GB2467692A - Multi zone pressure control system - Google Patents
Multi zone pressure control system Download PDFInfo
- Publication number
- GB2467692A GB2467692A GB201008935A GB201008935A GB2467692A GB 2467692 A GB2467692 A GB 2467692A GB 201008935 A GB201008935 A GB 201008935A GB 201008935 A GB201008935 A GB 201008935A GB 2467692 A GB2467692 A GB 2467692A
- Authority
- GB
- United Kingdom
- Prior art keywords
- manifold
- zone
- fluid
- control system
- pressure control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
- G05D16/206—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means the plurality of throttling means being arranged for the control of a plurality of diverging pressures from a single pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
Abstract
A pressure control system that controls the pressure of a fluid in a plurality of zones includes a distribution manifold, at least one main manifold connected to the distribution manifold, and at least one disposable manifold connected to the distribution manifold and the main manifold. The disposable manifold is adapted to be replaced independent of the distribution manifold and the main manifold, and is connected to each zone and to at least one vacuum source. The distribution manifold distributes the fluid to the plurality of zones, so as to cause flow of the fluid into and out of a measurement chamber located within each zone. The main manifold includes, for each zone, a pressure sensor configured to measure pressure in the measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/946,388 US20090137192A1 (en) | 2007-11-28 | 2007-11-28 | Multi-zone pressure control system |
PCT/US2008/084807 WO2009070649A1 (en) | 2007-11-28 | 2008-11-26 | Multi-zone pressure control system |
Publications (2)
Publication Number | Publication Date |
---|---|
GB201008935D0 GB201008935D0 (en) | 2010-07-14 |
GB2467692A true GB2467692A (en) | 2010-08-11 |
Family
ID=40456198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB201008935A Withdrawn GB2467692A (en) | 2007-11-28 | 2008-11-26 | Multi zone pressure control system |
Country Status (6)
Country | Link |
---|---|
US (1) | US20090137192A1 (en) |
JP (1) | JP2011505050A (en) |
KR (1) | KR20100092027A (en) |
DE (1) | DE112008003261T5 (en) |
GB (1) | GB2467692A (en) |
WO (1) | WO2009070649A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102416879B1 (en) * | 2020-10-31 | 2022-07-05 | (주)에스디플렉스 | System for Sequential Process Pressure Measurement |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020094759A1 (en) * | 2001-01-16 | 2002-07-18 | Speedfam-Ipec Corporation | Multi-zone pressure control carrier |
US20040250859A1 (en) * | 2003-06-12 | 2004-12-16 | Poulin James M. | Method for protecting a pneumatic control system from ingested contamination |
US20050199287A1 (en) * | 2004-03-09 | 2005-09-15 | Ali Shajii | System and method for controlling pressure in remote zones |
WO2007067882A2 (en) * | 2005-12-05 | 2007-06-14 | Sencal Llc | Single-use manifold for automated, aseptic transfer of solutionspin bioprocessing applications comprising at least one conductivity sensor applications |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5261704A (en) * | 1992-06-03 | 1993-11-16 | Mario Araujo | Air manifold |
DE29706400U1 (en) * | 1997-04-11 | 1997-05-28 | Roetelmann Gmbh & Co | Device for distributing or mixing fluid media |
US6263918B1 (en) * | 1999-04-29 | 2001-07-24 | The Regents Of The University Of California | Multiple feed powder splitter |
US6418960B1 (en) * | 1999-10-06 | 2002-07-16 | Applied Materials, Inc. | Ultrasonic enhancement for solvent purge of a liquid delivery system |
US6333272B1 (en) * | 2000-10-06 | 2001-12-25 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
US6418954B1 (en) * | 2001-04-17 | 2002-07-16 | Mks Instruments, Inc. | System and method for dividing flow |
JP2002349797A (en) * | 2001-05-23 | 2002-12-04 | Fujikin Inc | Fluid control device |
US6834669B2 (en) * | 2001-11-12 | 2004-12-28 | Otto Herman Seyfarth | Integrated pneumatic manifold |
US6907904B2 (en) * | 2003-03-03 | 2005-06-21 | Redwood Microsystems, Inc. | Fluid delivery system and mounting panel therefor |
-
2007
- 2007-11-28 US US11/946,388 patent/US20090137192A1/en not_active Abandoned
-
2008
- 2008-11-26 JP JP2010536155A patent/JP2011505050A/en active Pending
- 2008-11-26 WO PCT/US2008/084807 patent/WO2009070649A1/en active Application Filing
- 2008-11-26 GB GB201008935A patent/GB2467692A/en not_active Withdrawn
- 2008-11-26 DE DE200811003261 patent/DE112008003261T5/en not_active Ceased
- 2008-11-26 KR KR1020107013813A patent/KR20100092027A/en not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020094759A1 (en) * | 2001-01-16 | 2002-07-18 | Speedfam-Ipec Corporation | Multi-zone pressure control carrier |
US20040250859A1 (en) * | 2003-06-12 | 2004-12-16 | Poulin James M. | Method for protecting a pneumatic control system from ingested contamination |
US20050199287A1 (en) * | 2004-03-09 | 2005-09-15 | Ali Shajii | System and method for controlling pressure in remote zones |
WO2007067882A2 (en) * | 2005-12-05 | 2007-06-14 | Sencal Llc | Single-use manifold for automated, aseptic transfer of solutionspin bioprocessing applications comprising at least one conductivity sensor applications |
Also Published As
Publication number | Publication date |
---|---|
DE112008003261T5 (en) | 2010-09-16 |
JP2011505050A (en) | 2011-02-17 |
KR20100092027A (en) | 2010-08-19 |
GB201008935D0 (en) | 2010-07-14 |
WO2009070649A1 (en) | 2009-06-04 |
US20090137192A1 (en) | 2009-05-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |