DE112014003832A5 - Ausrichteinrichtung und Handhabungsvorrichtung - Google Patents

Ausrichteinrichtung und Handhabungsvorrichtung Download PDF

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Publication number
DE112014003832A5
DE112014003832A5 DE112014003832.6T DE112014003832T DE112014003832A5 DE 112014003832 A5 DE112014003832 A5 DE 112014003832A5 DE 112014003832 T DE112014003832 T DE 112014003832T DE 112014003832 A5 DE112014003832 A5 DE 112014003832A5
Authority
DE
Germany
Prior art keywords
alignment
handling
handling device
alignment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112014003832.6T
Other languages
English (en)
Inventor
Stefan Thurmaier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TURBODYNAMICS GmbH
Original Assignee
TURBODYNAMICS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TURBODYNAMICS GmbH filed Critical TURBODYNAMICS GmbH
Publication of DE112014003832A5 publication Critical patent/DE112014003832A5/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
DE112014003832.6T 2013-08-21 2014-08-21 Ausrichteinrichtung und Handhabungsvorrichtung Pending DE112014003832A5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013109055.9 2013-08-21
DE102013109055.9A DE102013109055A1 (de) 2013-08-21 2013-08-21 Ausrichteinrichtung und Handhabungsvorrichtung
PCT/EP2014/067867 WO2015025024A2 (de) 2013-08-21 2014-08-21 Ausrichteinrichtung und handhabungsvorrichtung

Publications (1)

Publication Number Publication Date
DE112014003832A5 true DE112014003832A5 (de) 2016-05-12

Family

ID=51390121

Family Applications (2)

Application Number Title Priority Date Filing Date
DE102013109055.9A Withdrawn DE102013109055A1 (de) 2013-08-21 2013-08-21 Ausrichteinrichtung und Handhabungsvorrichtung
DE112014003832.6T Pending DE112014003832A5 (de) 2013-08-21 2014-08-21 Ausrichteinrichtung und Handhabungsvorrichtung

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE102013109055.9A Withdrawn DE102013109055A1 (de) 2013-08-21 2013-08-21 Ausrichteinrichtung und Handhabungsvorrichtung

Country Status (4)

Country Link
US (1) US10416230B2 (de)
CN (1) CN105659101B (de)
DE (2) DE102013109055A1 (de)
WO (1) WO2015025024A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017117257A1 (en) * 2015-12-28 2017-07-06 Celadon Systems, Inc. Modular rail systems, rail systems, mechanisms, and equipment for devices under test
KR20200122469A (ko) * 2019-04-18 2020-10-28 (주)테크윙 전자부품 테스트용 핸들러의 인서트 및 테스트트레이
DE102020104641A1 (de) 2020-02-21 2021-08-26 Turbodynamics Gmbh Träger für eine Schnittstelleneinheit, Speichervorrichtung und Dispositionssystem zum automatischen Verwalten von Schnittstelleneinheiten
CN112461556B (zh) * 2020-10-27 2022-09-27 东风汽车底盘系统有限公司 一种用于侧向压弯导向臂的载荷试验工装
DE102021114564A1 (de) 2021-06-07 2022-12-08 Turbodynamics Gmbh Docking-Vorrichtung und Verfahren zum Koppeln zweiter Vorrichtungen für Schnittstelleneinheiten, Dispositionssystem und Docking-Element
CN114487838B (zh) * 2022-01-17 2022-10-14 清研精准(北京)汽车科技有限公司 一种电池包测试用自动对插装置

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3524348A1 (de) 1985-07-08 1987-01-29 Heigl Helmuth Vorrichtung zum positionieren von testkoepfen
US4721198A (en) 1985-11-13 1988-01-26 Ando Electric Co., Ltd. Probe card clamping and changing mechanism
DE4007011C2 (de) 1990-03-06 1999-11-18 Helmuth Heigl Positioniervorrichtung
US5471148A (en) 1993-06-24 1995-11-28 Xandex, Inc. Probe card changer system and method
US5528158A (en) 1994-04-11 1996-06-18 Xandex, Inc. Probe card changer system and method
JP2818142B2 (ja) 1995-12-08 1998-10-30 アジアエレクトロニクス株式会社 半導体試験装置
US5923180A (en) 1997-02-04 1999-07-13 Hewlett-Packard Company Compliant wafer prober docking adapter
US6271658B1 (en) * 1998-10-19 2001-08-07 St Assembly Test Services Pte, Ltd. Universal Docking System
DE10016530C1 (de) * 2000-04-03 2001-10-25 Microhandling Handhabungsgerae Handhabungsgerät für einen Testkopf
US6741072B2 (en) * 2000-09-15 2004-05-25 James E. Orsillo Docking system for connecting a tester to a probe station using an A-type docking configuration
TW523601B (en) * 2000-10-02 2003-03-11 James E Orsillo Docking system for connecting a tester to a probe station using an A-type docking configuration
US6586925B2 (en) * 2001-04-09 2003-07-01 St Assembly Test Services Ltd. Method and apparatus for establishing quick and reliable connection between a semiconductor device handler plate and a semiconductor device test head plate
DE10132489B4 (de) 2001-07-05 2004-12-09 Heigl, Cornelia Handhabungsvorrichtung, insbesondere zum Positionieren eines Testkopfs an einer Prüfeinrichtung
JP4798595B2 (ja) * 2001-08-07 2011-10-19 東京エレクトロン株式会社 プローブカード搬送装置及びプローブカード搬送方法
DE10159165B4 (de) * 2001-12-03 2007-02-08 Agilent Technologies, Inc. (n.d.Ges.d.Staates Delaware), Palo Alto Vorrichtung zum Messen und/oder Kalibrieren eines Testkopfes
US6897645B2 (en) * 2001-12-29 2005-05-24 Vincent Hing Chung So Docking system and method for docking in automated testing systems
DE10205115B4 (de) 2002-02-07 2005-10-06 Kupka, Harald Kopplungsvorrichtung für Platinen
DE10216782B4 (de) 2002-04-15 2005-03-10 Multitest Elektronische Syst Führungsvorrichtung zum Andocken eines Testkopfes für elektronische Bauelemente
US6756800B2 (en) 2002-04-16 2004-06-29 Teradyne, Inc. Semiconductor test system with easily changed interface unit
US6717432B2 (en) * 2002-04-16 2004-04-06 Teradyne, Inc. Single axis manipulator with controlled compliance
US6748667B2 (en) * 2002-08-14 2004-06-15 L&L Products, Inc. Low profile, one hand go-no-go gage and locator
DE10245865B4 (de) * 2002-09-30 2012-06-06 Esmo Ag Positionier- und Verriegelungsvorrichtung
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
EP1947466B1 (de) * 2003-08-06 2012-07-04 inTEST Corporation Testkopfpositionierungssystem
US7276895B2 (en) * 2003-10-03 2007-10-02 Intest Corporation Adjustable test head docking apparatus
DE202004021182U1 (de) * 2004-02-20 2007-02-01 Heigl, Helmuth, Dr. Handhabungsvorrichtung, insbesondere zum Positionieren eines Testkopfs an einer Prüfeinrichtung
DE102004026031B3 (de) * 2004-05-27 2005-08-11 Heigl, Helmuth, Dr.-Ing. Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
DE102004057776B4 (de) 2004-11-30 2011-08-18 Multitest elektronische Systeme GmbH, 83026 Lagekorrektureinrichtung zur Korrektur der Position eines Bauelementehalters für elektronische Bauelemente
DE102005019564B4 (de) * 2005-04-27 2007-10-31 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
US7221175B2 (en) * 2005-05-11 2007-05-22 Stats Chippac Ltd. Self-aligning docking system for electronic device testing
DE102005036808B4 (de) * 2005-08-04 2007-12-13 Stefan Thurmaier Druckmittelbetätigte Dockingvorrichtung
DE102005048237B3 (de) * 2005-10-07 2007-03-15 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
DE102007011700B4 (de) * 2007-03-09 2009-03-26 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
US7733081B2 (en) * 2007-10-19 2010-06-08 Teradyne, Inc. Automated test equipment interface
US9025827B2 (en) 2011-10-19 2015-05-05 Crown Equipment Corporation Controlling truck forks based on identifying and tracking multiple objects in an image scene

Also Published As

Publication number Publication date
CN105659101B (zh) 2019-08-06
DE102013109055A1 (de) 2015-02-26
WO2015025024A2 (de) 2015-02-26
WO2015025024A3 (de) 2015-04-16
CN105659101A (zh) 2016-06-08
US10416230B2 (en) 2019-09-17
US20160202311A1 (en) 2016-07-14

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R016 Response to examination communication
R083 Amendment of/additions to inventor(s)