DE112008003261T5 - Mehrzoniges Drucksteuerungs- bzw. Regelungssystem - Google Patents

Mehrzoniges Drucksteuerungs- bzw. Regelungssystem Download PDF

Info

Publication number
DE112008003261T5
DE112008003261T5 DE200811003261 DE112008003261T DE112008003261T5 DE 112008003261 T5 DE112008003261 T5 DE 112008003261T5 DE 200811003261 DE200811003261 DE 200811003261 DE 112008003261 T DE112008003261 T DE 112008003261T DE 112008003261 T5 DE112008003261 T5 DE 112008003261T5
Authority
DE
Germany
Prior art keywords
distributor
zone
fluid
pressure
disposable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE200811003261
Other languages
German (de)
English (en)
Inventor
Hossein Winchester Zarrin
Gordon Arlington Hill
Anil Little Mavanur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE112008003261T5 publication Critical patent/DE112008003261T5/de
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • G05D16/206—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging pressures from a single pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Control Of Fluid Pressure (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE200811003261 2007-11-28 2008-11-26 Mehrzoniges Drucksteuerungs- bzw. Regelungssystem Ceased DE112008003261T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/946,388 US20090137192A1 (en) 2007-11-28 2007-11-28 Multi-zone pressure control system
US11/946,388 2007-11-28
PCT/US2008/084807 WO2009070649A1 (en) 2007-11-28 2008-11-26 Multi-zone pressure control system

Publications (1)

Publication Number Publication Date
DE112008003261T5 true DE112008003261T5 (de) 2010-09-16

Family

ID=40456198

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200811003261 Ceased DE112008003261T5 (de) 2007-11-28 2008-11-26 Mehrzoniges Drucksteuerungs- bzw. Regelungssystem

Country Status (6)

Country Link
US (1) US20090137192A1 (ja)
JP (1) JP2011505050A (ja)
KR (1) KR20100092027A (ja)
DE (1) DE112008003261T5 (ja)
GB (1) GB2467692A (ja)
WO (1) WO2009070649A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102416879B1 (ko) * 2020-10-31 2022-07-05 (주)에스디플렉스 순차적 공정 압력 측정 시스템

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5261704A (en) * 1992-06-03 1993-11-16 Mario Araujo Air manifold
DE29706400U1 (de) * 1997-04-11 1997-05-28 Roetelmann Gmbh & Co Vorrichtung zum Verteilen oder Mischen von fluiden Medien
US6263918B1 (en) * 1999-04-29 2001-07-24 The Regents Of The University Of California Multiple feed powder splitter
US6418960B1 (en) * 1999-10-06 2002-07-16 Applied Materials, Inc. Ultrasonic enhancement for solvent purge of a liquid delivery system
US6333272B1 (en) * 2000-10-06 2001-12-25 Lam Research Corporation Gas distribution apparatus for semiconductor processing
US6508694B2 (en) * 2001-01-16 2003-01-21 Speedfam-Ipec Corporation Multi-zone pressure control carrier
US6418954B1 (en) * 2001-04-17 2002-07-16 Mks Instruments, Inc. System and method for dividing flow
JP2002349797A (ja) * 2001-05-23 2002-12-04 Fujikin Inc 流体制御装置
US6834669B2 (en) * 2001-11-12 2004-12-28 Otto Herman Seyfarth Integrated pneumatic manifold
US9283521B2 (en) * 2002-06-14 2016-03-15 Parker-Hannifin Corporation Single-use manifold and sensors for automated, aseptic transfer of solutions in bioprocessing applications
US6907904B2 (en) * 2003-03-03 2005-06-21 Redwood Microsystems, Inc. Fluid delivery system and mounting panel therefor
US20040250859A1 (en) * 2003-06-12 2004-12-16 Poulin James M. Method for protecting a pneumatic control system from ingested contamination
US6986359B2 (en) * 2004-03-09 2006-01-17 Mks Instruments, Inc. System and method for controlling pressure in remote zones

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Vorschriften von 35 U. S. C. § 112, Absatz 6

Also Published As

Publication number Publication date
US20090137192A1 (en) 2009-05-28
KR20100092027A (ko) 2010-08-19
JP2011505050A (ja) 2011-02-17
GB201008935D0 (en) 2010-07-14
WO2009070649A1 (en) 2009-06-04
GB2467692A (en) 2010-08-11

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final

Effective date: 20130924