DE1539596B2 - Verfahren zur erzeugung von strahlungsenergie hoher intensitaet - Google Patents
Verfahren zur erzeugung von strahlungsenergie hoher intensitaetInfo
- Publication number
- DE1539596B2 DE1539596B2 DE19661539596 DE1539596A DE1539596B2 DE 1539596 B2 DE1539596 B2 DE 1539596B2 DE 19661539596 DE19661539596 DE 19661539596 DE 1539596 A DE1539596 A DE 1539596A DE 1539596 B2 DE1539596 B2 DE 1539596B2
- Authority
- DE
- Germany
- Prior art keywords
- gas
- discharge space
- electrodes
- arc
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 15
- 230000005855 radiation Effects 0.000 claims description 11
- 239000007789 gas Substances 0.000 description 57
- 239000012535 impurity Substances 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- YBYIRNPNPLQARY-UHFFFAOYSA-N 1H-indene Chemical compound C1=CC=C2CC=CC2=C1 YBYIRNPNPLQARY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 150000002835 noble gases Chemical class 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 210000002381 plasma Anatomy 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Discharge Heating (AREA)
- Arc Welding In General (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46187465A | 1965-06-07 | 1965-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1539596A1 DE1539596A1 (de) | 1970-09-24 |
| DE1539596B2 true DE1539596B2 (de) | 1971-03-25 |
Family
ID=23834283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661539596 Pending DE1539596B2 (de) | 1965-06-07 | 1966-06-06 | Verfahren zur erzeugung von strahlungsenergie hoher intensitaet |
Country Status (9)
-
1966
- 1966-06-02 NO NO163278A patent/NO120564B/no unknown
- 1966-06-03 GB GB24759/66A patent/GB1150951A/en not_active Expired
- 1966-06-03 BR BR180151/66A patent/BR6680151D0/pt unknown
- 1966-06-06 NL NL6607839A patent/NL6607839A/xx unknown
- 1966-06-06 DE DE19661539596 patent/DE1539596B2/de active Pending
- 1966-06-07 DK DK292566AA patent/DK122300B/da unknown
- 1966-06-07 CH CH820366A patent/CH443487A/fr unknown
- 1966-06-07 AT AT540766A patent/AT257003B/de active
-
1972
- 1972-04-10 JP JP47035277A patent/JPS4925742B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DK122300B (da) | 1972-02-14 |
| CH443487A (fr) | 1967-09-15 |
| BR6680151D0 (pt) | 1973-09-06 |
| GB1150951A (en) | 1969-05-07 |
| AT257003B (de) | 1967-09-25 |
| DE1539596A1 (de) | 1970-09-24 |
| NL6607839A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-12-08 |
| JPS4925742B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-07-03 |
| NO120564B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-11-02 |
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