DE69200213T2 - Gaslaseroszillatorvorrichtung. - Google Patents

Gaslaseroszillatorvorrichtung.

Info

Publication number
DE69200213T2
DE69200213T2 DE69200213T DE69200213T DE69200213T2 DE 69200213 T2 DE69200213 T2 DE 69200213T2 DE 69200213 T DE69200213 T DE 69200213T DE 69200213 T DE69200213 T DE 69200213T DE 69200213 T2 DE69200213 T2 DE 69200213T2
Authority
DE
Germany
Prior art keywords
laser oscillator
gas laser
oscillator device
gas
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69200213T
Other languages
English (en)
Other versions
DE69200213D1 (de
Inventor
Hitoshi Hongu
Yutaka Iwasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69200213D1 publication Critical patent/DE69200213D1/de
Application granted granted Critical
Publication of DE69200213T2 publication Critical patent/DE69200213T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0305—Selection of materials for the tube or the coatings thereon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
DE69200213T 1991-03-05 1992-03-03 Gaslaseroszillatorvorrichtung. Expired - Fee Related DE69200213T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3037672A JPH04276671A (ja) 1991-03-05 1991-03-05 ガスレーザー発振装置

Publications (2)

Publication Number Publication Date
DE69200213D1 DE69200213D1 (de) 1994-08-04
DE69200213T2 true DE69200213T2 (de) 1994-10-06

Family

ID=12504128

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69200213T Expired - Fee Related DE69200213T2 (de) 1991-03-05 1992-03-03 Gaslaseroszillatorvorrichtung.

Country Status (5)

Country Link
US (1) US5268919A (de)
EP (1) EP0504652B1 (de)
JP (1) JPH04276671A (de)
CA (1) CA2062265C (de)
DE (1) DE69200213T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06164042A (ja) * 1992-09-14 1994-06-10 Matsushita Electric Ind Co Ltd ガスレーザ発振装置
US5359176A (en) * 1993-04-02 1994-10-25 International Business Machines Corporation Optics and environmental protection device for laser processing applications
US6951627B2 (en) * 2002-04-26 2005-10-04 Matsushita Electric Industrial Co., Ltd. Method of drilling holes with precision laser micromachining
US6898358B2 (en) 2002-05-31 2005-05-24 Matsushita Electric Industrial Co., Ltd. Adjustable photonic crystal and method of adjusting the index of refraction of photonic crystals to reversibly tune transmissions within the bandgap
US7880117B2 (en) 2002-12-24 2011-02-01 Panasonic Corporation Method and apparatus of drilling high density submicron cavities using parallel laser beams
CN100370657C (zh) * 2006-02-23 2008-02-20 武汉海通激光技术有限公司 激光器阴极固定装置
JP6031064B2 (ja) * 2014-05-15 2016-11-24 ファナック株式会社 ガス循環式のレーザ発振装置
CN105024260B (zh) * 2014-07-28 2018-01-30 东莞市鼎先激光科技股份有限公司 高功率气体激光器用放电管
JP2017017194A (ja) * 2015-07-01 2017-01-19 三菱電機株式会社 炭酸ガスレーザ増幅器、炭酸ガスレーザ発振器および炭酸ガスレーザ発振−増幅システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5843588A (ja) * 1981-09-09 1983-03-14 Hitachi Ltd レ−ザ発生装置
US4672621A (en) * 1982-04-13 1987-06-09 Matsushita Electric Industrial Co., Ltd. Laser resonator having an improved gas-introducing portion
DE3536770A1 (de) * 1985-10-16 1987-04-16 Heraeus Gmbh W C Gaslaser
US4873693A (en) * 1987-10-14 1989-10-10 Melles Griot San Marcos Company Apparatus and method for suppressing diffraction rings in a laser

Also Published As

Publication number Publication date
DE69200213D1 (de) 1994-08-04
US5268919A (en) 1993-12-07
EP0504652A1 (de) 1992-09-23
CA2062265A1 (en) 1992-09-06
JPH04276671A (ja) 1992-10-01
CA2062265C (en) 1997-01-07
EP0504652B1 (de) 1994-06-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee