DE112012001192B4 - Vakuumpumpe, Vakuumauspumpvorrichtung und Verfahren, zum Betreiben einer Vakuumpumpe - Google Patents

Vakuumpumpe, Vakuumauspumpvorrichtung und Verfahren, zum Betreiben einer Vakuumpumpe Download PDF

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Publication number
DE112012001192B4
DE112012001192B4 DE112012001192.9T DE112012001192T DE112012001192B4 DE 112012001192 B4 DE112012001192 B4 DE 112012001192B4 DE 112012001192 T DE112012001192 T DE 112012001192T DE 112012001192 B4 DE112012001192 B4 DE 112012001192B4
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Germany
Prior art keywords
drive motor
threshold
pump
speed
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112012001192.9T
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German (de)
English (en)
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DE112012001192T5 (de
Inventor
Kazuya Miyata
Yuusaku Tanabe
Syuusuke Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Kiko Inc
Original Assignee
Ulvac Kiko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Kiko Inc filed Critical Ulvac Kiko Inc
Publication of DE112012001192T5 publication Critical patent/DE112012001192T5/de
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Publication of DE112012001192B4 publication Critical patent/DE112012001192B4/de
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0066—Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/03—Torque
    • F04C2270/035—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/05—Speed
    • F04C2270/051—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE112012001192.9T 2011-03-11 2012-03-02 Vakuumpumpe, Vakuumauspumpvorrichtung und Verfahren, zum Betreiben einer Vakuumpumpe Active DE112012001192B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-053902 2011-03-11
JP2011053902 2011-03-11
PCT/JP2012/001452 WO2012124277A1 (ja) 2011-03-11 2012-03-02 真空ポンプ、真空排気装置及び真空ポンプの運転方法

Publications (2)

Publication Number Publication Date
DE112012001192T5 DE112012001192T5 (de) 2013-12-19
DE112012001192B4 true DE112012001192B4 (de) 2016-12-15

Family

ID=46830370

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112012001192.9T Active DE112012001192B4 (de) 2011-03-11 2012-03-02 Vakuumpumpe, Vakuumauspumpvorrichtung und Verfahren, zum Betreiben einer Vakuumpumpe

Country Status (7)

Country Link
US (1) US20130343912A1 (zh)
JP (1) JP5684894B2 (zh)
KR (1) KR101548842B1 (zh)
CN (1) CN103502650B (zh)
DE (1) DE112012001192B4 (zh)
TW (1) TWI516677B (zh)
WO (1) WO2012124277A1 (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014102591A1 (de) * 2014-02-27 2015-08-27 Rausch & Pausch Gmbh Verfahren zum Fördern von Hydraulikfluid und elektrohydraulische Motor-Pumpen-Einheit dafür
CN107208641B (zh) * 2015-01-15 2019-05-31 阿特拉斯·科普柯空气动力股份有限公司 用于控制压缩机/真空泵速度的方法
FR3054005B1 (fr) * 2016-07-13 2018-08-24 Pfeiffer Vacuum Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe
JP6458225B2 (ja) * 2017-03-24 2019-01-30 大東工業株式会社 マグネットギアポンプおよびその製造方法
FR3076582B1 (fr) * 2018-01-09 2020-01-24 Pfeiffer Vacuum Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide
JP7430035B2 (ja) * 2019-05-09 2024-02-09 株式会社アルバック 真空排気装置及びその運転方法
EP4172012B1 (en) * 2020-06-24 2024-02-28 Pierburg Pump Technology GmbH Motor vehicle vacuum pump
CN113623215A (zh) * 2021-08-30 2021-11-09 艾德斯汽车电机无锡有限公司 一种用于氢循环泵的无接触式传动系统

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1226239B (de) * 1960-11-03 1966-10-06 Leybolds Nachfolger E Betriebsverfahren fuer ein Vakuum-pumpenaggregat
DE3444169A1 (de) * 1984-12-04 1986-06-12 Loewe Pumpenfabrik GmbH, 2120 Lüneburg Anordnung zur optimierung des betriebes von vakuumpumpenanlagen
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
JPH01244185A (ja) * 1988-03-24 1989-09-28 Ngk Insulators Ltd ルーツ形ポンプ用ヒステリシスマグネットカップリング
JPH0622577A (ja) * 1992-06-29 1994-01-28 Mitsubishi Electric Corp 電動機制御装置
JPH06185483A (ja) * 1991-12-02 1994-07-05 Shinku Kiko Kk ドライメカニカルブースタポンプ
US6149405A (en) * 1997-07-28 2000-11-21 Anest Iwata Corporation Double wrap dry scroll vacuum pump having a compressed gas cooling passage disposed in the scroll shaft
US20020001533A1 (en) * 2000-06-05 2002-01-03 Takeshi Nonaka Gas Compressor and air conditioning system
DE10200378A1 (de) * 2001-01-09 2002-09-26 Toyota Jidoshokki Kariya Kk Gerät und Verfahren zum Steuern eines elektrischen Verdichters
JP2003161288A (ja) * 2001-11-22 2003-06-06 Sankyo Seiki Mfg Co Ltd ポンプ装置
DE102009017887A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Grobpumpverfahren für eine Verdrängerpumpe
US20110176948A1 (en) * 2010-01-16 2011-07-21 Shaffer Robert W Semi-hermetic scroll compressors, vacuum pumps, and expanders

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5215501A (en) * 1988-03-24 1993-06-01 Ngk Insulators, Ltd. Hysteresis magnet coupling for roots type pumps
JP2752539B2 (ja) * 1991-09-21 1998-05-18 株式会社日立製作所 車両用電動機の制御装置
JP3773576B2 (ja) * 1996-02-08 2006-05-10 株式会社小松製作所 トランスファプレス
JP3432679B2 (ja) * 1996-06-03 2003-08-04 株式会社荏原製作所 容積式真空ポンプ
JP2000110735A (ja) * 1998-10-01 2000-04-18 Internatl Business Mach Corp <Ibm> ポンプ保護装置、ポンプ保護方法及びポンプ装置
DE10035989A1 (de) * 1999-07-23 2001-09-20 Terumo Corp Zentrifugal-Fluidpumpvorrichtung
GB0402330D0 (en) * 2004-02-03 2004-03-10 Boc Group Plc A pumping system
JP2006342688A (ja) * 2005-06-07 2006-12-21 Ebara Corp 真空排気システム
JP5016852B2 (ja) * 2006-06-09 2012-09-05 日立アプライアンス株式会社 永久磁石電動機，永久磁石同期電動機の回転子及びそれを用いた圧縮機
JP2009095913A (ja) * 2007-10-15 2009-05-07 Nisshin Seisakusho:Kk 工作機械の加工ツール保護装置およびホーニング盤
JP7099145B2 (ja) 2018-07-31 2022-07-12 株式会社リコー 画像形成装置

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1226239B (de) * 1960-11-03 1966-10-06 Leybolds Nachfolger E Betriebsverfahren fuer ein Vakuum-pumpenaggregat
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
DE3444169A1 (de) * 1984-12-04 1986-06-12 Loewe Pumpenfabrik GmbH, 2120 Lüneburg Anordnung zur optimierung des betriebes von vakuumpumpenanlagen
JPH01244185A (ja) * 1988-03-24 1989-09-28 Ngk Insulators Ltd ルーツ形ポンプ用ヒステリシスマグネットカップリング
JPH06185483A (ja) * 1991-12-02 1994-07-05 Shinku Kiko Kk ドライメカニカルブースタポンプ
JPH0622577A (ja) * 1992-06-29 1994-01-28 Mitsubishi Electric Corp 電動機制御装置
US6149405A (en) * 1997-07-28 2000-11-21 Anest Iwata Corporation Double wrap dry scroll vacuum pump having a compressed gas cooling passage disposed in the scroll shaft
US20020001533A1 (en) * 2000-06-05 2002-01-03 Takeshi Nonaka Gas Compressor and air conditioning system
DE10200378A1 (de) * 2001-01-09 2002-09-26 Toyota Jidoshokki Kariya Kk Gerät und Verfahren zum Steuern eines elektrischen Verdichters
JP2003161288A (ja) * 2001-11-22 2003-06-06 Sankyo Seiki Mfg Co Ltd ポンプ装置
DE102009017887A1 (de) * 2009-04-17 2010-10-21 Oerlikon Leybold Vacuum Gmbh Grobpumpverfahren für eine Verdrängerpumpe
US20110176948A1 (en) * 2010-01-16 2011-07-21 Shaffer Robert W Semi-hermetic scroll compressors, vacuum pumps, and expanders

Also Published As

Publication number Publication date
KR20130114732A (ko) 2013-10-17
TW201237272A (en) 2012-09-16
TWI516677B (zh) 2016-01-11
JP5684894B2 (ja) 2015-03-18
US20130343912A1 (en) 2013-12-26
CN103502650A (zh) 2014-01-08
CN103502650B (zh) 2016-04-27
DE112012001192T5 (de) 2013-12-19
JPWO2012124277A1 (ja) 2014-07-17
WO2012124277A1 (ja) 2012-09-20
KR101548842B1 (ko) 2015-08-31

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R018 Grant decision by examination section/examining division
R020 Patent grant now final