GB1043497A - Improvements in masking techniques during successive stages of deposition - Google Patents

Improvements in masking techniques during successive stages of deposition

Info

Publication number
GB1043497A
GB1043497A GB2807065A GB2807065A GB1043497A GB 1043497 A GB1043497 A GB 1043497A GB 2807065 A GB2807065 A GB 2807065A GB 2807065 A GB2807065 A GB 2807065A GB 1043497 A GB1043497 A GB 1043497A
Authority
GB
United Kingdom
Prior art keywords
mask
deposition
substrate
successive stages
during successive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2807065A
Other languages
English (en)
Inventor
Derek Ryan
Ian James Saunders
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to GB28070D priority Critical patent/GB28070A/en
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB2807065A priority patent/GB1043497A/en
Priority to DE19661521331 priority patent/DE1521331A1/de
Priority to FR67686A priority patent/FR1485878A/fr
Priority to NL6609183A priority patent/NL6609183A/xx
Publication of GB1043497A publication Critical patent/GB1043497A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
    • H05K3/143—Masks therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14—Related to the order of processing steps
    • H05K2203/1476—Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Photovoltaic Devices (AREA)
GB2807065A 1965-07-02 1965-07-02 Improvements in masking techniques during successive stages of deposition Expired GB1043497A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB28070D GB28070A (id) 1965-07-02
GB2807065A GB1043497A (en) 1965-07-02 1965-07-02 Improvements in masking techniques during successive stages of deposition
DE19661521331 DE1521331A1 (de) 1965-07-02 1966-06-28 Verfahren und Vorrichtung zur Maskierung
FR67686A FR1485878A (fr) 1965-07-02 1966-06-30 Procédé de masquage pour la fabrication de dispositifs semi-conducteurs
NL6609183A NL6609183A (id) 1965-07-02 1966-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2807065A GB1043497A (en) 1965-07-02 1965-07-02 Improvements in masking techniques during successive stages of deposition

Publications (1)

Publication Number Publication Date
GB1043497A true GB1043497A (en) 1966-09-21

Family

ID=10269797

Family Applications (2)

Application Number Title Priority Date Filing Date
GB28070D Active GB28070A (id) 1965-07-02
GB2807065A Expired GB1043497A (en) 1965-07-02 1965-07-02 Improvements in masking techniques during successive stages of deposition

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB28070D Active GB28070A (id) 1965-07-02

Country Status (3)

Country Link
DE (1) DE1521331A1 (id)
GB (2) GB1043497A (id)
NL (1) NL6609183A (id)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK87422C (da) * 1951-05-23 1959-06-15 Emil Menz Anordning ved damekorsetter.

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU388398A3 (id) * 1969-01-17 1973-06-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK87422C (da) * 1951-05-23 1959-06-15 Emil Menz Anordning ved damekorsetter.

Also Published As

Publication number Publication date
NL6609183A (id) 1967-01-03
DE1521331A1 (de) 1969-12-11
GB28070A (id)

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