DE2012101B2 - Feldemissionskathode und Verfahren zu deren Herstellung - Google Patents
Feldemissionskathode und Verfahren zu deren HerstellungInfo
- Publication number
- DE2012101B2 DE2012101B2 DE2012101A DE2012101A DE2012101B2 DE 2012101 B2 DE2012101 B2 DE 2012101B2 DE 2012101 A DE2012101 A DE 2012101A DE 2012101 A DE2012101 A DE 2012101A DE 2012101 B2 DE2012101 B2 DE 2012101B2
- Authority
- DE
- Germany
- Prior art keywords
- field emission
- metal
- emission cathode
- cathode
- work function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 239000002184 metal Substances 0.000 claims description 22
- 239000012876 carrier material Substances 0.000 claims description 20
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 15
- 229910052721 tungsten Inorganic materials 0.000 claims description 14
- 239000010937 tungsten Substances 0.000 claims description 14
- 239000010406 cathode material Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 229910052788 barium Inorganic materials 0.000 claims description 8
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 8
- 150000002500 ions Chemical class 0.000 claims description 7
- 229910021645 metal ion Inorganic materials 0.000 claims description 7
- 239000011575 calcium Substances 0.000 claims description 5
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052791 calcium Inorganic materials 0.000 claims description 4
- 239000011734 sodium Substances 0.000 claims description 4
- 229910052712 strontium Inorganic materials 0.000 claims description 4
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 4
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 3
- 229910052776 Thorium Inorganic materials 0.000 claims description 3
- 229910052783 alkali metal Inorganic materials 0.000 claims description 3
- 150000001340 alkali metals Chemical class 0.000 claims description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 3
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 3
- 229910052792 caesium Inorganic materials 0.000 claims description 3
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 3
- 239000011591 potassium Substances 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 3
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 6
- 229910001422 barium ion Inorganic materials 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 150000002739 metals Chemical class 0.000 description 4
- 230000035515 penetration Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- -1 lithium (Li) Chemical class 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2107269 | 1969-03-14 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| DE2012101A1 DE2012101A1 (de) | 1970-09-24 |
| DE2012101B2 true DE2012101B2 (de) | 1975-03-06 |
| DE2012101C3 DE2012101C3 (enExample) | 1975-10-09 |
Family
ID=12044667
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE2012101A Granted DE2012101B2 (de) | 1969-03-14 | 1970-03-13 | Feldemissionskathode und Verfahren zu deren Herstellung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3678325A (enExample) |
| DE (1) | DE2012101B2 (enExample) |
| FR (1) | FR2034947B1 (enExample) |
| GB (1) | GB1309423A (enExample) |
| NL (1) | NL149947B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0299461A3 (en) * | 1987-07-15 | 1990-01-10 | Canon Kabushiki Kaisha | Electron-emitting device |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3814975A (en) * | 1969-08-06 | 1974-06-04 | Gen Electric | Electron emission system |
| FR2177497B1 (enExample) * | 1972-03-27 | 1978-09-29 | Labo Electronique Physique | |
| US4325000A (en) * | 1980-04-20 | 1982-04-13 | Burroughs Corporation | Low work function cathode |
| GB8621600D0 (en) * | 1986-09-08 | 1987-03-18 | Gen Electric Co Plc | Vacuum devices |
| USRE40062E1 (en) * | 1987-07-15 | 2008-02-12 | Canon Kabushiki Kaisha | Display device with electron-emitting device with electron-emitting region insulated from electrodes |
| USRE39633E1 (en) * | 1987-07-15 | 2007-05-15 | Canon Kabushiki Kaisha | Display device with electron-emitting device with electron-emitting region insulated from electrodes |
| USRE40566E1 (en) * | 1987-07-15 | 2008-11-11 | Canon Kabushiki Kaisha | Flat panel display including electron emitting device |
| US5749763A (en) * | 1987-07-15 | 1998-05-12 | Canon Kabushiki Kaisha | Display device with electron-emitting device with electron-emitting region insulted from electrodes |
| US5089292A (en) * | 1990-07-20 | 1992-02-18 | Coloray Display Corporation | Field emission cathode array coated with electron work function reducing material, and method |
| SE504603C2 (sv) * | 1995-02-15 | 1997-03-17 | Lightlab Ab | Metod vid tillverkning av en fältemissionskatod samt fältemissionskatod |
| JP3239038B2 (ja) * | 1995-04-03 | 2001-12-17 | シャープ株式会社 | 電界放出型電子源の製造方法 |
| US5713775A (en) * | 1995-05-02 | 1998-02-03 | Massachusetts Institute Of Technology | Field emitters of wide-bandgap materials and methods for their fabrication |
| CA2227322A1 (en) * | 1995-08-04 | 1997-02-20 | Printable Field Emitters Limited | Field electron emission materials and devices |
| JP2000508110A (ja) * | 1996-04-01 | 2000-06-27 | ザ リージェンツ オブ ザ ユニヴァーシティー オブ カリフォルニア | イオン注入を用いた仕事関数の変更方法 |
| WO1998021737A1 (en) * | 1996-11-13 | 1998-05-22 | Board Of Trustees Of The Leland Stanford Junior University | Carbon-containing cathodes for enhanced electron emission |
| WO1998051417A1 (en) * | 1997-05-16 | 1998-11-19 | The Board Of Trustees Of The Leland Stanford Junior University | Method and apparatus for making thermionic oxide cathodes |
| US6255772B1 (en) * | 1998-02-27 | 2001-07-03 | Micron Technology, Inc. | Large-area FED apparatus and method for making same |
| US6019913A (en) * | 1998-05-18 | 2000-02-01 | The Regents Of The University Of California | Low work function, stable compound clusters and generation process |
| FR2803944B1 (fr) * | 2000-01-14 | 2002-06-14 | Thomson Tubes Electroniques | Cathode generatrice d'electrons et son procede de fabrication |
| US7488106B2 (en) * | 2005-05-05 | 2009-02-10 | Leco Corporation | Automated calorimeter |
| US8058159B2 (en) | 2008-08-27 | 2011-11-15 | General Electric Company | Method of making low work function component |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL285235A (enExample) * | 1961-11-08 | |||
| US3425111A (en) * | 1964-10-08 | 1969-02-04 | Trak Microwave Corp | Method of making cathodes by neutron bombardment |
| US3356912A (en) * | 1964-10-16 | 1967-12-05 | Gen Electric | Porous electrode |
-
1970
- 1970-03-10 GB GB1134670A patent/GB1309423A/en not_active Expired
- 1970-03-10 US US18176A patent/US3678325A/en not_active Expired - Lifetime
- 1970-03-13 FR FR7009158A patent/FR2034947B1/fr not_active Expired
- 1970-03-13 NL NL707003616A patent/NL149947B/xx unknown
- 1970-03-13 DE DE2012101A patent/DE2012101B2/de active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0299461A3 (en) * | 1987-07-15 | 1990-01-10 | Canon Kabushiki Kaisha | Electron-emitting device |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2034947A1 (enExample) | 1970-12-18 |
| DE2012101C3 (enExample) | 1975-10-09 |
| NL7003616A (enExample) | 1970-09-16 |
| DE2012101A1 (de) | 1970-09-24 |
| GB1309423A (en) | 1973-03-14 |
| FR2034947B1 (enExample) | 1974-09-20 |
| US3678325A (en) | 1972-07-18 |
| NL149947B (nl) | 1976-06-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C3 | Grant after two publication steps (3rd publication) | ||
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |