GB1114634A - Improvements in or relating to a charged particle source having a low rate of flow ofneutral gas - Google Patents

Improvements in or relating to a charged particle source having a low rate of flow ofneutral gas

Info

Publication number
GB1114634A
GB1114634A GB36001/66A GB3600166A GB1114634A GB 1114634 A GB1114634 A GB 1114634A GB 36001/66 A GB36001/66 A GB 36001/66A GB 3600166 A GB3600166 A GB 3600166A GB 1114634 A GB1114634 A GB 1114634A
Authority
GB
United Kingdom
Prior art keywords
chamber
negative electrodes
positive
gas
pascal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB36001/66A
Other languages
English (en)
Inventor
Claude Etievant
Pierre Hubert
Mariano Perulli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1114634A publication Critical patent/GB1114634A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
GB36001/66A 1965-08-20 1966-08-11 Improvements in or relating to a charged particle source having a low rate of flow ofneutral gas Expired GB1114634A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR29045A FR1454051A (fr) 1965-08-20 1965-08-20 Source d'ions

Publications (1)

Publication Number Publication Date
GB1114634A true GB1114634A (en) 1968-05-22

Family

ID=8587015

Family Applications (1)

Application Number Title Priority Date Filing Date
GB36001/66A Expired GB1114634A (en) 1965-08-20 1966-08-11 Improvements in or relating to a charged particle source having a low rate of flow ofneutral gas

Country Status (9)

Country Link
US (1) US3408519A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BE (1) BE685529A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CH (1) CH460970A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1291026B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES330374A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR1454051A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1114634A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
LU (1) LU51760A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL6611721A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ306214B6 (cs) * 2015-07-01 2016-10-05 České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická Stabilizovaný a homogenizovaný zdroj netermálního plazmatu

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3514666A (en) * 1967-06-16 1970-05-26 Avco Corp Charged particle generator yielding a mono-energetic ion beam
GB1503517A (en) * 1974-09-10 1978-03-15 Science Res Council Electrostatic accelerators
FR2416545A1 (fr) * 1978-02-03 1979-08-31 Thomson Csf Source d'ions produisant un flux dense d'ions de basse energie, et dispositif de traitement de surface comportant une telle source
US9691584B1 (en) * 2016-06-30 2017-06-27 Varian Semiconductor Equipment Associates, Inc. Ion source for enhanced ionization

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL213062A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1956-01-27
GB892344A (en) * 1959-03-18 1962-03-28 Nat Res Dev Ion source
DE1498845A1 (de) * 1962-01-31 1969-05-14 Leybold Heraeus Gmbh & Co Kg Ionisierungsvorrichtung fuer in grossen Totaldruckbereichen verwendbare Massenspektrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CZ306214B6 (cs) * 2015-07-01 2016-10-05 České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická Stabilizovaný a homogenizovaný zdroj netermálního plazmatu

Also Published As

Publication number Publication date
US3408519A (en) 1968-10-29
DE1291026B (de) 1969-03-20
CH460970A (fr) 1968-08-15
LU51760A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1966-10-12
ES330374A1 (es) 1968-03-16
NL6611721A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-02-21
BE685529A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-02-01
FR1454051A (fr) 1966-07-22

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