DE1615287A1 - Vorrichtung zur Aufbringung duenner Schichten auf Glas oder andere Materialien unter Vakuum - Google Patents
Vorrichtung zur Aufbringung duenner Schichten auf Glas oder andere Materialien unter VakuumInfo
- Publication number
- DE1615287A1 DE1615287A1 DE19671615287 DE1615287A DE1615287A1 DE 1615287 A1 DE1615287 A1 DE 1615287A1 DE 19671615287 DE19671615287 DE 19671615287 DE 1615287 A DE1615287 A DE 1615287A DE 1615287 A1 DE1615287 A1 DE 1615287A1
- Authority
- DE
- Germany
- Prior art keywords
- carrier
- coating
- chamber
- electrodes
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
LU52106A LU52106A1 (xx) | 1966-10-05 | 1966-10-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1615287A1 true DE1615287A1 (de) | 1970-06-11 |
Family
ID=19724990
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19671615287 Pending DE1615287A1 (de) | 1966-10-05 | 1967-09-21 | Vorrichtung zur Aufbringung duenner Schichten auf Glas oder andere Materialien unter Vakuum |
Country Status (11)
Country | Link |
---|---|
US (1) | US3616451A (xx) |
AT (2) | AT280514B (xx) |
BE (1) | BE704031A (xx) |
CH (1) | CH501063A (xx) |
DE (1) | DE1615287A1 (xx) |
ES (1) | ES345149A1 (xx) |
FI (1) | FI46636C (xx) |
FR (1) | FR1556228A (xx) |
GB (1) | GB1194428A (xx) |
LU (1) | LU52106A1 (xx) |
NL (1) | NL6713182A (xx) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3767559A (en) * | 1970-06-24 | 1973-10-23 | Eastman Kodak Co | Sputtering apparatus with accordion pleated anode means |
FR2098563A5 (xx) * | 1970-07-10 | 1972-03-10 | Progil | |
JPH0733576B2 (ja) * | 1989-11-29 | 1995-04-12 | 株式会社日立製作所 | スパツタ装置、及びターゲツト交換装置、並びにその交換方法 |
JPH05804A (ja) * | 1990-08-01 | 1993-01-08 | Sumitomo Electric Ind Ltd | 大面積複合酸化物超電導薄膜の成膜装置 |
DE4040856A1 (de) * | 1990-12-20 | 1992-06-25 | Leybold Ag | Zerstaeubungsanlage |
US5292419A (en) * | 1990-12-20 | 1994-03-08 | Leybold Aktiengesellschaft | Sputtering unit |
US5279724A (en) * | 1991-12-26 | 1994-01-18 | Xerox Corporation | Dual sputtering source |
US5322606A (en) * | 1991-12-26 | 1994-06-21 | Xerox Corporation | Use of rotary solenoid as a shutter actuator on a rotating arm |
GB9405442D0 (en) * | 1994-03-19 | 1994-05-04 | Applied Vision Ltd | Apparatus for coating substrates |
US6045671A (en) * | 1994-10-18 | 2000-04-04 | Symyx Technologies, Inc. | Systems and methods for the combinatorial synthesis of novel materials |
DE19830223C1 (de) * | 1998-07-07 | 1999-11-04 | Techno Coat Oberflaechentechni | Vorrichtung und Verfahren zum mehrlagigen PVD - Beschichten von Substraten |
US6833031B2 (en) * | 2000-03-21 | 2004-12-21 | Wavezero, Inc. | Method and device for coating a substrate |
JP2003141719A (ja) * | 2001-10-30 | 2003-05-16 | Anelva Corp | スパッタリング装置及び薄膜形成方法 |
JP4066044B2 (ja) * | 2002-11-08 | 2008-03-26 | 信行 高橋 | 成膜方法及びスパッタ装置 |
CA2564539C (en) * | 2005-11-14 | 2014-05-06 | Sulzer Metco Coatings B.V. | A method for coating of a base body with a platinum modified aluminide ptmal by means of a physical deposition out of the gas phase |
US8287647B2 (en) * | 2007-04-17 | 2012-10-16 | Lam Research Corporation | Apparatus and method for atomic layer deposition |
KR100865475B1 (ko) * | 2007-08-30 | 2008-10-27 | 세메스 주식회사 | 노즐 어셈블리, 이를 갖는 처리액 공급 장치 및 이를이용하는 처리액 공급 방법 |
US10586689B2 (en) * | 2009-07-31 | 2020-03-10 | Guardian Europe S.A.R.L. | Sputtering apparatus including cathode with rotatable targets, and related methods |
US20120027953A1 (en) * | 2010-07-28 | 2012-02-02 | Synos Technology, Inc. | Rotating Reactor Assembly for Depositing Film on Substrate |
US20130014700A1 (en) * | 2011-07-11 | 2013-01-17 | Hariharakeshava Sarpangala Hegde | Target shield designs in multi-target deposition system. |
US20160237555A1 (en) * | 2013-10-24 | 2016-08-18 | Meyer Burger (Germany) Ag | Multi-Magnetron Arrangement |
US11442132B2 (en) * | 2017-07-07 | 2022-09-13 | Nextracker Llc | Systems for and methods of positioning solar panels in an array of solar panels to efficiently capture sunlight |
-
1966
- 1966-10-05 LU LU52106A patent/LU52106A1/xx unknown
-
1967
- 1967-08-21 GB GB38382/67A patent/GB1194428A/en not_active Expired
- 1967-09-18 ES ES345149A patent/ES345149A1/es not_active Expired
- 1967-09-19 CH CH1308567A patent/CH501063A/fr not_active IP Right Cessation
- 1967-09-19 BE BE704031A patent/BE704031A/xx unknown
- 1967-09-21 FR FR121839A patent/FR1556228A/fr not_active Expired
- 1967-09-21 DE DE19671615287 patent/DE1615287A1/de active Pending
- 1967-09-26 AT AT874467A patent/AT280514B/de not_active IP Right Cessation
- 1967-09-27 NL NL6713182A patent/NL6713182A/xx unknown
- 1967-09-27 AT AT877167A patent/AT284365B/de not_active IP Right Cessation
- 1967-09-27 US US670853A patent/US3616451A/en not_active Expired - Lifetime
- 1967-10-05 FI FI672690A patent/FI46636C/fi active
Also Published As
Publication number | Publication date |
---|---|
BE704031A (xx) | 1968-03-19 |
US3616451A (en) | 1971-10-26 |
LU52106A1 (xx) | 1968-05-07 |
ES345149A1 (es) | 1968-11-16 |
FR1556228A (xx) | 1969-02-07 |
FI46636B (xx) | 1973-01-31 |
GB1194428A (en) | 1970-06-10 |
AT280514B (de) | 1970-04-10 |
FI46636C (fi) | 1973-05-08 |
NL6713182A (xx) | 1968-04-08 |
AT284365B (de) | 1970-09-10 |
CH501063A (fr) | 1970-12-31 |
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