DE1905128A1 - Profilierte Metallmembranen fuer lineare Druckmessung mittels Piezowiderstand,insbesondere fuer kleine Druecke - Google Patents
Profilierte Metallmembranen fuer lineare Druckmessung mittels Piezowiderstand,insbesondere fuer kleine DrueckeInfo
- Publication number
- DE1905128A1 DE1905128A1 DE19691905128 DE1905128A DE1905128A1 DE 1905128 A1 DE1905128 A1 DE 1905128A1 DE 19691905128 DE19691905128 DE 19691905128 DE 1905128 A DE1905128 A DE 1905128A DE 1905128 A1 DE1905128 A1 DE 1905128A1
- Authority
- DE
- Germany
- Prior art keywords
- membrane
- edge zone
- profiled metal
- piezoresistance
- profiled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 title claims description 30
- 239000002184 metal Substances 0.000 title claims description 11
- 238000009530 blood pressure measurement Methods 0.000 title claims description 6
- 239000010410 layer Substances 0.000 claims description 17
- 239000004020 conductor Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000010276 construction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 210000001161 mammalian embryo Anatomy 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD13417068 | 1968-08-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1905128A1 true DE1905128A1 (de) | 1970-04-16 |
Family
ID=5480298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691905128 Pending DE1905128A1 (de) | 1968-08-15 | 1969-02-03 | Profilierte Metallmembranen fuer lineare Druckmessung mittels Piezowiderstand,insbesondere fuer kleine Druecke |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE1905128A1 (enrdf_load_stackoverflow) |
| SU (1) | SU433694A3 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4241325A (en) * | 1979-03-21 | 1980-12-23 | Micro Gage, Inc. | Displacement sensing transducer |
| FR2494439A1 (fr) * | 1980-11-20 | 1982-05-21 | Leim | Capteur de pression |
-
1969
- 1969-02-03 DE DE19691905128 patent/DE1905128A1/de active Pending
- 1969-04-03 SU SU1323175A patent/SU433694A3/ru active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4241325A (en) * | 1979-03-21 | 1980-12-23 | Micro Gage, Inc. | Displacement sensing transducer |
| FR2494439A1 (fr) * | 1980-11-20 | 1982-05-21 | Leim | Capteur de pression |
Also Published As
| Publication number | Publication date |
|---|---|
| SU433694A3 (enrdf_load_stackoverflow) | 1974-06-25 |
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