DE1291026B - Ionenquelle - Google Patents
IonenquelleInfo
- Publication number
- DE1291026B DE1291026B DEC39900A DEC0039900A DE1291026B DE 1291026 B DE1291026 B DE 1291026B DE C39900 A DEC39900 A DE C39900A DE C0039900 A DEC0039900 A DE C0039900A DE 1291026 B DE1291026 B DE 1291026B
- Authority
- DE
- Germany
- Prior art keywords
- electrodes
- housing
- ion source
- vacuum housing
- symmetry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 56
- 238000000605 extraction Methods 0.000 claims description 27
- 230000005291 magnetic effect Effects 0.000 claims description 15
- 239000007789 gas Substances 0.000 description 25
- 230000007935 neutral effect Effects 0.000 description 12
- 238000005192 partition Methods 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR29045A FR1454051A (fr) | 1965-08-20 | 1965-08-20 | Source d'ions |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1291026B true DE1291026B (de) | 1969-03-20 |
Family
ID=8587015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEC39900A Pending DE1291026B (de) | 1965-08-20 | 1966-08-17 | Ionenquelle |
Country Status (9)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3514666A (en) * | 1967-06-16 | 1970-05-26 | Avco Corp | Charged particle generator yielding a mono-energetic ion beam |
| GB1503517A (en) * | 1974-09-10 | 1978-03-15 | Science Res Council | Electrostatic accelerators |
| FR2416545A1 (fr) * | 1978-02-03 | 1979-08-31 | Thomson Csf | Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source |
| CZ2015455A3 (cs) * | 2015-07-01 | 2016-10-05 | České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická | Stabilizovaný a homogenizovaný zdroj netermálního plazmatu |
| US9691584B1 (en) * | 2016-06-30 | 2017-06-27 | Varian Semiconductor Equipment Associates, Inc. | Ion source for enhanced ionization |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL213062A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1956-01-27 | |||
| GB892344A (en) * | 1959-03-18 | 1962-03-28 | Nat Res Dev | Ion source |
| DE1498845A1 (de) * | 1962-01-31 | 1969-05-14 | Leybold Heraeus Gmbh & Co Kg | Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer |
-
1965
- 1965-08-20 FR FR29045A patent/FR1454051A/fr not_active Expired
-
1966
- 1966-08-08 US US571109A patent/US3408519A/en not_active Expired - Lifetime
- 1966-08-10 CH CH1151166A patent/CH460970A/fr unknown
- 1966-08-11 GB GB36001/66A patent/GB1114634A/en not_active Expired
- 1966-08-12 LU LU51760A patent/LU51760A1/xx unknown
- 1966-08-16 BE BE685529D patent/BE685529A/xx unknown
- 1966-08-17 DE DEC39900A patent/DE1291026B/de active Pending
- 1966-08-19 NL NL6611721A patent/NL6611721A/xx unknown
- 1966-10-27 ES ES330374A patent/ES330374A1/es not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| None * |
Also Published As
| Publication number | Publication date |
|---|---|
| NL6611721A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1967-02-21 |
| ES330374A1 (es) | 1968-03-16 |
| BE685529A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1967-02-01 |
| GB1114634A (en) | 1968-05-22 |
| US3408519A (en) | 1968-10-29 |
| FR1454051A (fr) | 1966-07-22 |
| CH460970A (fr) | 1968-08-15 |
| LU51760A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1966-10-12 |
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