DE1253836B - Elektronenstrahleinrichtung - Google Patents
ElektronenstrahleinrichtungInfo
- Publication number
- DE1253836B DE1253836B DEE24442A DEE0024442A DE1253836B DE 1253836 B DE1253836 B DE 1253836B DE E24442 A DEE24442 A DE E24442A DE E0024442 A DEE0024442 A DE E0024442A DE 1253836 B DE1253836 B DE 1253836B
- Authority
- DE
- Germany
- Prior art keywords
- components
- electron beam
- support plates
- plates
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 23
- 238000007789 sealing Methods 0.000 claims description 17
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 2
- 239000000945 filler Substances 0.000 claims 1
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005136 cathodoluminescence Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002601 radiography Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000003963 x-ray microscopy Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/82—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3005—Observing the objects or the point of impact on the object
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8940/62A GB1009601A (en) | 1962-03-08 | 1962-03-08 | Improvements in electron beam equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1253836B true DE1253836B (de) | 1967-11-09 |
Family
ID=9862258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEE24442A Pending DE1253836B (de) | 1962-03-08 | 1963-03-07 | Elektronenstrahleinrichtung |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3248542A (enExample) |
| DE (1) | DE1253836B (enExample) |
| FR (1) | FR1349083A (enExample) |
| GB (1) | GB1009601A (enExample) |
| NL (1) | NL289910A (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3327114A (en) * | 1964-06-23 | 1967-06-20 | Alfred F Diorio | Low-angle x-ray diffraction camera comprising releasably connected sections and adjustable beam apertures and stops |
| US3514596A (en) * | 1967-10-17 | 1970-05-26 | Picker Corp | Spot filmer for x-ray radiographing which minimizes patient-to-film distance |
| US3814356A (en) * | 1970-10-02 | 1974-06-04 | J Coleman | Electron microscope |
| US3809899A (en) * | 1972-08-17 | 1974-05-07 | Tektronix Inc | Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope |
| US3872305A (en) * | 1972-12-06 | 1975-03-18 | Jeol Ltd | Convertible scanning electron microscope |
| DE2702439C3 (de) * | 1977-01-19 | 1980-08-07 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Langbrennweitige magnetische Linse zur korpuskularstrahloptischen Abbildung eines großflächigen Objektes |
| US5412211A (en) * | 1993-07-30 | 1995-05-02 | Electroscan Corporation | Environmental scanning electron microscope |
| US5362964A (en) * | 1993-07-30 | 1994-11-08 | Electroscan Corporation | Environmental scanning electron microscope |
| US20180182605A1 (en) * | 2016-12-22 | 2018-06-28 | Thermo Finnigan Llc | Aligning ion optics by aperture sighting |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE892491C (de) * | 1941-03-18 | 1953-10-08 | Aeg | Zerlegbares mehrstufiges, aus mehreren Teilen bestehendes UEbermikroskop |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2319061A (en) * | 1941-01-31 | 1943-05-11 | Rca Corp | Demountable electron gun |
| US2405306A (en) * | 1944-01-31 | 1946-08-06 | Rca Corp | Electronic microanalyzer monitoring |
| NL300306A (enExample) * | 1955-06-14 | |||
| US3080481A (en) * | 1959-04-17 | 1963-03-05 | Sprague Electric Co | Method of making transistors |
-
0
- NL NL289910D patent/NL289910A/xx unknown
-
1962
- 1962-03-08 GB GB8940/62A patent/GB1009601A/en not_active Expired
-
1963
- 1963-03-07 FR FR18180A patent/FR1349083A/fr not_active Expired
- 1963-03-07 DE DEE24442A patent/DE1253836B/de active Pending
- 1963-03-20 US US266621A patent/US3248542A/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE892491C (de) * | 1941-03-18 | 1953-10-08 | Aeg | Zerlegbares mehrstufiges, aus mehreren Teilen bestehendes UEbermikroskop |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1009601A (en) | 1965-11-10 |
| NL289910A (enExample) | |
| US3248542A (en) | 1966-04-26 |
| FR1349083A (fr) | 1964-01-10 |
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