DE112013004552T8 - Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung - Google Patents

Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung Download PDF

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Publication number
DE112013004552T8
DE112013004552T8 DE112013004552.4T DE112013004552T DE112013004552T8 DE 112013004552 T8 DE112013004552 T8 DE 112013004552T8 DE 112013004552 T DE112013004552 T DE 112013004552T DE 112013004552 T8 DE112013004552 T8 DE 112013004552T8
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Germany
Prior art keywords
semiconductor device
manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112013004552.4T
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English (en)
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DE112013004552T5 (de
Inventor
c/o Fuji Electric Co. Ltd. Gohara Hiromichi
c/o Fuji Electric Co. Ltd. Morozumi Akira
c/o Fuji Electric Co. Ltd Yamada Takafumi
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Fuji Electric Co Ltd
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Fuji Electric Co Ltd
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Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Publication of DE112013004552T5 publication Critical patent/DE112013004552T5/de
Application granted granted Critical
Publication of DE112013004552T8 publication Critical patent/DE112013004552T8/de
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
    • H01L2224/81053—Bonding environment
    • H01L2224/81085—Bonding environment being a liquid, e.g. for fluidic self-assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/13—Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304—Transistor
    • H01L2924/1305—Bipolar Junction Transistor [BJT]
    • H01L2924/13055—Insulated gate bipolar transistor [IGBT]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/156—Material
    • H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • H01L2924/15787—Ceramics, e.g. crystalline carbides, nitrides or oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/35—Mechanical effects
    • H01L2924/351—Thermal stress

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
DE112013004552.4T 2012-09-19 2013-08-13 Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung Expired - Fee Related DE112013004552T8 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP2012206267 2012-09-19
JP2012206267 2012-09-19
PCT/JP2013/071881 WO2014045766A1 (ja) 2012-09-19 2013-08-13 半導体装置及び半導体装置の製造方法

Publications (2)

Publication Number Publication Date
DE112013004552T5 DE112013004552T5 (de) 2015-06-03
DE112013004552T8 true DE112013004552T8 (de) 2015-07-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013004552.4T Expired - Fee Related DE112013004552T8 (de) 2012-09-19 2013-08-13 Halbleitervorrichtung und Verfahren zum Herstellen einer Halbleitervorrichtung

Country Status (5)

Country Link
US (1) US20150008574A1 (de)
JP (1) JPWO2014045766A1 (de)
CN (1) CN104247009A (de)
DE (1) DE112013004552T8 (de)
WO (1) WO2014045766A1 (de)

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DE202014106063U1 (de) * 2014-12-16 2015-02-12 Danfoss Silicon Power Gmbh Kühlwanne, Kühler und Leistungsmodulbaugruppe
CN107004653B (zh) * 2015-01-26 2019-03-22 三菱电机株式会社 半导体装置以及半导体装置的制造方法
JP6529324B2 (ja) * 2015-04-24 2019-06-12 株式会社Uacj 熱交換器
EP3745455B1 (de) * 2015-06-03 2021-11-17 Mitsubishi Electric Corporation Herstellungsverfahren für wärmestrahlungsrippen in einer flüssigkeitskühlvorrichtung
JP6460921B2 (ja) * 2015-06-15 2019-01-30 三菱電機株式会社 電力半導体装置用冷却装置及びその製造方法
US9713284B2 (en) * 2015-07-15 2017-07-18 Hong Kong Applied Science And Technology Research Institute Co. Ltd. Locally enhanced direct liquid cooling system for high power applications
JP2018200908A (ja) * 2015-10-20 2018-12-20 三菱電機株式会社 電力半導体装置の製造方法および電力半導体装置
CN205213228U (zh) * 2015-10-30 2016-05-04 比亚迪股份有限公司 散热器底板以及具有其的散热器和igbt模组
EP3163611B1 (de) * 2015-11-02 2021-06-30 ABB Schweiz AG Elektronische leistungsbaugruppe
CN105278223A (zh) * 2015-11-19 2016-01-27 华蓥市双河第三小学 一种多媒体教学用投影仪
CN105334685A (zh) * 2015-11-19 2016-02-17 华蓥市双河第三小学 一种投影仪灯泡
CN105278221A (zh) * 2015-11-19 2016-01-27 华蓥市双河第三小学 一种高效散热的投影仪
CN105278219A (zh) * 2015-11-19 2016-01-27 华蓥市双河第三小学 一种投影仪
CN105278222A (zh) * 2015-11-19 2016-01-27 华蓥市双河第三小学 一种风冷水冷式投影仪
CN108292640B (zh) * 2015-11-25 2021-10-08 三菱电机株式会社 半导体装置、逆变器装置及汽车
CN107084550A (zh) * 2016-02-16 2017-08-22 广东富信科技股份有限公司 半导体制冷组件及冰淇淋机
US9935106B2 (en) * 2016-04-01 2018-04-03 Globalfoundries Inc. Multi-finger devices in mutliple-gate-contacted-pitch, integrated structures
JP6579037B2 (ja) * 2016-05-30 2019-09-25 日本軽金属株式会社 パワーデバイス用冷却器の製造方法
JP6805751B2 (ja) * 2016-11-25 2020-12-23 セイコーエプソン株式会社 光学装置およびプロジェクター
EP3454367B1 (de) * 2016-12-20 2021-08-25 Fuji Electric Co., Ltd. Halbleitermodul
CN106876343A (zh) * 2017-01-22 2017-06-20 上海道之科技有限公司 一种集成水冷散热器的功率模块
JP6743916B2 (ja) * 2017-02-13 2020-08-19 富士電機株式会社 半導体装置及び半導体装置の製造方法
US10950522B2 (en) * 2017-02-13 2021-03-16 Shindengen Electric Manufacturing Co., Ltd. Electronic device
CN109874386B (zh) * 2017-04-27 2021-09-10 富士电机株式会社 电子部件和电力变换装置
CN107359143A (zh) * 2017-07-17 2017-11-17 上海道之科技有限公司 一种绝缘栅双极型晶体管模块
CN107275291A (zh) * 2017-07-17 2017-10-20 上海道之科技有限公司 一种水冷绝缘栅双极型晶体管igbt模块
JP2019033624A (ja) * 2017-08-09 2019-02-28 株式会社デンソー 電力変換装置
US10665525B2 (en) * 2018-05-01 2020-05-26 Semiconductor Components Industries, Llc Heat transfer for power modules
US10900412B2 (en) * 2018-05-31 2021-01-26 Borg Warner Inc. Electronics assembly having a heat sink and an electrical insulator directly bonded to the heat sink
JP7047929B2 (ja) 2018-10-03 2022-04-05 富士電機株式会社 半導体装置
JP7126423B2 (ja) * 2018-10-05 2022-08-26 昭和電工株式会社 冷却器、そのベース板および半導体装置
US11129310B2 (en) * 2018-11-22 2021-09-21 Fuji Electric Co., Ltd. Semiconductor module, vehicle and manufacturing method
US11145571B2 (en) * 2019-06-04 2021-10-12 Semiconductor Components Industries, Llc Heat transfer for power modules
WO2021014002A1 (en) 2019-07-25 2021-01-28 Abb Power Grids Switzerland Ag Arrangement of a power semiconductor module and a cooler
CN112292007A (zh) * 2020-11-02 2021-01-29 阳光电源股份有限公司 水冷散热装置及电器装置
CN114050198B (zh) * 2021-09-30 2024-05-17 北京大学 一种基于半导体材料的辐射热流调控器件及其应用
EP4187591A1 (de) * 2021-11-26 2023-05-31 Hitachi Energy Switzerland AG Grundplatte und verfahren zur herstellung einer grundplatte für ein leistungsmodul und halbleiterbauelement
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Also Published As

Publication number Publication date
CN104247009A (zh) 2014-12-24
DE112013004552T5 (de) 2015-06-03
US20150008574A1 (en) 2015-01-08
WO2014045766A1 (ja) 2014-03-27
JPWO2014045766A1 (ja) 2016-08-18

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