DE10360994A1 - Polymerer Flüssigmetallschalter - Google Patents
Polymerer Flüssigmetallschalter Download PDFInfo
- Publication number
- DE10360994A1 DE10360994A1 DE10360994A DE10360994A DE10360994A1 DE 10360994 A1 DE10360994 A1 DE 10360994A1 DE 10360994 A DE10360994 A DE 10360994A DE 10360994 A DE10360994 A DE 10360994A DE 10360994 A1 DE10360994 A1 DE 10360994A1
- Authority
- DE
- Germany
- Prior art keywords
- switch
- polymer
- liquid metal
- heater
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229920000642 polymer Polymers 0.000 title claims abstract description 87
- 229910001338 liquidmetal Inorganic materials 0.000 title claims abstract description 86
- 239000000758 substrate Substances 0.000 claims abstract description 67
- 229910000679 solder Inorganic materials 0.000 claims abstract description 44
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000005459 micromachining Methods 0.000 claims abstract description 6
- 238000000608 laser ablation Methods 0.000 claims abstract description 5
- 238000003384 imaging method Methods 0.000 claims abstract 2
- 239000010410 layer Substances 0.000 claims description 54
- 239000007788 liquid Substances 0.000 claims description 16
- 239000004642 Polyimide Substances 0.000 claims description 10
- 229920001721 polyimide Polymers 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000012790 adhesive layer Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000002861 polymer material Substances 0.000 claims 1
- 238000005476 soldering Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 17
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 241000199698 Limacodidae Species 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229920006259 thermoplastic polyimide Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H11/00—Apparatus or processes specially adapted for the manufacture of electric switches
- H01H11/02—Apparatus or processes specially adapted for the manufacture of electric switches for mercury switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H29/00—Switches having at least one liquid contact
- H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H29/00—Switches having at least one liquid contact
- H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Contacts (AREA)
- Micromachines (AREA)
- Push-Button Switches (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/413,094 US6743991B1 (en) | 2003-04-14 | 2003-04-14 | Polymeric liquid metal switch |
| US10/413094 | 2003-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10360994A1 true DE10360994A1 (de) | 2004-11-25 |
Family
ID=32298258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10360994A Withdrawn DE10360994A1 (de) | 2003-04-14 | 2003-12-23 | Polymerer Flüssigmetallschalter |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6743991B1 (enExample) |
| JP (1) | JP2004319476A (enExample) |
| DE (1) | DE10360994A1 (enExample) |
| GB (1) | GB2400735B (enExample) |
| TW (1) | TW200425197A (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004079288A (ja) * | 2002-08-13 | 2004-03-11 | Agilent Technol Inc | 液体金属を用いた電気接点開閉装置 |
| US6888977B2 (en) * | 2003-04-14 | 2005-05-03 | Agilent Technologies, Inc. | Polymeric liquid metal optical switch |
| US6798937B1 (en) * | 2003-04-14 | 2004-09-28 | Agilent Technologies, Inc. | Pressure actuated solid slug optical latching relay |
| US7189934B2 (en) * | 2003-11-13 | 2007-03-13 | Honeywell International Inc. | Self-healing liquid contact switch |
| US6822176B1 (en) * | 2004-04-16 | 2004-11-23 | Agilent Technologies, Inc. | Liquid metal switch and method of manufacture therefor |
| US7164090B2 (en) * | 2005-02-28 | 2007-01-16 | Agilent Technologies, Inc. | Liquid metal switch employing a single volume of liquid metal |
| US20060211233A1 (en) * | 2005-03-21 | 2006-09-21 | Skyworks Solutions, Inc. | Method for fabricating a wafer level package having through wafer vias for external package connectivity and related structure |
| US7576426B2 (en) * | 2005-04-01 | 2009-08-18 | Skyworks Solutions, Inc. | Wafer level package including a device wafer integrated with a passive component |
| US20060289607A1 (en) * | 2005-06-28 | 2006-12-28 | Buchwalter Stephen L | Composite solder transfer moldplate structure and method of making same |
| US7358452B2 (en) * | 2005-06-30 | 2008-04-15 | Agilent Technlolgies, Inc. | Architecture and method of fabrication for a liquid metal microswitch (LIMMS) |
| US7211754B2 (en) * | 2005-08-01 | 2007-05-01 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Fluid-based switch, and method of making same |
| US7358833B2 (en) * | 2006-03-14 | 2008-04-15 | Lucent Technologies Inc. | Method and apparatus for signal processing using electrowetting |
| US7449649B2 (en) * | 2006-05-23 | 2008-11-11 | Lucent Technologies Inc. | Liquid switch |
| US7635606B2 (en) * | 2006-08-02 | 2009-12-22 | Skyworks Solutions, Inc. | Wafer level package with cavities for active devices |
| US20080217708A1 (en) * | 2007-03-09 | 2008-09-11 | Skyworks Solutions, Inc. | Integrated passive cap in a system-in-package |
| US20090001576A1 (en) * | 2007-06-29 | 2009-01-01 | Surinder Tuli | Interconnect using liquid metal |
| EP2215655A4 (en) | 2007-11-30 | 2014-07-30 | Skyworks Solutions Inc | CAPACITATION AT WAFBERBENE USING FLIP-CHIP ATTACHMENT |
| US8900931B2 (en) | 2007-12-26 | 2014-12-02 | Skyworks Solutions, Inc. | In-situ cavity integrated circuit package |
| US7939945B2 (en) | 2008-04-30 | 2011-05-10 | Intel Corporation | Electrically conductive fluid interconnects for integrated circuit devices |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR0174871B1 (ko) | 1995-12-13 | 1999-02-01 | 양승택 | 랫칭형 열구동 마이크로 릴레이 소자 |
| US6323447B1 (en) | 1998-12-30 | 2001-11-27 | Agilent Technologies, Inc. | Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method |
| US6373356B1 (en) | 1999-05-21 | 2002-04-16 | Interscience, Inc. | Microelectromechanical liquid metal current carrying system, apparatus and method |
| US6512322B1 (en) | 2001-10-31 | 2003-01-28 | Agilent Technologies, Inc. | Longitudinal piezoelectric latching relay |
| US6515404B1 (en) | 2002-02-14 | 2003-02-04 | Agilent Technologies, Inc. | Bending piezoelectrically actuated liquid metal switch |
-
2003
- 2003-04-14 US US10/413,094 patent/US6743991B1/en not_active Expired - Fee Related
- 2003-10-28 TW TW092129941A patent/TW200425197A/zh unknown
- 2003-12-23 DE DE10360994A patent/DE10360994A1/de not_active Withdrawn
-
2004
- 2004-03-30 GB GB0407165A patent/GB2400735B/en not_active Expired - Fee Related
- 2004-04-06 JP JP2004112425A patent/JP2004319476A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB2400735A (en) | 2004-10-20 |
| US6743991B1 (en) | 2004-06-01 |
| GB2400735B (en) | 2006-05-24 |
| GB0407165D0 (en) | 2004-05-05 |
| JP2004319476A (ja) | 2004-11-11 |
| TW200425197A (en) | 2004-11-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8127 | New person/name/address of the applicant |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US |
|
| 8139 | Disposal/non-payment of the annual fee |