DE112013003131T5 - Reduktion von Strahlungsthermometrie-Abweichungsfehlern in einem CVD-Reaktor - Google Patents
Reduktion von Strahlungsthermometrie-Abweichungsfehlern in einem CVD-Reaktor Download PDFInfo
- Publication number
- DE112013003131T5 DE112013003131T5 DE201311003131 DE112013003131T DE112013003131T5 DE 112013003131 T5 DE112013003131 T5 DE 112013003131T5 DE 201311003131 DE201311003131 DE 201311003131 DE 112013003131 T DE112013003131 T DE 112013003131T DE 112013003131 T5 DE112013003131 T5 DE 112013003131T5
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Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/07—Arrangements for adjusting the solid angle of collected radiation, e.g. adjusting or orienting field of view, tracking position or encoding angular position
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation by radiant heating of the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
- Chemical Vapour Deposition (AREA)
- Measurement Of Radiation (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/531,220 US9085824B2 (en) | 2012-06-22 | 2012-06-22 | Control of stray radiation in a CVD chamber |
| US13/531,220 | 2012-06-22 | ||
| US13/531,162 US9448119B2 (en) | 2012-06-22 | 2012-06-22 | Radiation thermometer using off-focus telecentric optics |
| US13/531,162 | 2012-06-22 | ||
| PCT/US2013/047024 WO2013192510A1 (en) | 2012-06-22 | 2013-06-21 | Reduction of radiation thermometry bias errors in a cvd reactor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112013003131T5 true DE112013003131T5 (de) | 2015-04-16 |
Family
ID=49769419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE201311003131 Pending DE112013003131T5 (de) | 2012-06-22 | 2013-06-21 | Reduktion von Strahlungsthermometrie-Abweichungsfehlern in einem CVD-Reaktor |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JP2015528106A (ja) |
| KR (1) | KR101679995B1 (ja) |
| CN (2) | CN104520470B (ja) |
| DE (1) | DE112013003131T5 (ja) |
| SG (1) | SG11201408492QA (ja) |
| TW (1) | TWI576570B (ja) |
| WO (1) | WO2013192510A1 (ja) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103776548A (zh) * | 2014-02-14 | 2014-05-07 | 丹纳赫（上海）工业仪器技术研发有限公司 | 红外测温仪以及用于测量能量区域的温度的方法 |
| JP6274578B2 (ja) * | 2015-01-09 | 2018-02-07 | 信越半導体株式会社 | エピタキシャルウェーハの製造方法 |
| JP6574344B2 (ja) * | 2015-06-23 | 2019-09-11 | 株式会社Ｓｃｒｅｅｎホールディングス | 熱処理装置および熱処理方法 |
| EP3287190B1 (de) * | 2016-08-26 | 2020-07-01 | Aquila Biolabs GmbH | Verfahren zum überwachen eines zielprozessparameters |
| JP6824080B2 (ja) | 2017-03-17 | 2021-02-03 | 株式会社Ｓｃｒｅｅｎホールディングス | 熱処理装置および放射温度計の測定位置調整方法 |
| CN108254912B (zh) * | 2018-01-23 | 2020-03-27 | 电子科技大学 | 一种用于氮化物mocvd外延生长模式的实时显微监测系统 |
| BR112020026163A2 (pt) * | 2018-06-22 | 2021-03-23 | Avava, Inc. | detecção de realimentação para um dispositivo de tratamento |
| CN110006533A (zh) * | 2019-04-11 | 2019-07-12 | 中国航发湖南动力机械研究所 | 用于抑制辐射源尺寸效应的器件及辐射测温计 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57200827A (en) * | 1981-06-04 | 1982-12-09 | Kansai Coke & Chem Co Ltd | Temperature measuring method of combustion chamber in coke oven |
| JPH07104210B2 (ja) * | 1987-03-27 | 1995-11-13 | ミノルタ株式会社 | 放射温度計 |
| US5209570A (en) * | 1989-05-30 | 1993-05-11 | Deutsche Forschungsanstalt Fur Luft- Und Raumfahrt E.V. | Device for measuring the radiation temperature of a melt in vacuum |
| US6411377B1 (en) * | 1991-04-02 | 2002-06-25 | Hitachi, Ltd. | Optical apparatus for defect and particle size inspection |
| JP4240754B2 (ja) * | 1999-05-11 | 2009-03-18 | コニカミノルタセンシング株式会社 | テレセントリック光学系 |
| US6614539B1 (en) * | 1999-05-11 | 2003-09-02 | Minolta Co., Ltd. | Telecentric optical system |
| US6680377B1 (en) * | 1999-05-14 | 2004-01-20 | Brandeis University | Nucleic acid-based detection |
| EP1183521B1 (en) * | 1999-05-14 | 2014-03-19 | Brandeis University | Aptamer-based detection |
| US6310347B1 (en) * | 1999-06-29 | 2001-10-30 | Goodrich Corporation | Spectrometer with planar reflective slit to minimize thermal background at focal plane |
| US7136159B2 (en) * | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Excimer laser inspection system |
| US6492625B1 (en) * | 2000-09-27 | 2002-12-10 | Emcore Corporation | Apparatus and method for controlling temperature uniformity of substrates |
| JP2002122480A (ja) * | 2000-10-12 | 2002-04-26 | Toshiba Corp | 温度測定方法および装置、並びにプラズマ処理装置 |
| KR100673663B1 (ko) * | 2001-05-23 | 2007-01-24 | 맷슨 써멀 프로덕츠 게엠베하 | 기판의 열 처리 방법 및 장치 |
| JP4873242B2 (ja) * | 2004-06-22 | 2012-02-08 | 株式会社ニコン | ベストフォーカス検出方法及び露光方法、並びに露光装置 |
| US7275861B2 (en) * | 2005-01-31 | 2007-10-02 | Veeco Instruments Inc. | Calibration wafer and method of calibrating in situ temperatures |
| US7946759B2 (en) * | 2007-02-16 | 2011-05-24 | Applied Materials, Inc. | Substrate temperature measurement by infrared transmission |
| EP2299250B1 (en) * | 2009-09-17 | 2014-04-23 | LayTec Aktiengesellschaft | Pyrometer adapted for detecting UV-radiation and use thereof |
| US9121760B2 (en) * | 2010-01-27 | 2015-09-01 | Ci Systems Ltd. | Room-temperature filtering for passive infrared imaging |
| JP5565458B2 (ja) * | 2010-03-31 | 2014-08-06 | コニカミノルタ株式会社 | 測定用光学系ならびにそれを用いた色彩輝度計および色彩計 |
-
2013
- 2013-06-20 TW TW102121844A patent/TWI576570B/zh active
- 2013-06-21 WO PCT/US2013/047024 patent/WO2013192510A1/en active Application Filing
- 2013-06-21 CN CN201380033049.0A patent/CN104520470B/zh active Active
- 2013-06-21 DE DE201311003131 patent/DE112013003131T5/de active Pending
- 2013-06-21 SG SG11201408492QA patent/SG11201408492QA/en unknown
- 2013-06-21 JP JP2015518605A patent/JP2015528106A/ja active Pending
- 2013-06-21 KR KR1020157001355A patent/KR101679995B1/ko active IP Right Grant
- 2013-06-21 CN CN201710251847.0A patent/CN107267964B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN107267964B (zh) | 2020-06-05 |
| CN104520470A (zh) | 2015-04-15 |
| KR101679995B1 (ko) | 2016-12-06 |
| JP2015528106A (ja) | 2015-09-24 |
| CN104520470B (zh) | 2017-05-17 |
| KR20150021119A (ko) | 2015-02-27 |
| SG11201408492QA (en) | 2015-01-29 |
| TW201403037A (zh) | 2014-01-16 |
| CN107267964A (zh) | 2017-10-20 |
| WO2013192510A1 (en) | 2013-12-27 |
| TWI576570B (zh) | 2017-04-01 |
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| R016 | Response to examination communication |