DE1187286B - Verfahren zur Herstellung einer isolierenden Schicht durch Aufdampfen - Google Patents
Verfahren zur Herstellung einer isolierenden Schicht durch AufdampfenInfo
- Publication number
- DE1187286B DE1187286B DER31665A DER0031665A DE1187286B DE 1187286 B DE1187286 B DE 1187286B DE R31665 A DER31665 A DE R31665A DE R0031665 A DER0031665 A DE R0031665A DE 1187286 B DE1187286 B DE 1187286B
- Authority
- DE
- Germany
- Prior art keywords
- layer
- pressure
- evaporation
- insulating
- pores
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/002—Inhomogeneous material in general
- H01B3/004—Inhomogeneous material in general with conductive additives or conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/008—Other insulating material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/10—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances metallic oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/80—Material per se process of making same
- Y10S505/815—Process of making per se
- Y10S505/818—Coating
- Y10S505/819—Vapor deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49227—Insulator making
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76288A US3184329A (en) | 1960-12-16 | 1960-12-16 | Insulation |
Publications (1)
Publication Number | Publication Date |
---|---|
DE1187286B true DE1187286B (de) | 1965-02-18 |
Family
ID=22131042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DER31665A Pending DE1187286B (de) | 1960-12-16 | 1961-12-11 | Verfahren zur Herstellung einer isolierenden Schicht durch Aufdampfen |
Country Status (6)
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3414968A (en) * | 1965-02-23 | 1968-12-10 | Solitron Devices | Method of assembly of power transistors |
US3461550A (en) * | 1965-09-22 | 1969-08-19 | Monti E Aklufi | Method of fabricating semiconductor devices |
US3421055A (en) * | 1965-10-01 | 1969-01-07 | Texas Instruments Inc | Structure and method for preventing spurious growths during epitaxial deposition of semiconductor material |
US3432920A (en) * | 1966-12-01 | 1969-03-18 | Rca Corp | Semiconductor devices and methods of making them |
US3697794A (en) * | 1969-03-19 | 1972-10-10 | Rca Corp | Photocathode comprising layers of tin oxide, antimony oxide, and antimony |
US3617375A (en) * | 1969-08-11 | 1971-11-02 | Texas Instruments Inc | Electron beam evaporated quartz insulating material process |
US3934059A (en) * | 1974-02-04 | 1976-01-20 | Rca Corporation | Method of vapor deposition |
US4140548A (en) * | 1978-05-19 | 1979-02-20 | Maruman Integrated Circuits Inc. | MOS Semiconductor process utilizing a two-layer oxide forming technique |
GB2140460B (en) * | 1983-05-27 | 1986-06-25 | Dowty Electronics Ltd | Insulated metal substrates |
FR2575766B1 (fr) * | 1984-10-09 | 1987-03-20 | Centre Nat Rech Scient | Procede de formation, sous basse pression, d'une couche de materiau isolant de qualite electronique sur un substrat |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB620405A (en) * | 1946-04-23 | 1949-03-24 | Alexander Frederic Fekete | Improvements in or relating to compact electric condensers |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2734478A (en) * | 1956-02-14 | Copper | ||
GB580137A (en) * | 1943-07-03 | 1946-08-28 | Kodak Ltd | Improvements in the production of light reflecting layers |
US2593829A (en) * | 1949-01-13 | 1952-04-22 | Bayer Ag | Electrical capacitor and foil therefor |
US2903780A (en) * | 1952-08-19 | 1959-09-15 | Int Standard Electric Corp | Manufacture of electrical capacitors |
US2932588A (en) * | 1955-07-06 | 1960-04-12 | English Electric Valve Co Ltd | Methods of manufacturing thin films of refractory dielectric materials |
US2840489A (en) * | 1956-01-17 | 1958-06-24 | Owens Illinois Glass Co | Process for the controlled deposition of silicon dihalide vapors onto selected surfaces |
US2930951A (en) * | 1957-07-08 | 1960-03-29 | Gen Electric | Electrical capacitor |
US3025441A (en) * | 1958-09-19 | 1962-03-13 | Gen Electric | Electrical capacitor |
-
0
- NL NL272593D patent/NL272593A/xx unknown
-
1960
- 1960-12-16 US US76288A patent/US3184329A/en not_active Expired - Lifetime
-
1961
- 1961-11-28 GB GB42559/61A patent/GB978992A/en not_active Expired
- 1961-12-11 DE DER31665A patent/DE1187286B/de active Pending
- 1961-12-11 FR FR881559A patent/FR1307784A/fr not_active Expired
- 1961-12-14 JP JP4559461A patent/JPS3811034B1/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB620405A (en) * | 1946-04-23 | 1949-03-24 | Alexander Frederic Fekete | Improvements in or relating to compact electric condensers |
Also Published As
Publication number | Publication date |
---|---|
JPS3811034B1 (US07608600-20091027-C00054.png) | 1963-07-03 |
US3184329A (en) | 1965-05-18 |
NL272593A (US07608600-20091027-C00054.png) | |
FR1307784A (fr) | 1962-10-26 |
GB978992A (en) | 1965-01-01 |
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