DE112016004526T5 - System und Verfahren zum elektrodenlosen Zünden von Plasma in einer lasergestützten Plasmalichtquelle - Google Patents

System und Verfahren zum elektrodenlosen Zünden von Plasma in einer lasergestützten Plasmalichtquelle Download PDF

Info

Publication number
DE112016004526T5
DE112016004526T5 DE112016004526.3T DE112016004526T DE112016004526T5 DE 112016004526 T5 DE112016004526 T5 DE 112016004526T5 DE 112016004526 T DE112016004526 T DE 112016004526T DE 112016004526 T5 DE112016004526 T5 DE 112016004526T5
Authority
DE
Germany
Prior art keywords
plasma
lasers
output
optical
fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE112016004526.3T
Other languages
German (de)
English (en)
Inventor
Anant Chimmalgi
Rudolf Brunner
Anatoly Shchemelinin
Ilya V. Bezel
Erik Kim
Rajeev Patil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of DE112016004526T5 publication Critical patent/DE112016004526T5/de
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Plasma Technology (AREA)
DE112016004526.3T 2015-10-04 2016-09-30 System und Verfahren zum elektrodenlosen Zünden von Plasma in einer lasergestützten Plasmalichtquelle Withdrawn DE112016004526T5 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562236904P 2015-10-04 2015-10-04
US62/236,904 2015-10-04
US15/280,073 US10244613B2 (en) 2015-10-04 2016-09-29 System and method for electrodeless plasma ignition in laser-sustained plasma light source
US15/280,073 2016-09-29
PCT/US2016/054733 WO2017062274A1 (en) 2015-10-04 2016-09-30 System and method for electrodeless plasma ignition in laser-sustained plasma light source

Publications (1)

Publication Number Publication Date
DE112016004526T5 true DE112016004526T5 (de) 2018-06-14

Family

ID=58488384

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112016004526.3T Withdrawn DE112016004526T5 (de) 2015-10-04 2016-09-30 System und Verfahren zum elektrodenlosen Zünden von Plasma in einer lasergestützten Plasmalichtquelle

Country Status (6)

Country Link
US (1) US10244613B2 (cg-RX-API-DMAC7.html)
JP (2) JP7023223B2 (cg-RX-API-DMAC7.html)
CN (1) CN108140538B (cg-RX-API-DMAC7.html)
DE (1) DE112016004526T5 (cg-RX-API-DMAC7.html)
TW (1) TWI703611B (cg-RX-API-DMAC7.html)
WO (1) WO2017062274A1 (cg-RX-API-DMAC7.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017137074A1 (de) * 2016-02-10 2017-08-17 Trumpf Lasersystems For Semiconductor Manufacturing Gmbh Treiberlaseranordnung mit einem optischen isolator und euv-strahlungserzeugungsvorrichtung damit
US9865447B2 (en) 2016-03-28 2018-01-09 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source
US10714327B2 (en) 2018-03-19 2020-07-14 Kla-Tencor Corporation System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination
US10823943B2 (en) * 2018-07-31 2020-11-03 Kla Corporation Plasma source with lamp house correction
US11844172B2 (en) * 2019-10-16 2023-12-12 Kla Corporation System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources
RU2732999C1 (ru) * 2020-03-05 2020-09-28 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ зажигания плазмы
JP6885636B1 (ja) * 2020-03-05 2021-06-16 アールアンドディー−イーサン，リミテッド レーザ励起プラズマ光源およびプラズマ点火方法
RU2754150C1 (ru) * 2020-08-06 2021-08-30 Общество с ограниченной ответственностью "РнД-ИСАН" Высокояркостный плазменный источник света с лазерной накачкой
KR20230044314A (ko) * 2020-08-06 2023-04-03 아이에스티이큐 비.브이. 고휘도 레이저 펌핑 플라즈마 광원 및 수차 감소 방법
RU2752778C1 (ru) * 2020-08-06 2021-08-03 Общество с ограниченной ответственностью "РнД-ИСАН" Плазменный источник света с лазерной накачкой и способ генерации излучения
EP4281824A4 (en) 2021-01-21 2025-01-01 Hamamatsu Photonics K.K. SPECTRAL SHAPED LIGHT SOURCE
US11587781B2 (en) 2021-05-24 2023-02-21 Hamamatsu Photonics K.K. Laser-driven light source with electrodeless ignition
CN113431723B (zh) * 2021-07-14 2022-09-16 吉林大学 一种基于飞秒激光点火的光丝烧蚀点火系统及方法
US12165856B2 (en) 2022-02-21 2024-12-10 Hamamatsu Photonics K.K. Inductively coupled plasma light source
US12144072B2 (en) * 2022-03-29 2024-11-12 Hamamatsu Photonics K.K. All-optical laser-driven light source with electrodeless ignition
US11637008B1 (en) * 2022-05-20 2023-04-25 Kla Corporation Conical pocket laser-sustained plasma lamp
CN118103946B (zh) * 2022-09-08 2025-12-16 伊斯泰克私人有限公司 激光泵浦光源和用于激光点火等离子体的方法
US12156322B2 (en) 2022-12-08 2024-11-26 Hamamatsu Photonics K.K. Inductively coupled plasma light source with switched power supply
US12578076B2 (en) 2023-06-05 2026-03-17 Hamamatsu Photonics K.K. Dual-output laser-driven light source
CN118737808B (zh) * 2024-05-13 2025-10-24 中国科学院西安光学精密机械研究所 一种脉冲连续复合型光纤激光维持等离子体光源

Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7435982B2 (en) 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
US7705331B1 (en) 2006-06-29 2010-04-27 Kla-Tencor Technologies Corp. Methods and systems for providing illumination of a specimen for a process performed on the specimen
US20110039552A1 (en) 2009-08-17 2011-02-17 Motorola, Inc. Method and apparatus for radio link failure recovery
US20110069534A1 (en) 2009-09-18 2011-03-24 Kabushiki Kaisha Toshiba Semiconductor memory device
US7989786B2 (en) 2006-03-31 2011-08-02 Energetiq Technology, Inc. Laser-driven light source
US20120078782A1 (en) 2008-06-25 2012-03-29 Douglas Schoenberg Method and system to process payment using url shortening and/or qr codes
US8182127B2 (en) 2008-12-27 2012-05-22 Ushio Denki Kabushiki Kaisha Light source
US20130064768A1 (en) 2010-04-01 2013-03-14 Medical Research Council Lipophilic cationic probe for pet-imaging
US8525138B2 (en) 2006-03-31 2013-09-03 Energetiq Technology, Inc. Laser-driven light source
US20140023119A1 (en) 2011-12-05 2014-01-23 Samsung Electronics Co., Ltd. Method and apparatus for generating pair of orthogonal sets with wide range of spreading factors
US20140022494A1 (en) 2012-07-23 2014-01-23 University Of Central Florida Research Foundation Inc. Liquid crystal display
US20140028809A1 (en) 2011-04-20 2014-01-30 Koninklijke Philips Electronics N.V. Position indicator for 3d display
US20140066084A1 (en) 2012-08-31 2014-03-06 Qualcomm Incorporated Providing service based on quality of service resources in a long term evolution communications system
US20140067021A1 (en) 2012-08-28 2014-03-06 Ohio State Innovation Foundation Devices, systems, and methods for treating circadian rhythm disorders
US8921814B2 (en) 2012-06-12 2014-12-30 Asml Netherlands B.V. Photon source, metrology apparatus, lithographic system and device manufacturing method
US20150018759A1 (en) 2011-08-18 2015-01-15 Héctor de Jesús Velez-Rivera Cannula holder having a guide for a stomach tube
US20150027495A1 (en) 2012-07-02 2015-01-29 Simone Rodrigues Oliveira Xavier Mat device for cleaning cosmetic brushes
US9318311B2 (en) 2011-10-11 2016-04-19 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09266158A (ja) * 1996-03-28 1997-10-07 Toshiba Lighting & Technol Corp 半導体露光装置
US6720567B2 (en) * 2001-01-30 2004-04-13 Gsi Lumonics Corporation Apparatus and method for focal point control for laser machining
JP4799748B2 (ja) 2001-03-28 2011-10-26 忠弘 大見 マイクロ波プラズマプロセス装置、プラズマ着火方法、プラズマ形成方法及びプラズマプロセス方法
US7439530B2 (en) * 2005-06-29 2008-10-21 Cymer, Inc. LPP EUV light source drive laser system
JP2005524963A (ja) 2002-05-08 2005-08-18 ダナ・コーポレーション プラズマ触媒
US7652430B1 (en) 2005-07-11 2010-01-26 Kla-Tencor Technologies Corporation Broadband plasma light sources with cone-shaped electrode for substrate processing
US8148900B1 (en) 2006-01-17 2012-04-03 Kla-Tencor Technologies Corp. Methods and systems for providing illumination of a specimen for inspection
US7872794B1 (en) * 2007-01-21 2011-01-18 Lockheed Martin Corporation High-energy eye-safe pulsed fiber amplifiers and sources operating in erbium's L-band
US9099292B1 (en) 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
JP5557487B2 (ja) 2009-07-30 2014-07-23 ウシオ電機株式会社 光源装置
US8292483B2 (en) * 2009-09-02 2012-10-23 Topanga Technologies, Inc. Optical waveguide system using electrodeless plasma source lamps
US8933367B2 (en) * 2011-02-09 2015-01-13 Sumitomo Electric Industries, Ltd. Laser processing method
US8575576B2 (en) 2011-02-14 2013-11-05 Kla-Tencor Corporation Optical imaging system with laser droplet plasma illuminator
US9512985B2 (en) 2013-02-22 2016-12-06 Kla-Tencor Corporation Systems for providing illumination in optical metrology
US9390902B2 (en) 2013-03-29 2016-07-12 Kla-Tencor Corporation Method and system for controlling convective flow in a light-sustained plasma
CN104345569B (zh) * 2013-07-24 2017-03-29 中芯国际集成电路制造(上海)有限公司 极紫外光刻机光源系统及极紫外曝光方法
US9558858B2 (en) 2013-08-14 2017-01-31 Kla-Tencor Corporation System and method for imaging a sample with a laser sustained plasma illumination output
IL234729B (en) 2013-09-20 2021-02-28 Asml Netherlands Bv A light source operated by a laser and a method using a mode mixer
US9735534B2 (en) 2013-12-17 2017-08-15 Kla-Tencor Corporation Sub 200nm laser pumped homonuclear excimer lasers
US9341761B2 (en) 2014-03-18 2016-05-17 Kla-Tencor Corporation Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
US9941655B2 (en) 2014-03-25 2018-04-10 Kla-Tencor Corporation High power broadband light source

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8525138B2 (en) 2006-03-31 2013-09-03 Energetiq Technology, Inc. Laser-driven light source
US7989786B2 (en) 2006-03-31 2011-08-02 Energetiq Technology, Inc. Laser-driven light source
US7786455B2 (en) 2006-03-31 2010-08-31 Energetiq Technology, Inc. Laser-driven light source
US7435982B2 (en) 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
US8309943B2 (en) 2006-03-31 2012-11-13 Energetiq Technology, Inc. Laser-driven light source
US7705331B1 (en) 2006-06-29 2010-04-27 Kla-Tencor Technologies Corp. Methods and systems for providing illumination of a specimen for a process performed on the specimen
US20120078782A1 (en) 2008-06-25 2012-03-29 Douglas Schoenberg Method and system to process payment using url shortening and/or qr codes
US8182127B2 (en) 2008-12-27 2012-05-22 Ushio Denki Kabushiki Kaisha Light source
US20110039552A1 (en) 2009-08-17 2011-02-17 Motorola, Inc. Method and apparatus for radio link failure recovery
US20110069534A1 (en) 2009-09-18 2011-03-24 Kabushiki Kaisha Toshiba Semiconductor memory device
US20130064768A1 (en) 2010-04-01 2013-03-14 Medical Research Council Lipophilic cationic probe for pet-imaging
US20140028809A1 (en) 2011-04-20 2014-01-30 Koninklijke Philips Electronics N.V. Position indicator for 3d display
US20150018759A1 (en) 2011-08-18 2015-01-15 Héctor de Jesús Velez-Rivera Cannula holder having a guide for a stomach tube
US9318311B2 (en) 2011-10-11 2016-04-19 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US20140023119A1 (en) 2011-12-05 2014-01-23 Samsung Electronics Co., Ltd. Method and apparatus for generating pair of orthogonal sets with wide range of spreading factors
US8921814B2 (en) 2012-06-12 2014-12-30 Asml Netherlands B.V. Photon source, metrology apparatus, lithographic system and device manufacturing method
US20150027495A1 (en) 2012-07-02 2015-01-29 Simone Rodrigues Oliveira Xavier Mat device for cleaning cosmetic brushes
US20140022494A1 (en) 2012-07-23 2014-01-23 University Of Central Florida Research Foundation Inc. Liquid crystal display
US20140067021A1 (en) 2012-08-28 2014-03-06 Ohio State Innovation Foundation Devices, systems, and methods for treating circadian rhythm disorders
US20140066084A1 (en) 2012-08-31 2014-03-06 Qualcomm Incorporated Providing service based on quality of service resources in a long term evolution communications system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
A. Schreiber et al., „Radiation Resistance of Quartz Glass for VUV Discharge Lamps", J. Phys. D: Appl. Phys. 38 (2005), 3242-3250

Also Published As

Publication number Publication date
JP7023223B2 (ja) 2022-02-21
JP7645831B2 (ja) 2025-03-14
WO2017062274A1 (en) 2017-04-13
TW201724169A (zh) 2017-07-01
CN108140538A (zh) 2018-06-08
JP2022060309A (ja) 2022-04-14
US20170150590A1 (en) 2017-05-25
TWI703611B (zh) 2020-09-01
JP2018531487A (ja) 2018-10-25
US10244613B2 (en) 2019-03-26
CN108140538B (zh) 2022-01-28

Similar Documents

Publication Publication Date Title
DE112015001623B4 (de) Lasergestützte Plasma-Lichtquelle mit optischen Elementen zum Richten einer Pumpbeleuchtung, so dass eine Vielzahl voneinander räumlich getrennter Plasmen aufrecht erhalten wird und entsprechendes Verfahren für langgestreckte Plasmen
DE112013007825B4 (de) Plasmazelle einer mittels eines lasers aufrecht erhaltenen plasmalichtquelle mit einer anordnung zur rotation des plasmakolbens und einer flüssigkeit zur filterung von vuv-strahlung
DE112007000821B4 (de) Lasergetriebene Lichtquelle
CN108140538B (zh) 用于无电极等离子体点燃的照明源及等离子体宽带源
DE60222793T2 (de) Beleuchtungseinheit
DE112015002079T5 (de) Breitbandlichtquelle mit transparentem Bereich hohen Hydroxidgehalts
DE102013215054A1 (de) Beleuchtungsvorrichtung mit Leuchtstoffrad und Anregungsstrahlungsquelle
DE112014001747T5 (de) Verfahren und Vorrichtung zur Steuerung einer Konvektionsströmung in einem lichtgestützten Plasma
DE112015001355B4 (de) Lichtquelle mit nanostrukturierter antireflexions-schicht
JP2019511819A5 (cg-RX-API-DMAC7.html)
DE112014001493T5 (de) Verfahren und System zur Steuerung der Konvektion innerhalb einer Plasmazelle
EP0706201A2 (de) Quecksilberdampf-Kurzbogenlampe
JP2018531487A6 (ja) レーザ維持プラズマ光源における無電極プラズマ点火のためのシステムおよび方法
DE10329316A1 (de) Beleuchtungssysteme mit mehreren Lampen
DE112012002703T5 (de) Optisches Pumpen zum Erhalt von Plasma
DE112015001498T5 (de) Offene Plasmalampe zur Bildung eines mittels Licht aufrechterhaltenen Plasmas
EP0151121B1 (de) Flüssigkeitsgekühlter neodym-phosphatglas-impulslaser insbesondere zu medizinischen anwendungen
DE112016000310T5 (de) System und verfahren zum inhibieren von strahlungsemission einer lasergestützten plasmaquelle
US10257918B2 (en) System and method for laser-sustained plasma illumination
DE4336058A1 (de) Mehrwellenlängen-Laser
DE4205011A1 (de) Frequenzverdoppelter festkoerperlaser
DE2243385B2 (de) Fluoreszenzauflicht-Mikroskop
DE112023001604T5 (de) Pulsunterstütztes lasergestütztes plasma in strömenden hochdruckflüssigkeiten
DE29706435U1 (de) Lichtquelle zum Gebrauch bei der Lecksuche in Heiz-, Belüftungs- und Klimatechniksystemen, die umweltschonende Materialien verwenden
EP3928913A1 (de) Bearbeitungskopf und verfahren zur laserbearbeitung

Legal Events

Date Code Title Description
R005 Application deemed withdrawn due to failure to request examination