NO120564B - - Google Patents
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- Publication number
- NO120564B NO120564B NO163278A NO16327866A NO120564B NO 120564 B NO120564 B NO 120564B NO 163278 A NO163278 A NO 163278A NO 16327866 A NO16327866 A NO 16327866A NO 120564 B NO120564 B NO 120564B
- Authority
- NO
- Norway
- Prior art keywords
- chamber
- gas
- intake
- electrodes
- arc
- Prior art date
Links
- 238000000034 method Methods 0.000 claims description 11
- 238000010891 electric arc Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 54
- 230000005855 radiation Effects 0.000 description 7
- 239000000356 contaminant Substances 0.000 description 6
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 230000005274 electronic transitions Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
- H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
- Discharge Heating (AREA)
- Arc Welding In General (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US46187465A | 1965-06-07 | 1965-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NO120564B true NO120564B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1970-11-02 |
Family
ID=23834283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NO163278A NO120564B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1965-06-07 | 1966-06-02 |
Country Status (9)
-
1966
- 1966-06-02 NO NO163278A patent/NO120564B/no unknown
- 1966-06-03 GB GB24759/66A patent/GB1150951A/en not_active Expired
- 1966-06-03 BR BR180151/66A patent/BR6680151D0/pt unknown
- 1966-06-06 NL NL6607839A patent/NL6607839A/xx unknown
- 1966-06-06 DE DE19661539596 patent/DE1539596B2/de active Pending
- 1966-06-07 DK DK292566AA patent/DK122300B/da unknown
- 1966-06-07 CH CH820366A patent/CH443487A/fr unknown
- 1966-06-07 AT AT540766A patent/AT257003B/de active
-
1972
- 1972-04-10 JP JP47035277A patent/JPS4925742B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DK122300B (da) | 1972-02-14 |
| CH443487A (fr) | 1967-09-15 |
| BR6680151D0 (pt) | 1973-09-06 |
| GB1150951A (en) | 1969-05-07 |
| AT257003B (de) | 1967-09-25 |
| DE1539596A1 (de) | 1970-09-24 |
| NL6607839A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-12-08 |
| JPS4925742B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1974-07-03 |
| DE1539596B2 (de) | 1971-03-25 |
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