DE1590148B1 - Verfahren und vorrichtung zur herstellung von foto schablonen fuer gedruckte schaltungen - Google Patents

Verfahren und vorrichtung zur herstellung von foto schablonen fuer gedruckte schaltungen

Info

Publication number
DE1590148B1
DE1590148B1 DE19661590148 DE1590148A DE1590148B1 DE 1590148 B1 DE1590148 B1 DE 1590148B1 DE 19661590148 DE19661590148 DE 19661590148 DE 1590148 A DE1590148 A DE 1590148A DE 1590148 B1 DE1590148 B1 DE 1590148B1
Authority
DE
Germany
Prior art keywords
silhouette
silhouettes
exposure
carrier
photographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19661590148
Other languages
German (de)
English (en)
Inventor
Oliver Cyril Victor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Aircraft Corp Ltd
Original Assignee
British Aircraft Corp Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Aircraft Corp Ltd filed Critical British Aircraft Corp Ltd
Publication of DE1590148B1 publication Critical patent/DE1590148B1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70375—Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/056—Using an artwork, i.e. a photomask for exposing photosensitive layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
DE19661590148 1965-09-13 1966-09-12 Verfahren und vorrichtung zur herstellung von foto schablonen fuer gedruckte schaltungen Pending DE1590148B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB38950/65A GB1145242A (en) 1965-09-13 1965-09-13 Improvements relating to preparation of printed circuits

Publications (1)

Publication Number Publication Date
DE1590148B1 true DE1590148B1 (de) 1971-03-04

Family

ID=10406690

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19661590148 Pending DE1590148B1 (de) 1965-09-13 1966-09-12 Verfahren und vorrichtung zur herstellung von foto schablonen fuer gedruckte schaltungen

Country Status (5)

Country Link
US (1) US3460448A (enFirst)
CH (1) CH435395A (enFirst)
DE (1) DE1590148B1 (enFirst)
GB (1) GB1145242A (enFirst)
SE (1) SE335475B (enFirst)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3566763A (en) * 1968-06-05 1971-03-02 Bendix Corp Displacement responsive apparatus for producing patterns on a photosensitive surface
US3604801A (en) * 1968-06-11 1971-09-14 Superior Electric Co Film exposing machine for making negatives
US3745897A (en) * 1971-06-21 1973-07-17 Ibm Mask bit error indicator
US3743825A (en) * 1971-07-13 1973-07-03 B Cohen Illumination assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3247761A (en) * 1963-01-21 1966-04-26 Robert A Herreman Production of printed circuit boards and the like

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
SE335475B (enFirst) 1971-05-24
GB1145242A (en) 1969-03-12
US3460448A (en) 1969-08-12
CH435395A (fr) 1967-05-15

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