DE1938992A1 - Verfahren bzw. Einrichtung zum Zufuehren einer Fluessigkeit zu einem innerhalb einer Vakuumkammer angeordneten Verdampfungsgefaess - Google Patents
Verfahren bzw. Einrichtung zum Zufuehren einer Fluessigkeit zu einem innerhalb einer Vakuumkammer angeordneten VerdampfungsgefaessInfo
- Publication number
- DE1938992A1 DE1938992A1 DE19691938992 DE1938992A DE1938992A1 DE 1938992 A1 DE1938992 A1 DE 1938992A1 DE 19691938992 DE19691938992 DE 19691938992 DE 1938992 A DE1938992 A DE 1938992A DE 1938992 A1 DE1938992 A1 DE 1938992A1
- Authority
- DE
- Germany
- Prior art keywords
- liquid
- chamber
- feed
- vacuum chamber
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims description 65
- 238000001704 evaporation Methods 0.000 title claims description 23
- 230000008020 evaporation Effects 0.000 title claims description 23
- 238000000034 method Methods 0.000 title claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 3
- 210000000056 organ Anatomy 0.000 claims description 2
- 238000013016 damping Methods 0.000 claims 1
- 229910001338 liquidmetal Inorganic materials 0.000 claims 1
- 239000000155 melt Substances 0.000 claims 1
- 244000239635 ulla Species 0.000 claims 1
- 239000000463 material Substances 0.000 description 8
- 239000012530 fluid Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85954—Closed circulating system
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86236—Tank with movable or adjustable outlet or overflow pipe
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74974168A | 1968-08-02 | 1968-08-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1938992A1 true DE1938992A1 (de) | 1970-02-05 |
Family
ID=25014982
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691938992 Pending DE1938992A1 (de) | 1968-08-02 | 1969-07-31 | Verfahren bzw. Einrichtung zum Zufuehren einer Fluessigkeit zu einem innerhalb einer Vakuumkammer angeordneten Verdampfungsgefaess |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3581766A (enrdf_load_stackoverflow) |
| JP (1) | JPS4841416B1 (enrdf_load_stackoverflow) |
| DE (1) | DE1938992A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1240773A (enrdf_load_stackoverflow) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3901182A (en) * | 1972-05-18 | 1975-08-26 | Harris Corp | Silicon source feed process |
| JPS4931517U (enrdf_load_stackoverflow) * | 1972-06-16 | 1974-03-19 | ||
| JPS5385738A (en) * | 1977-01-07 | 1978-07-28 | Nippon Steel Corp | Device of feeding molten metal to vacuum chamber |
| JPH0444306U (enrdf_load_stackoverflow) * | 1990-08-10 | 1992-04-15 | ||
| LV13383B (en) * | 2004-05-27 | 2006-02-20 | Sidrabe As | Method and device for vacuum vaporization metals or alloys |
| EP2087145B1 (de) * | 2006-09-29 | 2011-09-28 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsverfahren und anordnung zur durchführung des verfahrens |
| RU2348738C2 (ru) * | 2007-04-04 | 2009-03-10 | Государственное образовательное учреждение высшего профессионального образования Самарский государственный аэрокосмический университет им. академика С.П. Королева | Испаритель многокомпонентных растворов |
| AU2017260148B2 (en) | 2016-05-03 | 2022-08-25 | Tata Steel Nederland Technology B.V. | Method to operate an apparatus for feeding liquid metal to an evaporator device |
| AU2017260147B2 (en) | 2016-05-03 | 2022-08-25 | Tata Steel Nederland Technology B.V. | Apparatus for feeding a liquid material to an evaporator device |
| CN109154070B (zh) | 2016-05-03 | 2022-03-29 | 塔塔钢铁荷兰科技有限责任公司 | 用于控制电磁泵的温度的方法 |
| EP3884079A1 (en) * | 2018-11-20 | 2021-09-29 | Bobst Manchester Limited | Evaporator boat control system, pvd machine and method of operating the pvd machine |
| KR20200076389A (ko) * | 2018-12-19 | 2020-06-29 | 주식회사 포스코 | Pvd 도금 공정에서의 도금층 제어 장치 및 방법 |
| KR20230019194A (ko) * | 2020-06-04 | 2023-02-07 | 어플라이드 머티어리얼스, 인코포레이티드 | 진공 챔버에서 기판을 코팅하기 위한 기상 증착 장치 및 방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2548696A (en) * | 1947-10-20 | 1951-04-10 | Dow Chemical Co | Spark-gap liquid level indicator |
| US2690764A (en) * | 1951-01-26 | 1954-10-05 | Separator Ab | Apparatus of the overflow type for regulating the continuous flow of liquids throughcontainers |
| US3059612A (en) * | 1959-10-19 | 1962-10-23 | Wean Engineering Co Inc | Vacuum coating apparatus |
| US3050798A (en) * | 1960-06-13 | 1962-08-28 | Strategic Materials Corp | Process for continuous casting and vacuum degasification |
| US3408224A (en) * | 1964-06-25 | 1968-10-29 | Pennsalt Chemicals Corp | Vapor coating employing degassing of coating metal |
| US3447951A (en) * | 1965-10-20 | 1969-06-03 | Pennsalt Chemicals Corp | Cyclone separation of particles in vapor coating |
-
1968
- 1968-08-02 US US749741A patent/US3581766A/en not_active Expired - Lifetime
-
1969
- 1969-07-23 GB GB37020/69A patent/GB1240773A/en not_active Expired
- 1969-07-31 DE DE19691938992 patent/DE1938992A1/de active Pending
- 1969-08-02 JP JP44061372A patent/JPS4841416B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1240773A (en) | 1971-07-28 |
| JPS4841416B1 (enrdf_load_stackoverflow) | 1973-12-06 |
| US3581766A (en) | 1971-06-01 |
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