CN108140538B - 用于无电极等离子体点燃的照明源及等离子体宽带源 - Google Patents

用于无电极等离子体点燃的照明源及等离子体宽带源 Download PDF

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Publication number
CN108140538B
CN108140538B CN201680057767.5A CN201680057767A CN108140538B CN 108140538 B CN108140538 B CN 108140538B CN 201680057767 A CN201680057767 A CN 201680057767A CN 108140538 B CN108140538 B CN 108140538B
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China
Prior art keywords
plasma
lasers
output
fiber
broadband source
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Chinese (zh)
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CN108140538A (zh
Inventor
A·希梅尔吉
R·布隆内
A·谢梅利宁
I·贝泽尔
E·基姆
R·帕蒂尔
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KLA Corp
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KLA Tencor Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Plasma Technology (AREA)
CN201680057767.5A 2015-10-04 2016-09-30 用于无电极等离子体点燃的照明源及等离子体宽带源 Active CN108140538B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562236904P 2015-10-04 2015-10-04
US62/236,904 2015-10-04
US15/280,073 US10244613B2 (en) 2015-10-04 2016-09-29 System and method for electrodeless plasma ignition in laser-sustained plasma light source
US15/280,073 2016-09-29
PCT/US2016/054733 WO2017062274A1 (en) 2015-10-04 2016-09-30 System and method for electrodeless plasma ignition in laser-sustained plasma light source

Publications (2)

Publication Number Publication Date
CN108140538A CN108140538A (zh) 2018-06-08
CN108140538B true CN108140538B (zh) 2022-01-28

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CN201680057767.5A Active CN108140538B (zh) 2015-10-04 2016-09-30 用于无电极等离子体点燃的照明源及等离子体宽带源

Country Status (6)

Country Link
US (1) US10244613B2 (cg-RX-API-DMAC7.html)
JP (2) JP7023223B2 (cg-RX-API-DMAC7.html)
CN (1) CN108140538B (cg-RX-API-DMAC7.html)
DE (1) DE112016004526T5 (cg-RX-API-DMAC7.html)
TW (1) TWI703611B (cg-RX-API-DMAC7.html)
WO (1) WO2017062274A1 (cg-RX-API-DMAC7.html)

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JP6885636B1 (ja) * 2020-03-05 2021-06-16 アールアンドディー−イーサン，リミテッド レーザ励起プラズマ光源およびプラズマ点火方法
RU2754150C1 (ru) * 2020-08-06 2021-08-30 Общество с ограниченной ответственностью "РнД-ИСАН" Высокояркостный плазменный источник света с лазерной накачкой
KR20230044314A (ko) * 2020-08-06 2023-04-03 아이에스티이큐 비.브이. 고휘도 레이저 펌핑 플라즈마 광원 및 수차 감소 방법
RU2752778C1 (ru) * 2020-08-06 2021-08-03 Общество с ограниченной ответственностью "РнД-ИСАН" Плазменный источник света с лазерной накачкой и способ генерации излучения
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CN113431723B (zh) * 2021-07-14 2022-09-16 吉林大学 一种基于飞秒激光点火的光丝烧蚀点火系统及方法
US12165856B2 (en) 2022-02-21 2024-12-10 Hamamatsu Photonics K.K. Inductively coupled plasma light source
US12144072B2 (en) * 2022-03-29 2024-11-12 Hamamatsu Photonics K.K. All-optical laser-driven light source with electrodeless ignition
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CN118737808B (zh) * 2024-05-13 2025-10-24 中国科学院西安光学精密机械研究所 一种脉冲连续复合型光纤激光维持等离子体光源

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Also Published As

Publication number Publication date
JP7023223B2 (ja) 2022-02-21
JP7645831B2 (ja) 2025-03-14
WO2017062274A1 (en) 2017-04-13
TW201724169A (zh) 2017-07-01
CN108140538A (zh) 2018-06-08
JP2022060309A (ja) 2022-04-14
DE112016004526T5 (de) 2018-06-14
US20170150590A1 (en) 2017-05-25
TWI703611B (zh) 2020-09-01
JP2018531487A (ja) 2018-10-25
US10244613B2 (en) 2019-03-26

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