DE10360865B4 - Optischer Polymer-Flüssigmetall-Schalter - Google Patents

Optischer Polymer-Flüssigmetall-Schalter Download PDF

Info

Publication number
DE10360865B4
DE10360865B4 DE10360865A DE10360865A DE10360865B4 DE 10360865 B4 DE10360865 B4 DE 10360865B4 DE 10360865 A DE10360865 A DE 10360865A DE 10360865 A DE10360865 A DE 10360865A DE 10360865 B4 DE10360865 B4 DE 10360865B4
Authority
DE
Germany
Prior art keywords
liquid metal
switch
polymer
volume
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE10360865A
Other languages
German (de)
English (en)
Other versions
DE10360865A1 (de
Inventor
Marvin Glenn Woodland Park Wong
Leslie A. Portola Valley Field
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avago Technologies International Sales Pte Ltd
Original Assignee
Avago Technologies ECBU IP Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avago Technologies ECBU IP Singapore Pte Ltd filed Critical Avago Technologies ECBU IP Singapore Pte Ltd
Publication of DE10360865A1 publication Critical patent/DE10360865A1/de
Application granted granted Critical
Publication of DE10360865B4 publication Critical patent/DE10360865B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3538—Optical coupling means having switching means based on displacement or deformation of a liquid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3574—Mechanical force, e.g. pressure variations
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
DE10360865A 2003-04-14 2003-12-23 Optischer Polymer-Flüssigmetall-Schalter Expired - Fee Related DE10360865B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/412,859 US6888977B2 (en) 2003-04-14 2003-04-14 Polymeric liquid metal optical switch
US412859 2003-04-14

Publications (2)

Publication Number Publication Date
DE10360865A1 DE10360865A1 (de) 2004-11-18
DE10360865B4 true DE10360865B4 (de) 2010-04-01

Family

ID=32298248

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10360865A Expired - Fee Related DE10360865B4 (de) 2003-04-14 2003-12-23 Optischer Polymer-Flüssigmetall-Schalter

Country Status (5)

Country Link
US (1) US6888977B2 (enExample)
JP (1) JP2004318136A (enExample)
DE (1) DE10360865B4 (enExample)
GB (1) GB2400678A (enExample)
TW (1) TWI274921B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1332654B1 (en) * 2000-11-10 2005-01-12 Unitive Electronics, Inc. Methods of positioning components using liquid prime movers and related structures
US7708235B2 (en) * 2001-04-26 2010-05-04 Pipe Pier Mounting device
US7922130B2 (en) * 2001-04-26 2011-04-12 Pipe Pier Mounting device
US20160133486A1 (en) * 2014-11-07 2016-05-12 International Business Machines Corporation Double Layer Release Temporary Bond and Debond Processes and Systems

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4582391A (en) * 1982-03-30 1986-04-15 Socapex Optical switch, and a matrix of such switches
US6356679B1 (en) * 2000-03-30 2002-03-12 K2 Optronics, Inc. Optical routing element for use in fiber optic systems
US6360775B1 (en) * 1998-12-23 2002-03-26 Agilent Technologies, Inc. Capillary fluid switch with asymmetric bubble chamber
US6470106B2 (en) * 2001-01-05 2002-10-22 Hewlett-Packard Company Thermally induced pressure pulse operated bi-stable optical switch
US6487333B2 (en) * 1999-12-22 2002-11-26 Agilent Technologies, Inc. Total internal reflection optical switch
US20030012483A1 (en) * 2001-02-28 2003-01-16 Ticknor Anthony J. Microfluidic control for waveguide optical switches, variable attenuators, and other optical devices
US6512322B1 (en) * 2001-10-31 2003-01-28 Agilent Technologies, Inc. Longitudinal piezoelectric latching relay
US6515404B1 (en) * 2002-02-14 2003-02-04 Agilent Technologies, Inc. Bending piezoelectrically actuated liquid metal switch

Family Cites Families (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2312672A (en) * 1941-05-09 1943-03-02 Bell Telephone Labor Inc Switching device
US2564081A (en) * 1946-05-23 1951-08-14 Babson Bros Co Mercury switch
GB1143822A (enExample) * 1965-08-20
DE1614671B2 (de) * 1967-12-04 1971-09-30 Siemens AG, 1000 Berlin u. 8000 München Lageunabhaengiges quecksilberrelais
US3639165A (en) * 1968-06-20 1972-02-01 Gen Electric Resistor thin films formed by low-pressure deposition of molybdenum and tungsten
US3600537A (en) * 1969-04-15 1971-08-17 Mechanical Enterprises Inc Switch
US3657647A (en) * 1970-02-10 1972-04-18 Curtis Instr Variable bore mercury microcoulometer
US4103135A (en) * 1976-07-01 1978-07-25 International Business Machines Corporation Gas operated switches
FR2392485A1 (fr) * 1977-05-27 1978-12-22 Orega Circuits & Commutation Interrupteur a contacts mouilles, et a commande magnetique
SU714533A2 (ru) * 1977-09-06 1980-02-05 Московский Ордена Трудового Красного Знамени Инженерно-Физический Институт Переключающее устройство
FR2418539A1 (fr) 1978-02-24 1979-09-21 Orega Circuits & Commutation Commutateur a contact liquide
FR2458138A1 (fr) 1979-06-01 1980-12-26 Socapex Relais a contacts mouilles et circuit plan comportant un tel relais
US4419650A (en) * 1979-08-23 1983-12-06 Georgina Chrystall Hirtle Liquid contact relay incorporating gas-containing finely reticular solid motor element for moving conductive liquid
US4245886A (en) * 1979-09-10 1981-01-20 International Business Machines Corporation Fiber optics light switch
US4336570A (en) * 1980-05-09 1982-06-22 Gte Products Corporation Radiation switch for photoflash unit
DE8016981U1 (de) * 1980-06-26 1980-11-06 W. Guenther Gmbh, 8500 Nuernberg Quecksilber-Elektrodenschalter
DE3138968A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Optische steuervorrichtung zum steuern der in einem optischen wellenleiter gefuehrten strahlung, insbesondere optischer schalter
DE3206919A1 (de) * 1982-02-26 1983-09-15 Philips Patentverwaltung Gmbh, 2000 Hamburg Vorrichtung zum optischen trennen und verbinden von lichtleitern
US4475033A (en) * 1982-03-08 1984-10-02 Northern Telecom Limited Positioning device for optical system element
US4628161A (en) * 1985-05-15 1986-12-09 Thackrey James D Distorted-pool mercury switch
GB8513542D0 (en) * 1985-05-29 1985-07-03 Gen Electric Co Plc Fibre optic coupler
US4652710A (en) * 1986-04-09 1987-03-24 The United States Of America As Represented By The United States Department Of Energy Mercury switch with non-wettable electrodes
US4742263A (en) * 1986-08-15 1988-05-03 Pacific Bell Piezoelectric switch
US4804932A (en) * 1986-08-22 1989-02-14 Nec Corporation Mercury wetted contact switch
US4797519A (en) * 1987-04-17 1989-01-10 Elenbaas George H Mercury tilt switch and method of manufacture
JPS63276838A (ja) 1987-05-06 1988-11-15 Nec Corp 導電液体接点リレ−
JPH01294317A (ja) 1988-05-20 1989-11-28 Nec Corp 導電液体接点スイッチ
US5278012A (en) * 1989-03-29 1994-01-11 Hitachi, Ltd. Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate
US4988157A (en) * 1990-03-08 1991-01-29 Bell Communications Research, Inc. Optical switch using bubbles
FR2667396A1 (fr) 1990-09-27 1992-04-03 Inst Nat Sante Rech Med Capteur pour mesure de pression en milieu liquide.
US5415026A (en) * 1992-02-27 1995-05-16 Ford; David Vibration warning device including mercury wetted reed gauge switches
EP0593836B1 (en) 1992-10-22 1997-07-16 International Business Machines Corporation Near-field photon tunnelling devices
US5886407A (en) * 1993-04-14 1999-03-23 Frank J. Polese Heat-dissipating package for microcircuit devices
US5972737A (en) * 1993-04-14 1999-10-26 Frank J. Polese Heat-dissipating package for microcircuit devices and process for manufacture
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
JP2682392B2 (ja) * 1993-09-01 1997-11-26 日本電気株式会社 薄膜キャパシタおよびその製造方法
GB9403122D0 (en) * 1994-02-18 1994-04-06 Univ Southampton Acousto-optic device
JPH08125487A (ja) 1994-06-21 1996-05-17 Kinseki Ltd 圧電振動子
FI110727B (fi) * 1994-06-23 2003-03-14 Vaisala Oyj Sähköisesti moduloitava terminen säteilylähde
JP3182301B2 (ja) * 1994-11-07 2001-07-03 キヤノン株式会社 マイクロ構造体及びその形成法
US5675310A (en) * 1994-12-05 1997-10-07 General Electric Company Thin film resistors on organic surfaces
US5502781A (en) * 1995-01-25 1996-03-26 At&T Corp. Integrated optical devices utilizing magnetostrictively, electrostrictively or photostrictively induced stress
WO1996030916A2 (en) * 1995-03-27 1996-10-03 Philips Electronics N.V. Method of manufacturing an electronic multilayer component
DE69603664T2 (de) * 1995-05-30 2000-03-16 Motorola, Inc. Hybrid-Multichip-Modul und Verfahren zur seiner Herstellung
US5751074A (en) * 1995-09-08 1998-05-12 Edward B. Prior & Associates Non-metallic liquid tilt switch and circuitry
US5732168A (en) * 1995-10-31 1998-03-24 Hewlett Packard Company Thermal optical switches for light
KR0174871B1 (ko) 1995-12-13 1999-02-01 양승택 랫칭형 열구동 마이크로 릴레이 소자
US6023408A (en) * 1996-04-09 2000-02-08 The Board Of Trustees Of The University Of Arkansas Floating plate capacitor with extremely wide band low impedance
JP2817717B2 (ja) * 1996-07-25 1998-10-30 日本電気株式会社 半導体装置およびその製造方法
US5874770A (en) * 1996-10-10 1999-02-23 General Electric Company Flexible interconnect film including resistor and capacitor layers
US5841686A (en) * 1996-11-22 1998-11-24 Ma Laboratories, Inc. Dual-bank memory module with shared capacitors and R-C elements integrated into the module substrate
GB2321114B (en) * 1997-01-10 2001-02-21 Lasor Ltd An optical modulator
US6180873B1 (en) * 1997-10-02 2001-01-30 Polaron Engineering Limited Current conducting devices employing mesoscopically conductive liquids
TW405129B (en) * 1997-12-19 2000-09-11 Koninkl Philips Electronics Nv Thin-film component
US6021048A (en) * 1998-02-17 2000-02-01 Smith; Gary W. High speed memory module
US6351579B1 (en) * 1998-02-27 2002-02-26 The Regents Of The University Of California Optical fiber switch
AU3409699A (en) 1998-03-09 1999-09-27 Bartels Mikrotechnik Gmbh Optical switch and modular switch system consisting of optical switching elements
US6207234B1 (en) * 1998-06-24 2001-03-27 Vishay Vitramon Incorporated Via formation for multilayer inductive devices and other devices
US6212308B1 (en) * 1998-08-03 2001-04-03 Agilent Technologies Inc. Thermal optical switches for light
US5912606A (en) * 1998-08-18 1999-06-15 Northrop Grumman Corporation Mercury wetted switch
US6323447B1 (en) * 1998-12-30 2001-11-27 Agilent Technologies, Inc. Electrical contact breaker switch, integrated electrical contact breaker switch, and electrical contact switching method
EP1050773A1 (en) * 1999-05-04 2000-11-08 Corning Incorporated Piezoelectric optical switch device
US6373356B1 (en) * 1999-05-21 2002-04-16 Interscience, Inc. Microelectromechanical liquid metal current carrying system, apparatus and method
US6396012B1 (en) * 1999-06-14 2002-05-28 Rodger E. Bloomfield Attitude sensing electrical switch
US6304450B1 (en) * 1999-07-15 2001-10-16 Incep Technologies, Inc. Inter-circuit encapsulated packaging
US6320994B1 (en) * 1999-12-22 2001-11-20 Agilent Technolgies, Inc. Total internal reflection optical switch
CA2399096C (en) * 2000-02-02 2011-10-11 Raytheon Company Microelectromechanical micro-relay with liquid metal contacts
US6446317B1 (en) * 2000-03-31 2002-09-10 Intel Corporation Hybrid capacitor and method of fabrication therefor
NL1015131C1 (nl) * 2000-04-16 2001-10-19 Tmp Total Micro Products B V Inrichting en werkwijze voor het schakelen van elektromagnetische signalen of bundels.
JP2002207181A (ja) * 2001-01-09 2002-07-26 Minolta Co Ltd 光スイッチ
US6490384B2 (en) * 2001-04-04 2002-12-03 Yoon-Joong Yong Light modulating system using deformable mirror arrays
JP4420581B2 (ja) * 2001-05-09 2010-02-24 三菱電機株式会社 光スイッチおよび光導波路装置
US20030035611A1 (en) * 2001-08-15 2003-02-20 Youchun Shi Piezoelectric-optic switch and method of fabrication
US7078849B2 (en) * 2001-10-31 2006-07-18 Agilent Technologies, Inc. Longitudinal piezoelectric optical latching relay
US6674934B2 (en) * 2001-11-06 2004-01-06 Agilent Technologies, Inc. Pressure-actuated bi-stable optical switching
US6633213B1 (en) * 2002-04-24 2003-10-14 Agilent Technologies, Inc. Double sided liquid metal micro switch
US6559420B1 (en) * 2002-07-10 2003-05-06 Agilent Technologies, Inc. Micro-switch heater with varying gas sub-channel cross-section
US6743991B1 (en) * 2003-04-14 2004-06-01 Agilent Technologies, Inc. Polymeric liquid metal switch
US6730866B1 (en) * 2003-04-14 2004-05-04 Agilent Technologies, Inc. High-frequency, liquid metal, latching relay array

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4582391A (en) * 1982-03-30 1986-04-15 Socapex Optical switch, and a matrix of such switches
US6360775B1 (en) * 1998-12-23 2002-03-26 Agilent Technologies, Inc. Capillary fluid switch with asymmetric bubble chamber
US6487333B2 (en) * 1999-12-22 2002-11-26 Agilent Technologies, Inc. Total internal reflection optical switch
US6356679B1 (en) * 2000-03-30 2002-03-12 K2 Optronics, Inc. Optical routing element for use in fiber optic systems
US6470106B2 (en) * 2001-01-05 2002-10-22 Hewlett-Packard Company Thermally induced pressure pulse operated bi-stable optical switch
US20030012483A1 (en) * 2001-02-28 2003-01-16 Ticknor Anthony J. Microfluidic control for waveguide optical switches, variable attenuators, and other optical devices
US6512322B1 (en) * 2001-10-31 2003-01-28 Agilent Technologies, Inc. Longitudinal piezoelectric latching relay
US6515404B1 (en) * 2002-02-14 2003-02-04 Agilent Technologies, Inc. Bending piezoelectrically actuated liquid metal switch

Also Published As

Publication number Publication date
TWI274921B (en) 2007-03-01
JP2004318136A (ja) 2004-11-11
GB2400678A (en) 2004-10-20
DE10360865A1 (de) 2004-11-18
GB0407168D0 (en) 2004-05-05
TW200420927A (en) 2004-10-16
US6888977B2 (en) 2005-05-03
US20040202404A1 (en) 2004-10-14

Similar Documents

Publication Publication Date Title
DE10360994A1 (de) Polymerer Flüssigmetallschalter
US6587626B2 (en) Liquid overclad-encapsulated optical device
DE69804933T2 (de) Herstellung von optischen Schaltern mit innerer Totalreflektion mit flüssigkeitsgefüllten vertikalen Löchern
DE19915019B4 (de) Verfahren zum Herstellen einer Schmelzdichtung für eine LCD-Einrichtung
WO2003019617A2 (de) Verfahren zur herstellung von elektronischen bauelementen
WO1994008263A1 (de) Verfahren zum herstellen eines deckels für eine integriert optische schaltung, deckel für eine integriert optische schaltung und mit diesem deckel hergestellte integriert optische schaltung
WO2009003542A2 (de) Verfahren zur herstellung von leiterbahnbrücken und bauteil mit leitfähiger schicht
DE10149140A1 (de) Verfahren zur Verbindung einer Siliziumplatte mit einer weiteren Platte
DE4212208A1 (de) Verfahren zur Herstellung optischer Polymerbauelemente mit integrierter Faser-Chip-Kopplung in Abformtechnik
DE60213693T2 (de) Verriegelbarer Schalter
US20030173781A1 (en) Adaptor for receiving a fluidic device
DE4200397C1 (enExample)
DE10360865A1 (de) Optischer Polymer-Flüssigmetall-Schalter
DE10359506A1 (de) Hochfrequenz-Flüssigmetall-Verriegelungsrelaisarray
DE10356678B4 (de) Optisches Relais
DE10359689B4 (de) Biegemodus-Flüssigmetallschalter
DE10359279A1 (de) Verfahren und Struktur für einen piezoelektrisch betätigten Drückermodus-Flüssigmetallschalter
DE10359500A1 (de) Schermodus-Flüssigmetallschalter
DE10356803A1 (de) Flüssigmetall-Verriegelungsrelais mit Flächenkontakt
DE10324595B4 (de) Verhindern eines hydrodynamischen Übersprechens in einem optischen Schalter
DE10360914A1 (de) Verriegelungsrelais mit Schalterschiene
WO2018082802A1 (de) Elektrofluidische vorrichtung sowie zugehöriges herstellungs- und betriebsverfahren
US6804424B2 (en) Optical device, in particular optical switching device with improved stability of the bubbles and reduced insertion losses
DE10356802A1 (de) Flüssigmetallverriegelungsrelaisarray vom Einfügungstyp
DE3324674A1 (de) Verfahren zur herstellung eines integrierten elektrooptischen bauelementes

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: AVAGO TECHNOLOGIES ECBU IP (SINGAPORE) PTE. LTD.,

8128 New person/name/address of the agent

Representative=s name: DILG HAEUSLER SCHINDELMANN PATENTANWALTSGESELLSCHA

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee