DE112013007305A5 - Verfahren zum Bearbeiten eines plattenartigen Werkstückes mit einer transparenten, gläsernen, glasartigen keramischen und/oder kristallinen Lage, Trennvorrichtung für ein derartiges Werkstück sowie Produkt aus einem derartigen Werkstück - Google Patents

Verfahren zum Bearbeiten eines plattenartigen Werkstückes mit einer transparenten, gläsernen, glasartigen keramischen und/oder kristallinen Lage, Trennvorrichtung für ein derartiges Werkstück sowie Produkt aus einem derartigen Werkstück Download PDF

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Publication number
DE112013007305A5
DE112013007305A5 DE112013007305.6T DE112013007305T DE112013007305A5 DE 112013007305 A5 DE112013007305 A5 DE 112013007305A5 DE 112013007305 T DE112013007305 T DE 112013007305T DE 112013007305 A5 DE112013007305 A5 DE 112013007305A5
Authority
DE
Germany
Prior art keywords
workpiece
vitreous
glassy
ceramic
transparent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112013007305.6T
Other languages
English (en)
Inventor
Malte Kumkar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Laser und Systemtechnik GmbH
Original Assignee
Trumpf Laser und Systemtechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Laser und Systemtechnik GmbH filed Critical Trumpf Laser und Systemtechnik GmbH
Publication of DE112013007305A5 publication Critical patent/DE112013007305A5/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/0222—Scoring using a focussed radiation beam, e.g. laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/221—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising by thermic methods
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033—Apparatus for opening score lines in glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52—Ceramics
DE112013007305.6T 2013-08-07 2013-08-07 Verfahren zum Bearbeiten eines plattenartigen Werkstückes mit einer transparenten, gläsernen, glasartigen keramischen und/oder kristallinen Lage, Trennvorrichtung für ein derartiges Werkstück sowie Produkt aus einem derartigen Werkstück Pending DE112013007305A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2013/002366 WO2015018425A1 (de) 2013-08-07 2013-08-07 Verfahren zum bearbeiten eines plattenartigen werkstückes mit einer transparenten, gläsernen, glasartigen, keramischen und/oder kristallinen lage, trennvorrichtung für ein derartiges werkstück sowie produkt aus einem derartigen werkstück

Publications (1)

Publication Number Publication Date
DE112013007305A5 true DE112013007305A5 (de) 2016-06-02

Family

ID=49034031

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013007305.6T Pending DE112013007305A5 (de) 2013-08-07 2013-08-07 Verfahren zum Bearbeiten eines plattenartigen Werkstückes mit einer transparenten, gläsernen, glasartigen keramischen und/oder kristallinen Lage, Trennvorrichtung für ein derartiges Werkstück sowie Produkt aus einem derartigen Werkstück

Country Status (5)

Country Link
US (1) US10941069B2 (de)
JP (1) JP2016534008A (de)
CN (1) CN105592994B (de)
DE (1) DE112013007305A5 (de)
WO (1) WO2015018425A1 (de)

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DE102014116957A1 (de) 2014-11-19 2016-05-19 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung
DE102014116958B9 (de) 2014-11-19 2017-10-05 Trumpf Laser- Und Systemtechnik Gmbh Optisches System zur Strahlformung eines Laserstrahls, Laserbearbeitungsanlage, Verfahren zur Materialbearbeitung und Verwenden einer gemeinsamen langgezogenen Fokuszone zur Lasermaterialbearbeitung
DE102017106372B4 (de) * 2017-03-24 2021-04-29 Lpkf Laser & Electronics Ag Verfahren zur Bearbeitung eines Werkstückes
KR102260931B1 (ko) * 2017-05-15 2021-06-04 엘피케이에프 레이저 앤드 일렉트로닉스 악티엔게젤샤프트 레이저 유도 디프 반응성 에칭을 이용해 기판을 가공하기 위한, 특히 분리하기 위한 방법
JP6501093B1 (ja) * 2017-12-08 2019-04-17 株式会社Ｎｓｃ 透明性薄膜付ガラスパネル製造方法および透明性薄膜付液晶パネル製造方法
JP6519045B2 (ja) * 2017-05-24 2019-05-29 株式会社Ｎｓｃ ガラスパネル製造方法および液晶パネル製造方法
CN110770640A (zh) * 2017-05-24 2020-02-07 株式会社Ｎｓｃ 带透明薄膜的玻璃面板的制造方法、带透明薄膜的液晶面板的制造方法、玻璃面板制造方法以及液晶面板制造方法
JP7009194B2 (ja) * 2017-12-12 2022-01-25 株式会社ディスコ ウエーハ生成装置および搬送トレー
JP7058870B2 (ja) * 2018-05-21 2022-04-25 株式会社Nsc 液晶パネル製造方法
JP7287637B2 (ja) * 2018-10-04 2023-06-06 株式会社Nsc 液晶パネル製造方法
JP7164396B2 (ja) * 2018-10-29 2022-11-01 株式会社ディスコ ウエーハ生成装置
WO2020190489A1 (en) * 2019-03-21 2020-09-24 Corning Incorporated Systems for and methods of forming micro-holes in glass-based objects using an annular vortex laser beam
LT6791B (lt) 2019-05-15 2020-12-28 Uab "Altechna R&D" Skaidrių medžiagų apdirbimo būdas ir įrenginys
DE102019121827A1 (de) * 2019-08-13 2021-02-18 Trumpf Laser- Und Systemtechnik Gmbh Laserätzen mit variierender Ätzselektivität
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WO2023099946A1 (en) 2021-12-02 2023-06-08 Uab Altechna R&D Pulsed laser beam shaping device for laser processing of a material transparent for the laser beam

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Also Published As

Publication number Publication date
US20160152508A1 (en) 2016-06-02
JP2016534008A (ja) 2016-11-04
US10941069B2 (en) 2021-03-09
CN105592994A (zh) 2016-05-18
CN105592994B (zh) 2018-10-12
WO2015018425A1 (de) 2015-02-12

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R016 Response to examination communication
R082 Change of representative

Representative=s name: KUEMMEL, FELIX, DIPL.-PHYS. DR. RER. NAT., DE

R082 Change of representative

Representative=s name: KUEMMEL, FELIX, DIPL.-PHYS. DR. RER. NAT., DE