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Publication of JPS4925742B1publicationCriticalpatent/JPS4925742B1/ja
H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
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Physics & Mathematics
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Engineering & Computer Science
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Plasma & Fusion
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Chemical & Material Sciences
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Analytical Chemistry
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Plasma Technology
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Physical Or Chemical Processes And Apparatus
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Vessels And Coating Films For Discharge Lamps
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