GB1206668A - Optical contour tracing arrangement - Google Patents

Optical contour tracing arrangement

Info

Publication number
GB1206668A
GB1206668A GB2345068A GB2345068A GB1206668A GB 1206668 A GB1206668 A GB 1206668A GB 2345068 A GB2345068 A GB 2345068A GB 2345068 A GB2345068 A GB 2345068A GB 1206668 A GB1206668 A GB 1206668A
Authority
GB
United Kingdom
Prior art keywords
lens
photo
point
arrangement
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2345068A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Industriel des Lasers CILAS SA
Original Assignee
Compagnie Industriel des Lasers CILAS SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Industriel des Lasers CILAS SA filed Critical Compagnie Industriel des Lasers CILAS SA
Publication of GB1206668A publication Critical patent/GB1206668A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GB2345068A 1967-05-18 1968-05-16 Optical contour tracing arrangement Expired GB1206668A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR106895A FR1534762A (fr) 1967-05-18 1967-05-18 Procédé et dispositif de palpage optique

Publications (1)

Publication Number Publication Date
GB1206668A true GB1206668A (en) 1970-09-30

Family

ID=8631083

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2345068A Expired GB1206668A (en) 1967-05-18 1968-05-16 Optical contour tracing arrangement

Country Status (6)

Country Link
BE (1) BE715248A (enrdf_load_stackoverflow)
DE (1) DE1761416A1 (enrdf_load_stackoverflow)
FR (1) FR1534762A (enrdf_load_stackoverflow)
GB (1) GB1206668A (enrdf_load_stackoverflow)
LU (1) LU56099A1 (enrdf_load_stackoverflow)
NL (1) NL6806977A (enrdf_load_stackoverflow)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242151A1 (en) * 1986-04-11 1987-10-21 SiScan Systems, Inc. Method and apparatus for measuring linewidths by surface profiles
US4748335A (en) * 1985-04-19 1988-05-31 Siscan Systems, Inc. Method and aparatus for determining surface profiles
US5076698A (en) * 1988-11-09 1991-12-31 Anstalt Gersan Sensing the shape of an object
US5206699A (en) * 1988-05-06 1993-04-27 Gersan Establishment Sensing a narrow frequency band of radiation and gemstones
WO2003103886A3 (en) * 2002-06-05 2004-03-11 Coherent Inc AUTOMATIC FOCUSING LASER MACHINING APPARATUS
GB2405466A (en) * 2003-08-27 2005-03-02 Teraview Ltd Investigating a sample, particularly a pharmaceutical tablet
WO2008080728A1 (de) 2006-12-27 2008-07-10 Robert Bosch Gmbh Laserstrahlbearbeitungsvorrichtung mit mittel zum abbilden der reflektierten ringgeformten laserstrahlung auf einer sensoreinheit sowie verfahren zum justieren der fokuslage
CN101573204B (zh) * 2006-12-27 2014-01-15 罗伯特.博世有限公司 激光束加工装置以及聚焦位置的调节方法
CN114450554A (zh) * 2019-08-30 2022-05-06 Asml荷兰有限公司 用于测量带电粒子束系统中的水平变化的自差动共焦倾斜传感器

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2096880A1 (en) * 1970-06-11 1972-03-03 Mitsubishi Electric Corp Laser beam machining appts - automatically adjusted using control beam passing through semi-transparent mirrors
FR2325018A1 (fr) * 1975-06-23 1977-04-15 Ibm Dispositif de mesure d'intervalle pour definir la distance entre deux faces ou plus
DE2908757C2 (de) * 1979-03-06 1986-10-16 Baumgartner, Viktor, 8028 Taufkirchen Abstandsänderungs-Meßanordnung
FR2503860A1 (fr) * 1981-04-10 1982-10-15 Clemessy Capteur optique pour la reconnaissance de lignes, de discontinuites, notamment de fentes, utilisable plus particulierement pour la commande d'un organe d'execution
EP0086540A1 (fr) * 1982-02-17 1983-08-24 CENTRE DE RECHERCHES METALLURGIQUES CENTRUM VOOR RESEARCH IN DE METALLURGIE Association sans but lucratif Procédé de réglage d'un traitement superficiel par faisceau laser
FR2548796B1 (fr) * 1983-07-08 1985-11-22 Comp Generale Electricite Dispositif optique pour determiner la position et la forme de la surface d'un objet
IT1198660B (it) * 1983-08-02 1988-12-21 Ottica Ist Naz Profilometro ottico multifocale per dispersione
CH669663A5 (enrdf_load_stackoverflow) * 1985-12-17 1989-03-31 Schweiz Eidgenossenschaft Sin
CN111854604B (zh) * 2020-07-28 2022-03-22 西安中科微精光子制造科技有限公司 一种通过聚焦激光束测量气膜孔的形位参数的方法及系统

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4748335A (en) * 1985-04-19 1988-05-31 Siscan Systems, Inc. Method and aparatus for determining surface profiles
EP0242151A1 (en) * 1986-04-11 1987-10-21 SiScan Systems, Inc. Method and apparatus for measuring linewidths by surface profiles
JP2586902B2 (ja) 1986-04-11 1997-03-05 サイスキヤン・システムズ・インク 表面プロフィール測定装置および方法
US5206699A (en) * 1988-05-06 1993-04-27 Gersan Establishment Sensing a narrow frequency band of radiation and gemstones
US5076698A (en) * 1988-11-09 1991-12-31 Anstalt Gersan Sensing the shape of an object
WO2003103886A3 (en) * 2002-06-05 2004-03-11 Coherent Inc AUTOMATIC FOCUSING LASER MACHINING APPARATUS
GB2405466A (en) * 2003-08-27 2005-03-02 Teraview Ltd Investigating a sample, particularly a pharmaceutical tablet
GB2405466B (en) * 2003-08-27 2006-01-25 Teraview Ltd Method and apparatus for investigating a non-planner sample
US8665423B2 (en) 2003-08-27 2014-03-04 Teraview Limited Method and apparatus for investigating a non-planar sample
WO2008080728A1 (de) 2006-12-27 2008-07-10 Robert Bosch Gmbh Laserstrahlbearbeitungsvorrichtung mit mittel zum abbilden der reflektierten ringgeformten laserstrahlung auf einer sensoreinheit sowie verfahren zum justieren der fokuslage
US8546725B2 (en) 2006-12-27 2013-10-01 Robert Bosch Gmbh Laser beam machining device and method for adjusting the focal position
CN101573204B (zh) * 2006-12-27 2014-01-15 罗伯特.博世有限公司 激光束加工装置以及聚焦位置的调节方法
CN114450554A (zh) * 2019-08-30 2022-05-06 Asml荷兰有限公司 用于测量带电粒子束系统中的水平变化的自差动共焦倾斜传感器
US12142456B2 (en) 2019-08-30 2024-11-12 Asml Netherlands B.V. Self-differential confocal tilt sensor for measuring level variation in charged particle beam system

Also Published As

Publication number Publication date
DE1761416A1 (de) 1971-07-01
LU56099A1 (enrdf_load_stackoverflow) 1970-01-14
FR1534762A (fr) 1968-08-02
NL6806977A (enrdf_load_stackoverflow) 1968-11-19
BE715248A (enrdf_load_stackoverflow) 1968-11-18

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees