DE1905128A1 - Profilierte Metallmembranen fuer lineare Druckmessung mittels Piezowiderstand,insbesondere fuer kleine Druecke - Google Patents

Profilierte Metallmembranen fuer lineare Druckmessung mittels Piezowiderstand,insbesondere fuer kleine Druecke

Info

Publication number
DE1905128A1
DE1905128A1 DE19691905128 DE1905128A DE1905128A1 DE 1905128 A1 DE1905128 A1 DE 1905128A1 DE 19691905128 DE19691905128 DE 19691905128 DE 1905128 A DE1905128 A DE 1905128A DE 1905128 A1 DE1905128 A1 DE 1905128A1
Authority
DE
Germany
Prior art keywords
membrane
edge zone
profiled metal
piezoresistance
profiled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19691905128
Other languages
German (de)
English (en)
Inventor
Dipl-Phys Heinz Kasten
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Regelungstechnik
Original Assignee
Institut fuer Regelungstechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut fuer Regelungstechnik filed Critical Institut fuer Regelungstechnik
Publication of DE1905128A1 publication Critical patent/DE1905128A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
DE19691905128 1968-08-15 1969-02-03 Profilierte Metallmembranen fuer lineare Druckmessung mittels Piezowiderstand,insbesondere fuer kleine Druecke Pending DE1905128A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD13417068 1968-08-15

Publications (1)

Publication Number Publication Date
DE1905128A1 true DE1905128A1 (de) 1970-04-16

Family

ID=5480298

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19691905128 Pending DE1905128A1 (de) 1968-08-15 1969-02-03 Profilierte Metallmembranen fuer lineare Druckmessung mittels Piezowiderstand,insbesondere fuer kleine Druecke

Country Status (2)

Country Link
DE (1) DE1905128A1 (enrdf_load_stackoverflow)
SU (1) SU433694A3 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4241325A (en) * 1979-03-21 1980-12-23 Micro Gage, Inc. Displacement sensing transducer
FR2494439A1 (fr) * 1980-11-20 1982-05-21 Leim Capteur de pression

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4241325A (en) * 1979-03-21 1980-12-23 Micro Gage, Inc. Displacement sensing transducer
FR2494439A1 (fr) * 1980-11-20 1982-05-21 Leim Capteur de pression

Also Published As

Publication number Publication date
SU433694A3 (enrdf_load_stackoverflow) 1974-06-25

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