DE 2034633A DE 2034633 A DE2034633 A DE 2034633A DE 2034633 C3 DE2034633 C3 DE 2034633C3
- Authority
- DE
- Germany
- Prior art keywords
- cartridge according
- cartridge
- carrier strip
- spacers
- surface parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 36
- 125000006850 spacer group Chemical group 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 14
- 239000002923 metal particle Substances 0.000 description 9
- 150000002739 metals Chemical class 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- -1 aluminum Chemical class 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2004869 | 1969-07-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2034633A1 DE2034633A1 (de) | 1971-02-04 |
| DE2034633B2 DE2034633B2 (de) | 1979-02-22 |
| DE2034633C3 true DE2034633C3 (de) | 1979-10-25 |
Family
ID=11163401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2034633A Expired DE2034633C3 (de) | 1969-07-24 | 1970-07-13 | Kartusche für eine Getterpumpe |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3662522A (enExample) |
| JP (1) | JPS5027603B1 (enExample) |
| DE (1) | DE2034633C3 (enExample) |
| FR (1) | FR2055487A5 (enExample) |
| GB (1) | GB1323888A (enExample) |
| NL (1) | NL172499C (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT998681B (it) * | 1973-10-01 | 1976-02-20 | Getters Spa | Pompa getter |
| US4050914A (en) * | 1976-07-26 | 1977-09-27 | S.A.E.S. Getters S.P.A. | Accelerator for charged particles |
| US4137012A (en) * | 1976-11-03 | 1979-01-30 | S.A.E.S. Getters S.P.A. | Modular getter pumps |
| DE3332606A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen |
| DE3332647A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen |
| US4874339A (en) * | 1985-08-09 | 1989-10-17 | Saes Getters S.P.A. | Pumping tubulation getter |
| US4938667A (en) * | 1988-09-30 | 1990-07-03 | Saes Getters Spa | Method for the manufacture of a vacuum insulating structure and an insulating structure so produced |
| US5154582A (en) * | 1991-08-20 | 1992-10-13 | Danielson Associates, Inc. | Rough vacuum pump using bulk getter material |
| US5161955A (en) * | 1991-08-20 | 1992-11-10 | Danielson Associates, Inc. | High vacuum pump using bulk getter material |
| IT1255438B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
| US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
| US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
| US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
| US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
| IT237018Y1 (it) * | 1995-07-10 | 2000-08-31 | Getters Spa | Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile |
| IT1292175B1 (it) * | 1997-06-17 | 1999-01-25 | Getters Spa | Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare |
| WO2008003724A2 (de) * | 2006-07-05 | 2008-01-10 | Von Ardenne Anlagentechnik Gmbh | Getterpumpe und vakuumbeschichtungsanlage mit einer getterpumpe |
| US8211988B2 (en) * | 2008-04-30 | 2012-07-03 | Chevron Phillips Chemical Company Lp | Methods of preparing a polymerization catalyst |
| ITMI20121732A1 (it) | 2012-10-15 | 2014-04-16 | Getters Spa | Pompa getter |
| TWI660125B (zh) * | 2014-04-03 | 2019-05-21 | 義大利商沙斯格特斯公司 | 吸氣泵 |
| KR102154893B1 (ko) * | 2014-06-26 | 2020-09-11 | 사에스 게터스 에스.페.아. | 게터 펌핑 시스템 |
| JP6133821B2 (ja) | 2014-08-08 | 2017-05-24 | 有限会社真空実験室 | 非蒸発型ゲッター及び非蒸発型ゲッターポンプ |
| US11508564B2 (en) * | 2014-11-19 | 2022-11-22 | Hamilton Sundstrand Corporation | Ion pumps and ion pump elements |
| WO2024028240A1 (en) | 2022-08-01 | 2024-02-08 | Saes Getters S.P.A. | Snap-on getter pump assembly and its use |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2154131A (en) * | 1937-10-30 | 1939-04-11 | Rca Corp | Getter |
| US2831549A (en) * | 1954-08-31 | 1958-04-22 | Westinghouse Electric Corp | Isolation trap |
| US2984314A (en) * | 1957-11-22 | 1961-05-16 | New York Air Brake Co | Trapping device |
| GB875676A (en) * | 1958-05-12 | 1961-08-23 | Gen Motors Ltd | Improvements in or relating to filters for gases |
| US3144200A (en) * | 1962-10-17 | 1964-08-11 | Clyde E Taylor | Process and device for cryogenic adsorption pumping |
| US3309844A (en) * | 1963-11-29 | 1967-03-21 | Union Carbide Corp | Process for adsorbing gases |
| US3490211A (en) * | 1967-07-31 | 1970-01-20 | Keystone Filter Media Co | High efficiency particulate air filter |
-
1970
- 1970-07-13 DE DE2034633A patent/DE2034633C3/de not_active Expired
- 1970-07-15 US US55029A patent/US3662522A/en not_active Expired - Lifetime
- 1970-07-17 GB GB3477170A patent/GB1323888A/en not_active Expired
- 1970-07-22 JP JP45063662A patent/JPS5027603B1/ja active Pending
- 1970-07-22 FR FR7027072A patent/FR2055487A5/fr not_active Expired
- 1970-07-24 NL NLAANVRAGE7010992,A patent/NL172499C/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| NL7010992A (enExample) | 1971-01-26 |
| DE2034633B2 (de) | 1979-02-22 |
| JPS5027603B1 (enExample) | 1975-09-09 |
| DE2034633A1 (de) | 1971-02-04 |
| NL172499B (nl) | 1983-04-05 |
| NL172499C (nl) | 1983-09-01 |
| GB1323888A (en) | 1973-07-18 |
| FR2055487A5 (enExample) | 1971-05-07 |
| US3662522A (en) | 1972-05-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OI | Miscellaneous see part 1 | ||
| OI | Miscellaneous see part 1 | ||
| C3 | Grant after two publication steps (3rd publication) |