DE1615055A1 - Verfahren zur Herstellung von Duennschicht-Bauelementen - Google Patents

Verfahren zur Herstellung von Duennschicht-Bauelementen

Info

Publication number
DE1615055A1
DE1615055A1 DE19661615055 DE1615055A DE1615055A1 DE 1615055 A1 DE1615055 A1 DE 1615055A1 DE 19661615055 DE19661615055 DE 19661615055 DE 1615055 A DE1615055 A DE 1615055A DE 1615055 A1 DE1615055 A1 DE 1615055A1
Authority
DE
Germany
Prior art keywords
layer
conductive
resistor
layers
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19661615055
Other languages
German (de)
English (en)
Inventor
Hanfmann Alexander Maxim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Inc
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of DE1615055A1 publication Critical patent/DE1615055A1/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/093—Laser beam treatment in general
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49099—Coating resistive material on a base

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
DE19661615055 1965-08-30 1966-08-27 Verfahren zur Herstellung von Duennschicht-Bauelementen Pending DE1615055A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US483594A US3400456A (en) 1965-08-30 1965-08-30 Methods of manufacturing thin film components

Publications (1)

Publication Number Publication Date
DE1615055A1 true DE1615055A1 (de) 1970-05-14

Family

ID=23920705

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19661615055 Pending DE1615055A1 (de) 1965-08-30 1966-08-27 Verfahren zur Herstellung von Duennschicht-Bauelementen

Country Status (6)

Country Link
US (1) US3400456A (cg-RX-API-DMAC7.html)
BE (1) BE686115A (cg-RX-API-DMAC7.html)
DE (1) DE1615055A1 (cg-RX-API-DMAC7.html)
GB (1) GB1163756A (cg-RX-API-DMAC7.html)
NL (1) NL6612084A (cg-RX-API-DMAC7.html)
SE (1) SE325631B (cg-RX-API-DMAC7.html)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3584183A (en) * 1968-10-03 1971-06-08 North American Rockwell Laser encoding of diode arrays
US3626143A (en) * 1969-04-02 1971-12-07 American Can Co Scoring of materials with laser energy
US3569801A (en) * 1969-06-02 1971-03-09 Gen Electric Thin film triodes and method of forming
US3870852A (en) * 1969-12-01 1975-03-11 Semperit Ag Process and apparatus for cutting rubberised stranded wire
US3850011A (en) * 1972-06-23 1974-11-26 Torrington Co Latch pivot for latch needle
DE2319899C3 (de) * 1973-04-19 1979-02-01 Draloric Electronic Gmbh, 8500 Nuernberg Verfahren zum Abgleich von Schichtwiderständen
JPS5213772A (en) * 1975-07-22 1977-02-02 Kyocera Corp Ic package
US4224500A (en) * 1978-11-20 1980-09-23 Western Electric Company, Inc. Method for adjusting electrical devices
US4873508A (en) * 1988-06-06 1989-10-10 Therm-O-Disc, Incorporated Variable resistance thermal protector and method of making same
US5059764A (en) * 1988-10-31 1991-10-22 Spectra-Physics, Inc. Diode-pumped, solid state laser-based workstation for precision materials processing and machining
GB8911392D0 (en) * 1989-05-18 1989-07-05 Humphreys Colin J Fabrication of electronic devices

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3330696A (en) * 1967-07-11 Method of fabricating thin film capacitors
US2710325A (en) * 1954-06-09 1955-06-07 Polytechnic Res & Dev Company Method and apparatus for making electric resistors
NL257531A (cg-RX-API-DMAC7.html) * 1960-03-30
US3071749A (en) * 1960-05-17 1963-01-01 Budd Co Adjustable resistors and method of making the same
US3119919A (en) * 1961-01-30 1964-01-28 Daystrom Inc Apparatus for the removal of portions of deposited metal films
US3261082A (en) * 1962-03-27 1966-07-19 Ibm Method of tailoring thin film impedance devices

Also Published As

Publication number Publication date
GB1163756A (en) 1969-09-10
SE325631B (cg-RX-API-DMAC7.html) 1970-07-06
NL6612084A (cg-RX-API-DMAC7.html) 1967-03-01
BE686115A (cg-RX-API-DMAC7.html) 1967-02-01
US3400456A (en) 1968-09-10

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