DE1761416A1 - Optische Formabtastvorrichtung - Google Patents

Optische Formabtastvorrichtung

Info

Publication number
DE1761416A1
DE1761416A1 DE19681761416 DE1761416A DE1761416A1 DE 1761416 A1 DE1761416 A1 DE 1761416A1 DE 19681761416 DE19681761416 DE 19681761416 DE 1761416 A DE1761416 A DE 1761416A DE 1761416 A1 DE1761416 A1 DE 1761416A1
Authority
DE
Germany
Prior art keywords
light
lens
scattered
luminous flux
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19681761416
Other languages
German (de)
English (en)
Inventor
Teissier Francois Marie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Industriel des Lasers CILAS SA
Original Assignee
Compagnie Industriel des Lasers CILAS SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Industriel des Lasers CILAS SA filed Critical Compagnie Industriel des Lasers CILAS SA
Publication of DE1761416A1 publication Critical patent/DE1761416A1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE19681761416 1967-05-18 1968-05-17 Optische Formabtastvorrichtung Pending DE1761416A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR106895A FR1534762A (fr) 1967-05-18 1967-05-18 Procédé et dispositif de palpage optique

Publications (1)

Publication Number Publication Date
DE1761416A1 true DE1761416A1 (de) 1971-07-01

Family

ID=8631083

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681761416 Pending DE1761416A1 (de) 1967-05-18 1968-05-17 Optische Formabtastvorrichtung

Country Status (6)

Country Link
BE (1) BE715248A (enrdf_load_stackoverflow)
DE (1) DE1761416A1 (enrdf_load_stackoverflow)
FR (1) FR1534762A (enrdf_load_stackoverflow)
GB (1) GB1206668A (enrdf_load_stackoverflow)
LU (1) LU56099A1 (enrdf_load_stackoverflow)
NL (1) NL6806977A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015506B1 (en) * 1979-03-06 1984-06-06 Dieter Dr. Röss Change of distance measuring apparatus comprising a laser light source
CN111854604A (zh) * 2020-07-28 2020-10-30 西安中科微精光子制造科技有限公司 一种通过聚焦激光束测量气膜孔的形位参数的方法及系统

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2096880A1 (en) * 1970-06-11 1972-03-03 Mitsubishi Electric Corp Laser beam machining appts - automatically adjusted using control beam passing through semi-transparent mirrors
FR2325018A1 (fr) * 1975-06-23 1977-04-15 Ibm Dispositif de mesure d'intervalle pour definir la distance entre deux faces ou plus
FR2503860A1 (fr) * 1981-04-10 1982-10-15 Clemessy Capteur optique pour la reconnaissance de lignes, de discontinuites, notamment de fentes, utilisable plus particulierement pour la commande d'un organe d'execution
EP0086540A1 (fr) * 1982-02-17 1983-08-24 CENTRE DE RECHERCHES METALLURGIQUES CENTRUM VOOR RESEARCH IN DE METALLURGIE Association sans but lucratif Procédé de réglage d'un traitement superficiel par faisceau laser
FR2548796B1 (fr) * 1983-07-08 1985-11-22 Comp Generale Electricite Dispositif optique pour determiner la position et la forme de la surface d'un objet
IT1198660B (it) * 1983-08-02 1988-12-21 Ottica Ist Naz Profilometro ottico multifocale per dispersione
US4748335A (en) * 1985-04-19 1988-05-31 Siscan Systems, Inc. Method and aparatus for determining surface profiles
US4707610A (en) * 1985-07-03 1987-11-17 Siscan Systems, Inc. Method and apparatus for measuring surface profiles
CH669663A5 (enrdf_load_stackoverflow) * 1985-12-17 1989-03-31 Schweiz Eidgenossenschaft Sin
US5206699A (en) * 1988-05-06 1993-04-27 Gersan Establishment Sensing a narrow frequency band of radiation and gemstones
GB8826224D0 (en) * 1988-11-09 1988-12-14 Gersan Anstalt Sensing shape of object
US20030227614A1 (en) * 2002-06-05 2003-12-11 Taminiau August A. Laser machining apparatus with automatic focusing
GB2405466B (en) 2003-08-27 2006-01-25 Teraview Ltd Method and apparatus for investigating a non-planner sample
DE102007035715A1 (de) 2006-12-27 2008-07-03 Robert Bosch Gmbh Laserstrahlbearbeitungsvorrichtung sowie Verfahren zum Justieren der Fokuslage
CN101573205A (zh) * 2006-12-27 2009-11-04 罗伯特·博世有限公司 激光束焊接装置以及激光束焊接方法
KR20220041170A (ko) 2019-08-30 2022-03-31 에이에스엠엘 네델란즈 비.브이. 하전 입자 빔 시스템의 레벨 변동을 측정하기 위한 자기 차별화 공초점 틸트 센서

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0015506B1 (en) * 1979-03-06 1984-06-06 Dieter Dr. Röss Change of distance measuring apparatus comprising a laser light source
CN111854604A (zh) * 2020-07-28 2020-10-30 西安中科微精光子制造科技有限公司 一种通过聚焦激光束测量气膜孔的形位参数的方法及系统
CN111854604B (zh) * 2020-07-28 2022-03-22 西安中科微精光子制造科技有限公司 一种通过聚焦激光束测量气膜孔的形位参数的方法及系统

Also Published As

Publication number Publication date
LU56099A1 (enrdf_load_stackoverflow) 1970-01-14
FR1534762A (fr) 1968-08-02
NL6806977A (enrdf_load_stackoverflow) 1968-11-19
GB1206668A (en) 1970-09-30
BE715248A (enrdf_load_stackoverflow) 1968-11-18

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