DE19681618T1 - Flüssigmaterialversorgungseinrichtung und Flüssigmaterialversorgungsverfahren - Google Patents

Flüssigmaterialversorgungseinrichtung und Flüssigmaterialversorgungsverfahren

Info

Publication number
DE19681618T1
DE19681618T1 DE19681618T DE19681618T DE19681618T1 DE 19681618 T1 DE19681618 T1 DE 19681618T1 DE 19681618 T DE19681618 T DE 19681618T DE 19681618 T DE19681618 T DE 19681618T DE 19681618 T1 DE19681618 T1 DE 19681618T1
Authority
DE
Germany
Prior art keywords
liquid material
material supply
supply device
supply method
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE19681618T
Other languages
English (en)
Inventor
Kazuhiro Nakagawa
Hiroyuki Hiraiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of DE19681618T1 publication Critical patent/DE19681618T1/de
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J4/00—Feed or outlet devices; Feed or outlet control devices
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/40—Carbon monoxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/1624—Destructible or deformable element controlled
    • Y10T137/1632—Destructible element
    • Y10T137/1692—Rupture disc
    • Y10T137/1714—Direct pressure causes disc to burst
    • Y10T137/1729—Dome shape
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3124—Plural units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86035—Combined with fluid receiver
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86131—Plural
    • Y10T137/86163—Parallel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
DE19681618T 1996-08-23 1996-08-23 Flüssigmaterialversorgungseinrichtung und Flüssigmaterialversorgungsverfahren Ceased DE19681618T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1996/002360 WO1998007509A1 (fr) 1996-08-23 1996-08-23 Procede et systeme d'alimentation en matiere liquide

Publications (1)

Publication Number Publication Date
DE19681618T1 true DE19681618T1 (de) 1998-10-15

Family

ID=14153692

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681618T Ceased DE19681618T1 (de) 1996-08-23 1996-08-23 Flüssigmaterialversorgungseinrichtung und Flüssigmaterialversorgungsverfahren

Country Status (3)

Country Link
US (1) US6116260A (de)
DE (1) DE19681618T1 (de)
WO (1) WO1998007509A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19932247C2 (de) * 1998-07-07 2001-02-01 Schott Glaswerke Verfahren und Anordnung zur Versorgung von Verbrauchsstellen mit Si-haltigem Rohstoff in Dampfform
US6739156B1 (en) * 1998-08-07 2004-05-25 Corning Incorporated Maintaining a plug-free system during a silica soot creation process
TW399148B (en) * 1999-09-09 2000-07-21 Winbond Electronics Corp Vacuum pipeline detection equipment
US6460404B1 (en) * 2000-10-12 2002-10-08 Chartered Semiconductor Manufacturing Ltd. Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool
JP2003338302A (ja) * 2002-05-21 2003-11-28 Nippon Soken Inc 水素供給システム
US20070251585A1 (en) * 2006-04-28 2007-11-01 David Paul Edwards Fluid distribution system
JP2010222290A (ja) * 2009-03-23 2010-10-07 Nippon Shokubai Co Ltd ボラジン化合物の充填方法
JPWO2010137625A1 (ja) * 2009-05-27 2012-11-15 ギガフォトン株式会社 ターゲット出力装置及び極端紫外光源装置
US8567299B2 (en) * 2010-11-22 2013-10-29 Vanair Manufacturing, Inc. Pressurized fluid delivery system and method of use
FR3040635B1 (fr) * 2015-09-07 2017-08-25 Commissariat Energie Atomique Dispositif de conversion d'un liquide en vapeur
JP6911546B2 (ja) * 2017-06-06 2021-07-28 栗田工業株式会社 希薄薬液製造装置
US11236866B2 (en) 2018-09-03 2022-02-01 Te-Ming Chiang Liquid transfer apparatus
JP7058627B2 (ja) * 2019-06-11 2022-04-22 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
JP7310373B2 (ja) * 2019-07-03 2023-07-19 住友電気工業株式会社 ガラス原料供給装置およびガラス原料供給装置のフィルタ交換方法
FR3129302A1 (fr) * 2021-11-25 2023-05-26 Universite Du Mans Dispositif d’inertage multi-voies en surpression

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2556313B2 (ja) * 1986-10-15 1996-11-20 キヤノン株式会社 薬液供給装置
JPS6422341A (en) * 1987-07-15 1989-01-25 Sumitomo Electric Industries Raw material feeder
JP2525838B2 (ja) * 1987-11-16 1996-08-21 日本板硝子株式会社 反射防止膜付着透明板
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals
US5417346A (en) * 1990-09-17 1995-05-23 Applied Chemical Solutions Process and apparatus for electronic control of the transfer and delivery of high purity chemicals

Also Published As

Publication number Publication date
US6116260A (en) 2000-09-12
WO1998007509A1 (fr) 1998-02-26

Similar Documents

Publication Publication Date Title
DE69814562D1 (de) Druckvorrichtung mit Flüssigkeitsausstoss und zugehöriges Flüssigkeitsversorgungsverfahren
DE69734300D1 (de) Vorrichtung zum Aufbewahren und Auftragen
DE69534233D1 (de) Vorrichtungen zum bestimmen und markieren von gewebe
DE69826564D1 (de) Druckvorrichtung und Druckverfahren
DE69734126D1 (de) Druckverfahren und Gerät
DE69830628D1 (de) Druckgerät und Druckverfahren
DE69516366T2 (de) Messverfahren und Messvorrichtung
DE69702384D1 (de) Flüssigkeitsversorgungsvorrichtung
DE69923386D1 (de) Bauelement mit magnetischem Material und Adressierverfahren dafür
DE19581386T1 (de) Hemmsteg-Schneidevorrichtung und Hemmsteg-Schneideverfahren
DE69834016D1 (de) Druckgerät und Druckverfahren
DE69820278D1 (de) Mischverfahren und mischvorrichtung
DE69819407D1 (de) Messverfahren und Messvorrichtung zur Durchführung des Verfahrens
DE69829919D1 (de) Polierverfahren und Vorrichtung
DE69826804D1 (de) Flüssigkeitverteilvorrichtung und Verfahren
DE69517913T2 (de) Fixiervorrichtung und Fixierverfahren
DE19681618T1 (de) Flüssigmaterialversorgungseinrichtung und Flüssigmaterialversorgungsverfahren
DE69430145D1 (de) Gerät zum ventilieren und aspirieren
DE69615544T2 (de) Anzeigeverfahren und anzeigevorrichtung
DE69833405D1 (de) Gerät zum Heizen und Kühlen
DE69833625D1 (de) Druckgerät und Druckverfahren
DE69737490D1 (de) Anzeigegerät und dessen Herstellungsverfahren
DE69610800D1 (de) Flüssigkristallvorrichtung und Flüssigkristallapparat
DE69602288D1 (de) Flüssigkristallzusammensetzung, Flüssigkristallvorrichtung und Flüssigkristallapparat
DE69602466D1 (de) Flüssigkristallzusammensetzung, Flüssigkristallvorrichtung und Flüssigkristallapparat

Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8131 Rejection