GB1240773A - Method and apparatus for supplying liquid to a vacuum chamber - Google Patents

Method and apparatus for supplying liquid to a vacuum chamber

Info

Publication number
GB1240773A
GB1240773A GB37020/69A GB3702069A GB1240773A GB 1240773 A GB1240773 A GB 1240773A GB 37020/69 A GB37020/69 A GB 37020/69A GB 3702069 A GB3702069 A GB 3702069A GB 1240773 A GB1240773 A GB 1240773A
Authority
GB
United Kingdom
Prior art keywords
liquid
chamber
receptacle
pressure
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB37020/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jones and Laughlin Steel Corp
Original Assignee
Jones and Laughlin Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jones and Laughlin Steel Corp filed Critical Jones and Laughlin Steel Corp
Publication of GB1240773A publication Critical patent/GB1240773A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85954—Closed circulating system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86236—Tank with movable or adjustable outlet or overflow pipe

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
GB37020/69A 1968-08-02 1969-07-23 Method and apparatus for supplying liquid to a vacuum chamber Expired GB1240773A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74974168A 1968-08-02 1968-08-02

Publications (1)

Publication Number Publication Date
GB1240773A true GB1240773A (en) 1971-07-28

Family

ID=25014982

Family Applications (1)

Application Number Title Priority Date Filing Date
GB37020/69A Expired GB1240773A (en) 1968-08-02 1969-07-23 Method and apparatus for supplying liquid to a vacuum chamber

Country Status (4)

Country Link
US (1) US3581766A (enrdf_load_stackoverflow)
JP (1) JPS4841416B1 (enrdf_load_stackoverflow)
DE (1) DE1938992A1 (enrdf_load_stackoverflow)
GB (1) GB1240773A (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3901182A (en) * 1972-05-18 1975-08-26 Harris Corp Silicon source feed process
JPS4931517U (enrdf_load_stackoverflow) * 1972-06-16 1974-03-19
JPS5385738A (en) * 1977-01-07 1978-07-28 Nippon Steel Corp Device of feeding molten metal to vacuum chamber
JPH0444306U (enrdf_load_stackoverflow) * 1990-08-10 1992-04-15
LV13383B (en) * 2004-05-27 2006-02-20 Sidrabe As Method and device for vacuum vaporization metals or alloys
EP2087145B1 (de) * 2006-09-29 2011-09-28 Von Ardenne Anlagentechnik Gmbh Vakuumbeschichtungsverfahren und anordnung zur durchführung des verfahrens
RU2348738C2 (ru) * 2007-04-04 2009-03-10 Государственное образовательное учреждение высшего профессионального образования Самарский государственный аэрокосмический университет им. академика С.П. Королева Испаритель многокомпонентных растворов
AU2017260148B2 (en) 2016-05-03 2022-08-25 Tata Steel Nederland Technology B.V. Method to operate an apparatus for feeding liquid metal to an evaporator device
AU2017260147B2 (en) 2016-05-03 2022-08-25 Tata Steel Nederland Technology B.V. Apparatus for feeding a liquid material to an evaporator device
CN109154070B (zh) 2016-05-03 2022-03-29 塔塔钢铁荷兰科技有限责任公司 用于控制电磁泵的温度的方法
EP3884079A1 (en) * 2018-11-20 2021-09-29 Bobst Manchester Limited Evaporator boat control system, pvd machine and method of operating the pvd machine
KR20200076389A (ko) * 2018-12-19 2020-06-29 주식회사 포스코 Pvd 도금 공정에서의 도금층 제어 장치 및 방법
KR20230019194A (ko) * 2020-06-04 2023-02-07 어플라이드 머티어리얼스, 인코포레이티드 진공 챔버에서 기판을 코팅하기 위한 기상 증착 장치 및 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2548696A (en) * 1947-10-20 1951-04-10 Dow Chemical Co Spark-gap liquid level indicator
US2690764A (en) * 1951-01-26 1954-10-05 Separator Ab Apparatus of the overflow type for regulating the continuous flow of liquids throughcontainers
US3059612A (en) * 1959-10-19 1962-10-23 Wean Engineering Co Inc Vacuum coating apparatus
US3050798A (en) * 1960-06-13 1962-08-28 Strategic Materials Corp Process for continuous casting and vacuum degasification
US3408224A (en) * 1964-06-25 1968-10-29 Pennsalt Chemicals Corp Vapor coating employing degassing of coating metal
US3447951A (en) * 1965-10-20 1969-06-03 Pennsalt Chemicals Corp Cyclone separation of particles in vapor coating

Also Published As

Publication number Publication date
JPS4841416B1 (enrdf_load_stackoverflow) 1973-12-06
US3581766A (en) 1971-06-01
DE1938992A1 (de) 1970-02-05

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