DE108181C - - Google Patents
Info
- Publication number
- DE108181C DE108181C DENDAT108181D DE108181DA DE108181C DE 108181 C DE108181 C DE 108181C DE NDAT108181 D DENDAT108181 D DE NDAT108181D DE 108181D A DE108181D A DE 108181DA DE 108181 C DE108181 C DE 108181C
- Authority
- DE
- Germany
- Prior art keywords
- objective
- lens
- mirror
- rays
- concave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000006185 dispersion Substances 0.000 claims description 8
- 230000003287 optical Effects 0.000 claims description 5
- 239000005308 flint glass Substances 0.000 description 27
- 238000001228 spectrum Methods 0.000 description 14
- 239000005331 crown glasses (windows) Substances 0.000 description 11
- 239000011521 glass Substances 0.000 description 9
- 230000003292 diminished Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 241001212149 Cathetus Species 0.000 description 1
- 230000036536 Cave Effects 0.000 description 1
- 241001025261 Neoraja caerulea Species 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001627 detrimental Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing Effects 0.000 description 1
- 230000002349 favourable Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000717 retained Effects 0.000 description 1
- 230000002441 reversible Effects 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N silicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
- G02B17/0856—Catadioptric systems comprising a refractive element with a reflective surface, the reflection taking place inside the element, e.g. Mangin mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Astronomy & Astrophysics (AREA)
- Lenses (AREA)
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE108181C true DE108181C (fr) |
Family
ID=378175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DENDAT108181D Active DE108181C (fr) |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE108181C (fr) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2647232A1 (fr) * | 1989-05-19 | 1990-11-23 | Europ Agence Spatiale | Camera astronomique a haute resolution et a grand champ |
| WO2001004682A1 (fr) * | 1999-07-07 | 2001-01-18 | Kla-Tencor Corporation | Systeme imageur catadioptrique a ultraviolets a bande large |
| US6842298B1 (en) | 2000-09-12 | 2005-01-11 | Kla-Tencor Technologies Corporation | Broad band DUV, VUV long-working distance catadioptric imaging system |
| US7136234B2 (en) | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Broad band DUV, VUV long-working distance catadioptric imaging system |
| US7136159B2 (en) | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Excimer laser inspection system |
| US7180658B2 (en) | 2003-02-21 | 2007-02-20 | Kla-Tencor Technologies Corporation | High performance catadioptric imaging system |
| US7639419B2 (en) | 2003-02-21 | 2009-12-29 | Kla-Tencor Technologies, Inc. | Inspection system using small catadioptric objective |
| US7646533B2 (en) | 2003-02-21 | 2010-01-12 | Kla-Tencor Technologies Corporation | Small ultra-high NA catadioptric objective |
| US7672043B2 (en) | 2003-02-21 | 2010-03-02 | Kla-Tencor Technologies Corporation | Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth |
| US7884998B2 (en) | 2003-02-21 | 2011-02-08 | Kla - Tencor Corporation | Catadioptric microscope objective employing immersion liquid for use in broad band microscopy |
| US8665536B2 (en) | 2007-06-19 | 2014-03-04 | Kla-Tencor Corporation | External beam delivery system for laser dark-field illumination in a catadioptric optical system |
-
0
- DE DENDAT108181D patent/DE108181C/de active Active
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2647232A1 (fr) * | 1989-05-19 | 1990-11-23 | Europ Agence Spatiale | Camera astronomique a haute resolution et a grand champ |
| US6512631B2 (en) | 1996-07-22 | 2003-01-28 | Kla-Tencor Corporation | Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system |
| WO2001004682A1 (fr) * | 1999-07-07 | 2001-01-18 | Kla-Tencor Corporation | Systeme imageur catadioptrique a ultraviolets a bande large |
| US7728968B2 (en) | 2000-09-12 | 2010-06-01 | Kla-Tencor Technologies Corporation | Excimer laser inspection system |
| US6842298B1 (en) | 2000-09-12 | 2005-01-11 | Kla-Tencor Technologies Corporation | Broad band DUV, VUV long-working distance catadioptric imaging system |
| US7136234B2 (en) | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Broad band DUV, VUV long-working distance catadioptric imaging system |
| US7136159B2 (en) | 2000-09-12 | 2006-11-14 | Kla-Tencor Technologies Corporation | Excimer laser inspection system |
| US7180658B2 (en) | 2003-02-21 | 2007-02-20 | Kla-Tencor Technologies Corporation | High performance catadioptric imaging system |
| US7646533B2 (en) | 2003-02-21 | 2010-01-12 | Kla-Tencor Technologies Corporation | Small ultra-high NA catadioptric objective |
| US7672043B2 (en) | 2003-02-21 | 2010-03-02 | Kla-Tencor Technologies Corporation | Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth |
| US7679842B2 (en) | 2003-02-21 | 2010-03-16 | Kla-Tencor Technologies Corporation | High performance catadioptric imaging system |
| US7639419B2 (en) | 2003-02-21 | 2009-12-29 | Kla-Tencor Technologies, Inc. | Inspection system using small catadioptric objective |
| US7884998B2 (en) | 2003-02-21 | 2011-02-08 | Kla - Tencor Corporation | Catadioptric microscope objective employing immersion liquid for use in broad band microscopy |
| US8665536B2 (en) | 2007-06-19 | 2014-03-04 | Kla-Tencor Corporation | External beam delivery system for laser dark-field illumination in a catadioptric optical system |
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