SU433694A3 - - Google Patents

Info

Publication number
SU433694A3
SU433694A3 SU1323175A SU1323175A SU433694A3 SU 433694 A3 SU433694 A3 SU 433694A3 SU 1323175 A SU1323175 A SU 1323175A SU 1323175 A SU1323175 A SU 1323175A SU 433694 A3 SU433694 A3 SU 433694A3
Authority
SU
USSR - Soviet Union
Prior art keywords
membrane
pressure
layer
measuring
layers
Prior art date
Application number
SU1323175A
Other languages
English (en)
Russian (ru)
Original Assignee
Иностранец Хайнц Кастен
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Иностранец Хайнц Кастен filed Critical Иностранец Хайнц Кастен
Application granted granted Critical
Publication of SU433694A3 publication Critical patent/SU433694A3/ru

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0044—Constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
SU1323175A 1968-08-15 1969-04-03 SU433694A3 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD13417068 1968-08-15

Publications (1)

Publication Number Publication Date
SU433694A3 true SU433694A3 (enrdf_load_stackoverflow) 1974-06-25

Family

ID=5480298

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1323175A SU433694A3 (enrdf_load_stackoverflow) 1968-08-15 1969-04-03

Country Status (2)

Country Link
DE (1) DE1905128A1 (enrdf_load_stackoverflow)
SU (1) SU433694A3 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4241325A (en) * 1979-03-21 1980-12-23 Micro Gage, Inc. Displacement sensing transducer
FR2494439A1 (fr) * 1980-11-20 1982-05-21 Leim Capteur de pression

Also Published As

Publication number Publication date
DE1905128A1 (de) 1970-04-16

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