JP7023223B2 - レーザ維持プラズマ光源における無電極プラズマ点火のための照明源およびプラズマ光源 - Google Patents

レーザ維持プラズマ光源における無電極プラズマ点火のための照明源およびプラズマ光源 Download PDF

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Publication number
JP7023223B2
JP7023223B2 JP2018517290A JP2018517290A JP7023223B2 JP 7023223 B2 JP7023223 B2 JP 7023223B2 JP 2018517290 A JP2018517290 A JP 2018517290A JP 2018517290 A JP2018517290 A JP 2018517290A JP 7023223 B2 JP7023223 B2 JP 7023223B2
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plasma
lasers
light source
ignition
plasma light
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JP2018531487A (ja
JP2018531487A6 (ja
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アナント チーマルギ
ルドルフ ブルナー
アナトリー シェメリニン
イリヤ ベゼル
エリック キム
ラジーフ パティル
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KLA Corp
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KLA Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Plasma Technology (AREA)
JP2018517290A 2015-10-04 2016-09-30 レーザ維持プラズマ光源における無電極プラズマ点火のための照明源およびプラズマ光源 Active JP7023223B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022018253A JP7645831B2 (ja) 2015-10-04 2022-02-08 照明源及びプラズマ光源

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562236904P 2015-10-04 2015-10-04
US62/236,904 2015-10-04
US15/280,073 US10244613B2 (en) 2015-10-04 2016-09-29 System and method for electrodeless plasma ignition in laser-sustained plasma light source
US15/280,073 2016-09-29
PCT/US2016/054733 WO2017062274A1 (en) 2015-10-04 2016-09-30 System and method for electrodeless plasma ignition in laser-sustained plasma light source

Related Child Applications (1)

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JP2022018253A Division JP7645831B2 (ja) 2015-10-04 2022-02-08 照明源及びプラズマ光源

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JP2018531487A JP2018531487A (ja) 2018-10-25
JP2018531487A6 JP2018531487A6 (ja) 2018-12-13
JP7023223B2 true JP7023223B2 (ja) 2022-02-21

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JP2022018253A Active JP7645831B2 (ja) 2015-10-04 2022-02-08 照明源及びプラズマ光源

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US (1) US10244613B2 (cg-RX-API-DMAC7.html)
JP (2) JP7023223B2 (cg-RX-API-DMAC7.html)
CN (1) CN108140538B (cg-RX-API-DMAC7.html)
DE (1) DE112016004526T5 (cg-RX-API-DMAC7.html)
TW (1) TWI703611B (cg-RX-API-DMAC7.html)
WO (1) WO2017062274A1 (cg-RX-API-DMAC7.html)

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US11844172B2 (en) * 2019-10-16 2023-12-12 Kla Corporation System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources
RU2732999C1 (ru) * 2020-03-05 2020-09-28 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ зажигания плазмы
JP6885636B1 (ja) * 2020-03-05 2021-06-16 アールアンドディー−イーサン，リミテッド レーザ励起プラズマ光源およびプラズマ点火方法
RU2754150C1 (ru) * 2020-08-06 2021-08-30 Общество с ограниченной ответственностью "РнД-ИСАН" Высокояркостный плазменный источник света с лазерной накачкой
KR20230044314A (ko) * 2020-08-06 2023-04-03 아이에스티이큐 비.브이. 고휘도 레이저 펌핑 플라즈마 광원 및 수차 감소 방법
RU2752778C1 (ru) * 2020-08-06 2021-08-03 Общество с ограниченной ответственностью "РнД-ИСАН" Плазменный источник света с лазерной накачкой и способ генерации излучения
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US11587781B2 (en) 2021-05-24 2023-02-21 Hamamatsu Photonics K.K. Laser-driven light source with electrodeless ignition
CN113431723B (zh) * 2021-07-14 2022-09-16 吉林大学 一种基于飞秒激光点火的光丝烧蚀点火系统及方法
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Also Published As

Publication number Publication date
JP7645831B2 (ja) 2025-03-14
WO2017062274A1 (en) 2017-04-13
TW201724169A (zh) 2017-07-01
CN108140538A (zh) 2018-06-08
JP2022060309A (ja) 2022-04-14
DE112016004526T5 (de) 2018-06-14
US20170150590A1 (en) 2017-05-25
TWI703611B (zh) 2020-09-01
JP2018531487A (ja) 2018-10-25
US10244613B2 (en) 2019-03-26
CN108140538B (zh) 2022-01-28

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