DE112015001642B4 - Verfahren zur Lochbildung und Messvorrichtung - Google Patents

Verfahren zur Lochbildung und Messvorrichtung Download PDF

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Publication number
DE112015001642B4
DE112015001642B4 DE112015001642.2T DE112015001642T DE112015001642B4 DE 112015001642 B4 DE112015001642 B4 DE 112015001642B4 DE 112015001642 T DE112015001642 T DE 112015001642T DE 112015001642 B4 DE112015001642 B4 DE 112015001642B4
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Germany
Prior art keywords
voltage
electrode
hole
insulating film
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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DE112015001642.2T
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German (de)
English (en)
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DE112015001642T5 (de
Inventor
Naoshi Itabashi
Sonoko Migitaka
Itaru Yanagi
Rena Akahori
Kenichi Takeda
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Hitachi High-Tech Corp
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Hitachi High-Tech Corp
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Publication date
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Publication of DE112015001642T5 publication Critical patent/DE112015001642T5/de
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44704—Details; Accessories
    • G01N27/44717—Arrangements for investigating the separated zones, e.g. localising zones
    • G01N27/44721—Arrangements for investigating the separated zones, e.g. localising zones by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/648—Specially adapted constructive features of fluorimeters using evanescent coupling or surface plasmon coupling for the excitation of fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6486—Measuring fluorescence of biological material, e.g. DNA, RNA, cells
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416—Systems
    • G01N27/447—Systems using electrophoresis
    • G01N27/44756—Apparatus specially adapted therefor
    • G01N27/44791—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Hematology (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE112015001642.2T 2014-04-02 2015-03-26 Verfahren zur Lochbildung und Messvorrichtung Expired - Fee Related DE112015001642B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP2014075880 2014-04-02
JP2014075880A JP6209122B2 (ja) 2014-04-02 2014-04-02 孔形成方法及び測定装置
PCT/JP2015/059424 WO2015152003A1 (ja) 2014-04-02 2015-03-26 孔形成方法及び測定装置

Publications (2)

Publication Number Publication Date
DE112015001642T5 DE112015001642T5 (de) 2016-12-29
DE112015001642B4 true DE112015001642B4 (de) 2021-12-09

Family

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Family Applications (1)

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DE112015001642.2T Expired - Fee Related DE112015001642B4 (de) 2014-04-02 2015-03-26 Verfahren zur Lochbildung und Messvorrichtung

Country Status (6)

Country Link
US (1) US11181502B2 (cg-RX-API-DMAC7.html)
JP (1) JP6209122B2 (cg-RX-API-DMAC7.html)
CN (1) CN106133507B (cg-RX-API-DMAC7.html)
DE (1) DE112015001642B4 (cg-RX-API-DMAC7.html)
GB (1) GB2538482B (cg-RX-API-DMAC7.html)
WO (1) WO2015152003A1 (cg-RX-API-DMAC7.html)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10753009B2 (en) * 2015-02-24 2020-08-25 The University Of Ottawa Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown
WO2016142925A1 (en) * 2015-03-12 2016-09-15 Ecole Polytechnique Federale De Lausanne (Epfl) Nanopore forming method and uses thereof
GB201508669D0 (en) 2015-05-20 2015-07-01 Oxford Nanopore Tech Ltd Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown
EP3376209B1 (en) * 2015-11-13 2019-11-20 Konica Minolta, Inc. Method for surface plasmon resonance fluorescence analysis and device for surface plasmon resonance fluorescence analysis
US10908121B2 (en) 2016-04-28 2021-02-02 Hitachi, Ltd. Membrane device, measurement device, and method for producing membrane device
DE102016222613B3 (de) * 2016-11-17 2018-05-03 Universität Ulm Messzelle für die Raman-Spektroskopie an einer Fest-Flüssig-Grenzfläche und Verwendungen hiervon
JP6730171B2 (ja) * 2016-12-07 2020-07-29 株式会社日立製作所 液槽形成方法，測定装置及び分析デバイス
CN109890497B (zh) * 2016-12-09 2021-03-02 株式会社日立高新技术 纳米孔隙形成方法、纳米孔隙形成装置以及生物分子测量装置
US10443146B2 (en) 2017-03-30 2019-10-15 Lam Research Corporation Monitoring surface oxide on seed layers during electroplating
JP6846309B2 (ja) * 2017-08-09 2021-03-24 株式会社日立製作所 溶液槽デバイス
US20190094179A1 (en) * 2017-09-22 2019-03-28 Applied Materials, Inc. Method for simple fluidic addressing of a nanopore
JP6959121B2 (ja) * 2017-12-05 2021-11-02 株式会社日立ハイテク 孔形成方法及び孔形成装置
JP7440375B2 (ja) * 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
US12208400B2 (en) 2021-05-25 2025-01-28 Arizona Board Of Regents On Behalf Of Arizona State University Systems and methods for non-destructive isolation, concentration, and detection for unbiased characterization of nano- and bioparticles
JP1732280S (ja) * 2022-01-07 2022-12-15 ラマン顕微鏡
CN114705743A (zh) * 2022-04-01 2022-07-05 南京师范大学 一种基于纳米孔的实验装置及实验方法
WO2024092035A1 (en) * 2022-10-26 2024-05-02 Molariti, Inc. Devices, systems, and methods for processing samples

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110249259A1 (en) 2008-12-09 2011-10-13 Katholieke Universiteit Leuven, K.U. Leuven R&D Single Molecule Optical Spectroscopy in Solid-State Nanopores in a Transmission-Based Approach
WO2013167952A1 (en) 2012-05-07 2013-11-14 The University Of Ottawa Method for controlling the size of solid-state nanopores

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US7258838B2 (en) * 1999-06-22 2007-08-21 President And Fellows Of Harvard College Solid state molecular probe device
EP1592641B1 (en) * 2003-02-03 2018-03-07 President and Fellows of Harvard College Controlled fabrication of gaps in electrically conducting structures
US7162933B2 (en) * 2004-06-30 2007-01-16 Valtronics, Inc. Gas sample conditioning system
JP2009063402A (ja) * 2007-09-06 2009-03-26 Canon Inc センサ素子の作製装置、センサ素子の作製方法、及びセンサ素子を備えたセンシング装置
EP2623960B1 (en) * 2010-09-29 2020-11-11 Hitachi High-Tech Corporation Biopolymer optical analysis device and method
JP5819183B2 (ja) * 2011-02-03 2015-11-18 アークレイ株式会社 分析装置、センサの検査装置、検査方法、及び検査プログラム
JP2013090576A (ja) * 2011-10-24 2013-05-16 Hitachi Ltd 核酸分析デバイス及びそれを用いた核酸分析装置
US10613076B2 (en) * 2013-03-14 2020-04-07 The Trustees Of Boston University Optoelectronic control of solid-state nanopores
EP2969918B1 (en) * 2013-03-15 2018-08-22 President and Fellows of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110249259A1 (en) 2008-12-09 2011-10-13 Katholieke Universiteit Leuven, K.U. Leuven R&D Single Molecule Optical Spectroscopy in Solid-State Nanopores in a Transmission-Based Approach
WO2013167952A1 (en) 2012-05-07 2013-11-14 The University Of Ottawa Method for controlling the size of solid-state nanopores

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Jacob K. Rosenstein, et al., „Integrated nanopore sensing platform with sub-microsecond temporal resolution", Nature Methods, Vol. 9, No. 5, 487-492 (2012)
Kwok, H.; Briggs, K.; and Tabard-Cossa, V.; „Nanopore Fabrication by Controlled Dielectric Breakdown", PLOS ONE, Vol.9, Issue 3, e92880 (2014)

Also Published As

Publication number Publication date
WO2015152003A1 (ja) 2015-10-08
JP2015197385A (ja) 2015-11-09
GB201616120D0 (en) 2016-11-09
CN106133507B (zh) 2018-06-15
US20170138899A1 (en) 2017-05-18
CN106133507A (zh) 2016-11-16
US11181502B2 (en) 2021-11-23
GB2538482B (en) 2020-08-26
DE112015001642T5 (de) 2016-12-29
JP6209122B2 (ja) 2017-10-04
GB2538482A (en) 2016-11-16

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