DE1128946B - Glimmentladungs? als Vakuumpumpe oder Vakuummeter - Google Patents
Glimmentladungs? als Vakuumpumpe oder VakuummeterInfo
- Publication number
- DE1128946B DE1128946B DEV18063A DEV0018063A DE1128946B DE 1128946 B DE1128946 B DE 1128946B DE V18063 A DEV18063 A DE V18063A DE V0018063 A DEV0018063 A DE V0018063A DE 1128946 B DE1128946 B DE 1128946B
- Authority
- DE
- Germany
- Prior art keywords
- gauss
- magnetic field
- anode
- arrangement according
- cells
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 8
- 238000005086 pumping Methods 0.000 description 29
- 150000002500 ions Chemical class 0.000 description 14
- 239000007789 gas Substances 0.000 description 10
- 239000010406 cathode material Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000005247 gettering Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000001914 calming effect Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 210000005069 ears Anatomy 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- GPKJTRJOBQGKQK-UHFFFAOYSA-N quinacrine Chemical compound C1=C(OC)C=C2C(NC(C)CCCN(CC)CC)=C(C=CC(Cl)=C3)C3=NC2=C1 GPKJTRJOBQGKQK-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
Landscapes
- Electron Tubes For Measurement (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US797673A US3028071A (en) | 1959-03-06 | 1959-03-06 | Glow discharge apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1128946B true DE1128946B (de) | 1962-05-03 |
Family
ID=25171500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEV18063A Pending DE1128946B (de) | 1959-03-06 | 1960-02-16 | Glimmentladungs? als Vakuumpumpe oder Vakuummeter |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3028071A (en, 2012) |
| DE (1) | DE1128946B (en, 2012) |
| GB (1) | GB873024A (en, 2012) |
| NL (1) | NL249138A (en, 2012) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1269764B (de) * | 1962-05-25 | 1968-06-06 | Siemens Ag | Ionen-Getter-Pumpe |
| DE1539133B1 (de) * | 1966-04-28 | 1969-10-02 | Leybold Heraeus Gmbh & Co Kg | Ionengetterpumpe |
| DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3258194A (en) * | 1963-07-29 | 1966-06-28 | Varian Associates | Magnetically confined glow discharge apparatus |
| GB1152475A (en) * | 1965-08-17 | 1969-05-21 | Leybold Hereaus Verwaltung G M | Improvements In Getter-Ion Vacuum Pumps |
-
0
- NL NL249138D patent/NL249138A/xx unknown
-
1959
- 1959-03-06 US US797673A patent/US3028071A/en not_active Expired - Lifetime
-
1960
- 1960-02-16 DE DEV18063A patent/DE1128946B/de active Pending
- 1960-02-22 GB GB6197/60A patent/GB873024A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1269764B (de) * | 1962-05-25 | 1968-06-06 | Siemens Ag | Ionen-Getter-Pumpe |
| DE1539133B1 (de) * | 1966-04-28 | 1969-10-02 | Leybold Heraeus Gmbh & Co Kg | Ionengetterpumpe |
| DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
Also Published As
| Publication number | Publication date |
|---|---|
| US3028071A (en) | 1962-04-03 |
| NL249138A (en, 2012) | |
| GB873024A (en) | 1961-07-19 |
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