DE1521331A1 - Verfahren und Vorrichtung zur Maskierung - Google Patents
Verfahren und Vorrichtung zur MaskierungInfo
- Publication number
- DE1521331A1 DE1521331A1 DE19661521331 DE1521331A DE1521331A1 DE 1521331 A1 DE1521331 A1 DE 1521331A1 DE 19661521331 DE19661521331 DE 19661521331 DE 1521331 A DE1521331 A DE 1521331A DE 1521331 A1 DE1521331 A1 DE 1521331A1
- Authority
- DE
- Germany
- Prior art keywords
- mask
- basic mask
- basic
- exposed
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
- H05K3/143—Masks therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2807065A GB1043497A (en) | 1965-07-02 | 1965-07-02 | Improvements in masking techniques during successive stages of deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1521331A1 true DE1521331A1 (de) | 1969-12-11 |
Family
ID=10269797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE19661521331 Pending DE1521331A1 (de) | 1965-07-02 | 1966-06-28 | Verfahren und Vorrichtung zur Maskierung |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE1521331A1 (id) |
GB (2) | GB1043497A (id) |
NL (1) | NL6609183A (id) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DK87422C (da) * | 1951-05-23 | 1959-06-15 | Emil Menz | Anordning ved damekorsetter. |
SU388398A3 (id) * | 1969-01-17 | 1973-06-22 |
-
0
- GB GB28070D patent/GB28070A/en active Active
-
1965
- 1965-07-02 GB GB2807065A patent/GB1043497A/en not_active Expired
-
1966
- 1966-06-28 DE DE19661521331 patent/DE1521331A1/de active Pending
- 1966-07-01 NL NL6609183A patent/NL6609183A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
GB1043497A (en) | 1966-09-21 |
GB28070A (id) | |
NL6609183A (id) | 1967-01-03 |
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