DE1435601U - - Google Patents

Info

Publication number

DE1435601U

DE1435601U DENDAT1435601D DE1435601DU DE1435601U DE 1435601 U DE1435601 U DE 1435601U DE NDAT1435601 D DENDAT1435601 D DE NDAT1435601D DE 1435601D U DE1435601D U DE 1435601DU DE 1435601 U DE1435601 U DE 1435601U

Authority

DE

Germany

Prior art keywords

ruthenium

materials

layers

electrically conductive

pure

Prior art date

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

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• KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 11
• 229910052707 ruthenium Inorganic materials 0.000 claims description 11
• 239000004744 fabric Substances 0.000 claims 1
• 239000000463 material Substances 0.000 description 5
• 239000011521 glass Substances 0.000 description 3
• 239000010410 layer Substances 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 239000000126 substance Substances 0.000 description 2
• 239000002344 surface layer Substances 0.000 description 2
• 238000000576 coating method Methods 0.000 description 1
• 230000003287 optical effect Effects 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 230000000391 smoking effect Effects 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• 238000000859 sublimation Methods 0.000 description 1
• 230000008022 sublimation Effects 0.000 description 1