DE1200403B - Verfahren zur Herstellung einer elektrisch isolierenden Schicht zwischen zwei duennen, elektrisch leitenden Schichten - Google Patents

Verfahren zur Herstellung einer elektrisch isolierenden Schicht zwischen zwei duennen, elektrisch leitenden Schichten

Info

Publication number
DE1200403B
DE1200403B DEJ20420A DEJ0020420A DE1200403B DE 1200403 B DE1200403 B DE 1200403B DE J20420 A DEJ20420 A DE J20420A DE J0020420 A DEJ0020420 A DE J0020420A DE 1200403 B DE1200403 B DE 1200403B
Authority
DE
Germany
Prior art keywords
conductive
layer
insulating layer
layers
conductive layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEJ20420A
Other languages
German (de)
English (en)
Inventor
Donald Stripple Weed
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE1200403B publication Critical patent/DE1200403B/de
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G2/00—Details of capacitors not covered by a single one of groups H01G4/00-H01G11/00
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/44—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using super-conductive elements, e.g. cryotron
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/002—Inhomogeneous material in general
    • H01B3/004—Inhomogeneous material in general with conductive additives or conductive layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H01B3/10—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances metallic oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/30—Devices switchable between superconducting and normal states
    • H10N60/35—Cryotrons
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/80—Material per se process of making same
    • Y10S505/815—Process of making per se
    • Y10S505/818—Coating
    • Y10S505/819—Vapor deposition

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
DEJ20420A 1960-08-29 1961-08-18 Verfahren zur Herstellung einer elektrisch isolierenden Schicht zwischen zwei duennen, elektrisch leitenden Schichten Pending DE1200403B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US52452A US3100723A (en) 1960-08-29 1960-08-29 Process of making multi-layer devices

Publications (1)

Publication Number Publication Date
DE1200403B true DE1200403B (de) 1965-09-09

Family

ID=21977698

Family Applications (1)

Application Number Title Priority Date Filing Date
DEJ20420A Pending DE1200403B (de) 1960-08-29 1961-08-18 Verfahren zur Herstellung einer elektrisch isolierenden Schicht zwischen zwei duennen, elektrisch leitenden Schichten

Country Status (4)

Country Link
US (1) US3100723A (en, 2012)
DE (1) DE1200403B (en, 2012)
GB (1) GB974667A (en, 2012)
NL (1) NL268538A (en, 2012)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3196043A (en) * 1961-05-17 1965-07-20 Gen Electric Method for making an electrode structure
US3347703A (en) * 1963-02-05 1967-10-17 Burroughs Corp Method for fabricating an electrical memory module
US3310424A (en) * 1963-05-14 1967-03-21 Litton Systems Inc Method for providing an insulating film on a substrate
US3330252A (en) * 1964-09-10 1967-07-11 Sperry Rand Corp Masking device
GB1113686A (en) * 1964-10-23 1968-05-15 Ass Elect Ind Improvements in or relating to tantalum thin film electrical components
US3380852A (en) * 1964-11-23 1968-04-30 Bell Telephone Labor Inc Method of forming an oxide coating on semiconductor bodies
DE1260047B (de) * 1965-03-24 1968-02-01 Siemens Ag Starkstrom-Kryotron
US3463663A (en) * 1965-05-07 1969-08-26 Kennecott Copper Corp Deposition of thin films
US3463667A (en) * 1965-12-03 1969-08-26 Kennecott Copper Corp Deposition of thin films
US3356070A (en) * 1966-05-16 1967-12-05 Conforming Matrix Corp Spray painting fixture
US3506483A (en) * 1966-12-19 1970-04-14 Du Pont Concurrent deposition of superconductor and dielectric
JPS5036127B1 (en, 2012) * 1971-05-27 1975-11-21
US3974309A (en) * 1973-12-26 1976-08-10 Ford Motor Company Method of coating a rotary internal combustion engine
US4453199A (en) * 1983-06-17 1984-06-05 Avx Corporation Low cost thin film capacitor
IT1197806B (it) * 1986-08-01 1988-12-06 Metalvuoto Films Spa Procedimento ed apparecchiatura per la realizzazione di pellicole metallizzate per condesatori elettrici e prodotti cosi' ottenuti

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE871635C (de) * 1943-12-09 1953-03-23 Siemens Ag Verfahren und Einrichtung zur UEberwachung der Gleichmaessigkeit eines laufend auf einem langgestreckten Formkoerper aus Isolierstoff aufgetragenen duennen Isolierueberzuges
DE918827C (de) * 1949-11-25 1954-10-07 British Insulated Callenders Verfahren zur Herstellung elektrischer Kondensatoren
DE918882C (de) * 1950-01-30 1954-10-07 British Insulated Callenders Verfahren und Geraet zum Herstellen von elektrischen Kondensatoren
DE967352C (de) * 1948-10-02 1957-11-07 Siemens Ag Verfahren zur Herstellung elektrischer Einrichtungen hohen Isolationswiderstandes, insbesondere elektrischer Kondensatoren

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2088949A (en) * 1931-02-10 1937-08-03 Radio Patents Corp Electric conductor
US2525668A (en) * 1949-02-05 1950-10-10 Erie Resistor Corp Method of making electrical condensers
US2879183A (en) * 1955-12-15 1959-03-24 Bell Telephone Labor Inc Insulating coatings and a method for their production
NL217069A (en, 2012) * 1956-06-26 1900-01-01
US2958117A (en) * 1956-10-19 1960-11-01 Hunt Capacitors Ltd A Electrical capacitors

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE871635C (de) * 1943-12-09 1953-03-23 Siemens Ag Verfahren und Einrichtung zur UEberwachung der Gleichmaessigkeit eines laufend auf einem langgestreckten Formkoerper aus Isolierstoff aufgetragenen duennen Isolierueberzuges
DE967352C (de) * 1948-10-02 1957-11-07 Siemens Ag Verfahren zur Herstellung elektrischer Einrichtungen hohen Isolationswiderstandes, insbesondere elektrischer Kondensatoren
DE918827C (de) * 1949-11-25 1954-10-07 British Insulated Callenders Verfahren zur Herstellung elektrischer Kondensatoren
DE918882C (de) * 1950-01-30 1954-10-07 British Insulated Callenders Verfahren und Geraet zum Herstellen von elektrischen Kondensatoren

Also Published As

Publication number Publication date
GB974667A (en) 1964-11-11
US3100723A (en) 1963-08-13
NL268538A (en, 2012)

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