DE20122618U1 - Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem - Google Patents

Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem Download PDF

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Publication number
DE20122618U1
DE20122618U1 DE20122618U DE20122618U DE20122618U1 DE 20122618 U1 DE20122618 U1 DE 20122618U1 DE 20122618 U DE20122618 U DE 20122618U DE 20122618 U DE20122618 U DE 20122618U DE 20122618 U1 DE20122618 U1 DE 20122618U1
Authority
DE
Germany
Prior art keywords
micromirror
micromirrors
packaged
array according
micromirror array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE20122618U
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German (de)
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reflectivity Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/631,536 external-priority patent/US6529310B1/en
Priority claimed from US09/732,445 external-priority patent/US6523961B2/en
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of DE20122618U1 publication Critical patent/DE20122618U1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Multimedia (AREA)
  • Computer Hardware Design (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Projection Apparatus (AREA)
  • Micromachines (AREA)
  • Led Device Packages (AREA)
  • Prostheses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Hybrid Cells (AREA)
DE20122618U 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem Expired - Lifetime DE20122618U1 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US631536 2000-08-03
US09/631,536 US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element
US22924600P 2000-08-30 2000-08-30
US229246P 2000-08-30
US732445 2000-12-07
US09/732,445 US6523961B2 (en) 2000-08-30 2000-12-07 Projection system and mirror elements for improved contrast ratio in spatial light modulators
EP01959466A EP1315993A4 (en) 2000-08-03 2001-08-03 MICROMIROIR ELEMENTS, HOUSING FOR THESE MICROMIRROR ELEMENTS AND ASSOCIATED PROTECTION SYSTEM

Publications (1)

Publication Number Publication Date
DE20122618U1 true DE20122618U1 (de) 2006-11-23

Family

ID=27397927

Family Applications (10)

Application Number Title Priority Date Filing Date
DE20122618U Expired - Lifetime DE20122618U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122616U Expired - Lifetime DE20122616U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122617U Expired - Lifetime DE20122617U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122373U Expired - Lifetime DE20122373U1 (de) 2000-08-03 2001-08-03 Projektionssystem zum Projizieren eines Farbbildes
DE20122615U Expired - Lifetime DE20122615U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122614U Expired - Lifetime DE20122614U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122372U Expired - Lifetime DE20122372U1 (de) 2000-08-03 2001-08-03 Chip abgetrennt von einem Wafer
DE20122370U Expired - Lifetime DE20122370U1 (de) 2000-08-03 2001-08-03 Verpacktes Mikrospiegelfeld für eine Projektions-Anzeigeeinrichtung
DE20122371U Expired - Lifetime DE20122371U1 (de) 2000-08-03 2001-08-03 Projektionsanzeigeeinrichtung
DE60126849T Expired - Fee Related DE60126849T2 (de) 2000-08-03 2001-08-03 Vereinzelte Die-Wafer mit Mikrospiegeln

Family Applications After (9)

Application Number Title Priority Date Filing Date
DE20122616U Expired - Lifetime DE20122616U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122617U Expired - Lifetime DE20122617U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122373U Expired - Lifetime DE20122373U1 (de) 2000-08-03 2001-08-03 Projektionssystem zum Projizieren eines Farbbildes
DE20122615U Expired - Lifetime DE20122615U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122614U Expired - Lifetime DE20122614U1 (de) 2000-08-03 2001-08-03 Mikrospiegelelemente, Gehäuse für Mikrospiegelelemente und zugehöriges Projektionssystem
DE20122372U Expired - Lifetime DE20122372U1 (de) 2000-08-03 2001-08-03 Chip abgetrennt von einem Wafer
DE20122370U Expired - Lifetime DE20122370U1 (de) 2000-08-03 2001-08-03 Verpacktes Mikrospiegelfeld für eine Projektions-Anzeigeeinrichtung
DE20122371U Expired - Lifetime DE20122371U1 (de) 2000-08-03 2001-08-03 Projektionsanzeigeeinrichtung
DE60126849T Expired - Fee Related DE60126849T2 (de) 2000-08-03 2001-08-03 Vereinzelte Die-Wafer mit Mikrospiegeln

Country Status (8)

Country Link
EP (1) EP1315993A4 (enExample)
JP (5) JP3889705B2 (enExample)
KR (1) KR100724081B1 (enExample)
CN (5) CN100412604C (enExample)
AT (1) ATE354814T1 (enExample)
AU (1) AU2001281019A1 (enExample)
DE (10) DE20122618U1 (enExample)
WO (1) WO2002012925A2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
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WO2016113251A1 (de) * 2015-01-16 2016-07-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems aktuator, system mit einer mehrzahl von mems aktuatoren und verfahren zum herstellen eines mems aktuators
DE102018207783A1 (de) * 2018-05-17 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS mit einem beweglichen Strukturelement und MEMS-Array

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US6969635B2 (en) 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US7018052B2 (en) 2000-08-30 2006-03-28 Reflectivity, Inc Projection TV with improved micromirror array
US7307775B2 (en) * 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US7023606B2 (en) 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
SG111972A1 (en) * 2002-10-17 2005-06-29 Agency Science Tech & Res Wafer-level package for micro-electro-mechanical systems
US7042622B2 (en) 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7397517B2 (en) 2003-05-30 2008-07-08 Kazuhiro Ohara Display system and signal processing using diamond-shaped DMDs
US6871958B2 (en) 2003-08-18 2005-03-29 Evans & Sutherland Computer Corporation Wide angle scanner for panoramic display
US7334902B2 (en) 2003-08-18 2008-02-26 Evans & Sutherland Computer Corporation Wide angle scanner for panoramic display
US7012669B2 (en) 2003-08-18 2006-03-14 Evans & Sutherland Computer Corporation Reflection barrier for panoramic display
US6861277B1 (en) * 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US6995830B2 (en) * 2003-12-22 2006-02-07 Asml Netherlands B.V. Lithographic projection apparatus and device manufacturing method
US7057794B2 (en) * 2004-05-19 2006-06-06 Taiwan Semiconductor Manufacturing Company, Ltd. Micromirror for MEMS device
US7273693B2 (en) * 2004-07-30 2007-09-25 Hewlett-Packard Development Company, L.P. Method for forming a planar mirror using a sacrificial oxide
US7038831B2 (en) * 2004-09-30 2006-05-02 Lucent Technologies, Inc. Micromirror apparatus with improved in-plane rotation tolerance
KR100815358B1 (ko) * 2004-10-08 2008-03-19 삼성전기주식회사 경사진 광투과성 덮개를 가진 광변조기 패키지
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US11157977B1 (en) 2007-10-26 2021-10-26 Zazzle Inc. Sales system using apparel modeling system and method
TWI418850B (zh) * 2007-11-09 2013-12-11 尼康股份有限公司 微致動器、光學設備、顯示裝置、曝光裝置及設備製造方法
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US10719862B2 (en) 2008-07-29 2020-07-21 Zazzle Inc. System and method for intake of manufacturing patterns and applying them to the automated production of interactive, customizable product
KR101373380B1 (ko) * 2009-07-17 2014-03-13 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 노광 장치 및 그에 포함된 광학 표면에 관한 파라미터의 측정 방법
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CN102087414B (zh) * 2010-11-03 2012-12-26 凝辉(天津)科技有限责任公司 一种阵列式分区投影方法
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US9110354B2 (en) * 2012-09-20 2015-08-18 Palo Alto Research Center Incorporated Steerable illumination source for a compact camera
CN105229511B (zh) * 2012-10-23 2018-07-20 苹果公司 微机械器件的制备
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DE102013217269A1 (de) * 2013-08-29 2015-03-05 Carl Zeiss Smt Gmbh Mikrospiegel-Array
CN103777445B (zh) * 2014-01-06 2018-12-25 杨毅 投影显示装置
CN103777450A (zh) * 2014-01-06 2014-05-07 吴震 发光装置、投影显示装置和发光系统
JP2016029430A (ja) * 2014-07-25 2016-03-03 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、及び電子機器
CN104835908A (zh) * 2015-04-17 2015-08-12 上海华虹宏力半导体制造有限公司 用于3d amr的氮化钽刻蚀方法
US10589980B2 (en) * 2017-04-07 2020-03-17 Texas Instruments Incorporated Isolated protrusion/recession features in a micro electro mechanical system
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Publication number Priority date Publication date Assignee Title
WO2016113251A1 (de) * 2015-01-16 2016-07-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mems aktuator, system mit einer mehrzahl von mems aktuatoren und verfahren zum herstellen eines mems aktuators
US10807859B2 (en) 2015-01-16 2020-10-20 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. MEMS actuator, system having a plurality of MEMS actuators, and method for producing a MEMS actuator
DE102018207783A1 (de) * 2018-05-17 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS mit einem beweglichen Strukturelement und MEMS-Array
DE102018207783B4 (de) 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement
US12054384B2 (en) 2018-05-17 2024-08-06 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E. V. MEMS comprising a movable structural element, and MEMS array

Also Published As

Publication number Publication date
DE20122615U1 (de) 2006-09-14
CN100412602C (zh) 2008-08-20
KR100724081B1 (ko) 2007-06-04
JP3768514B2 (ja) 2006-04-19
CN1444738A (zh) 2003-09-24
WO2002012925A3 (en) 2002-09-06
DE60126849D1 (de) 2007-04-05
DE20122616U1 (de) 2006-09-14
EP1315993A4 (en) 2005-07-13
CN1567020A (zh) 2005-01-19
EP1315993A2 (en) 2003-06-04
DE20122373U1 (de) 2005-05-19
CN100371763C (zh) 2008-02-27
DE20122614U1 (de) 2006-09-14
JP3889759B2 (ja) 2007-03-07
JP2005099793A (ja) 2005-04-14
JP2005122146A (ja) 2005-05-12
CN1567019A (zh) 2005-01-19
CN1567018A (zh) 2005-01-19
DE20122370U1 (de) 2005-05-19
JP2006178447A (ja) 2006-07-06
CN1567021A (zh) 2005-01-19
DE20122371U1 (de) 2005-05-19
CN100412603C (zh) 2008-08-20
JP3889705B2 (ja) 2007-03-07
DE20122372U1 (de) 2005-05-19
AU2001281019A1 (en) 2002-02-18
ATE354814T1 (de) 2007-03-15
DE20122617U1 (de) 2006-09-14
KR20030036665A (ko) 2003-05-09
CN100412604C (zh) 2008-08-20
CN100392467C (zh) 2008-06-04
JP2004506230A (ja) 2004-02-26
DE60126849T2 (de) 2007-11-08
WO2002012925A2 (en) 2002-02-14
JP3889757B2 (ja) 2007-03-07
JP2005122145A (ja) 2005-05-12

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