DE102022124035A1 - Fotoelektrisches Umwandlungsgerät - Google Patents

Fotoelektrisches Umwandlungsgerät Download PDF

Info

Publication number
DE102022124035A1
DE102022124035A1 DE102022124035.5A DE102022124035A DE102022124035A1 DE 102022124035 A1 DE102022124035 A1 DE 102022124035A1 DE 102022124035 A DE102022124035 A DE 102022124035A DE 102022124035 A1 DE102022124035 A1 DE 102022124035A1
Authority
DE
Germany
Prior art keywords
semiconductor region
photoelectric conversion
conversion device
wiring portion
plan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102022124035.5A
Other languages
German (de)
English (en)
Inventor
Kazuhiro Morimoto
Junji Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE102022124035A1 publication Critical patent/DE102022124035A1/de
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/225—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier working in avalanche mode, e.g. avalanche photodiodes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/772—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters
    • H04N25/773—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising A/D, V/T, V/F, I/T or I/F converters comprising photon counting circuits, e.g. single photon detection [SPD] or single photon avalanche diodes [SPAD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/199—Back-illuminated image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/809—Constructional details of image sensors of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/206—Electrodes for devices having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/70—Surface textures, e.g. pyramid structures
    • H10F77/703—Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/95—Circuit arrangements
    • H10F77/953—Circuit arrangements for devices having potential barriers
    • H10F77/959—Circuit arrangements for devices having potential barriers for devices working in avalanche mode

Landscapes

  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Light Receiving Elements (AREA)
DE102022124035.5A 2021-09-22 2022-09-20 Fotoelektrisches Umwandlungsgerät Pending DE102022124035A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021154432A JP7467401B2 (ja) 2021-09-22 2021-09-22 光電変換装置
JP2021-154432 2021-09-22

Publications (1)

Publication Number Publication Date
DE102022124035A1 true DE102022124035A1 (de) 2023-03-23

Family

ID=84817854

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102022124035.5A Pending DE102022124035A1 (de) 2021-09-22 2022-09-20 Fotoelektrisches Umwandlungsgerät

Country Status (7)

Country Link
US (1) US20230097091A1 (https=)
JP (2) JP7467401B2 (https=)
KR (1) KR102857373B1 (https=)
CN (1) CN115911068A (https=)
DE (1) DE102022124035A1 (https=)
GB (1) GB2613061B (https=)
TW (1) TWI901903B (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022083067A (ja) * 2020-11-24 2022-06-03 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子、および撮像装置、並びに電子機器
JP7467401B2 (ja) * 2021-09-22 2024-04-15 キヤノン株式会社 光電変換装置
JP7799488B2 (ja) * 2022-01-01 2026-01-15 キヤノン株式会社 光電変換装置、光電変換システム、および機器
CN117690986B (zh) * 2024-02-01 2024-05-03 云南大学 高温工作单光子探测器、单光子焦平面探测器及制备方法
US12324252B1 (en) * 2024-04-29 2025-06-03 Globalfoundries Singapore Pte. Ltd. Structures including a photodetector and multiple cathode contacts

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190181177A1 (en) 2017-08-04 2019-06-13 Sony Semiconductor Solutions Corporation Solid-state imaging device
US20200286946A1 (en) 2016-09-23 2020-09-10 Apple Inc. Back-Illuminated Single-Photon Avalanche Diode

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10777597B2 (en) * 2017-03-22 2020-09-15 Sony Semiconductor Solutions Corporation Imaging device
US10854658B2 (en) * 2018-07-16 2020-12-01 Taiwan Semiconductor Manufacturing Company, Ltd. Image sensor with sidewall protection and method of making same
JP7242234B2 (ja) * 2018-09-28 2023-03-20 キヤノン株式会社 光検出装置、光検出システム
JP2020149987A (ja) * 2019-03-11 2020-09-17 ソニーセミコンダクタソリューションズ株式会社 光検出器
CN113383431B (zh) * 2019-03-19 2025-01-17 索尼半导体解决方案公司 传感器芯片、电子设备和测距装置
JP2020161716A (ja) * 2019-03-27 2020-10-01 キヤノン株式会社 光電変換装置、光電変換システム、および移動体
CN117080233A (zh) * 2019-03-29 2023-11-17 索尼半导体解决方案公司 固态摄像装置和电子设备
JP7445397B2 (ja) * 2019-07-31 2024-03-07 ソニーセミコンダクタソリューションズ株式会社 受光素子および電子機器
TWI867078B (zh) * 2019-11-19 2024-12-21 日商索尼半導體解決方案公司 固態攝像裝置及電子機器
JP2022096830A (ja) * 2020-12-18 2022-06-30 ソニーセミコンダクタソリューションズ株式会社 光検出器および電子機器
JP2022113371A (ja) * 2021-01-25 2022-08-04 ソニーセミコンダクタソリューションズ株式会社 光検出装置
JP2023002152A (ja) * 2021-06-22 2023-01-10 キヤノン株式会社 光電変換装置、光電変換装置の製造方法
JP7467401B2 (ja) * 2021-09-22 2024-04-15 キヤノン株式会社 光電変換装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200286946A1 (en) 2016-09-23 2020-09-10 Apple Inc. Back-Illuminated Single-Photon Avalanche Diode
US20190181177A1 (en) 2017-08-04 2019-06-13 Sony Semiconductor Solutions Corporation Solid-state imaging device

Also Published As

Publication number Publication date
JP7467401B2 (ja) 2024-04-15
JP2023045838A (ja) 2023-04-03
US20230097091A1 (en) 2023-03-30
TWI901903B (zh) 2025-10-21
KR102857373B1 (ko) 2025-09-11
GB2613061A (en) 2023-05-24
CN115911068A (zh) 2023-04-04
GB202213740D0 (en) 2022-11-02
GB2613061B (en) 2026-04-29
TW202315105A (zh) 2023-04-01
KR20230042641A (ko) 2023-03-29
JP2024083450A (ja) 2024-06-21

Similar Documents

Publication Publication Date Title
JP7657885B2 (ja) 光検出装置および光検出システム
DE102022124035A1 (de) Fotoelektrisches Umwandlungsgerät
DE202019005770U1 (de) Pixelstruktur, Bildsensor, Bildaufnahmevorrichtung und Elektronikeinrichtung
US12324265B2 (en) Photoelectric conversion apparatus and photoelectric conversion system
DE112019004720T5 (de) Bildgebungsvorrichtung
US12585001B2 (en) Optical detection apparatus and optical detection system
DE112020006147T5 (de) Bildgebungselement, bildgebungselementansteuerungsverfahren und elektronische vorrichtung
DE112021000828T5 (de) Photoelektrische umwandlungsvorrichtung, photoelektrischesumwandlungssystem und bewegliches objekt
US12408446B2 (en) Photoelectric conversion device, photoelectric conversion system, and equipment
DE112022001686T5 (de) Bildgebungselement und bildgebungsvorrichtung
JP2025084928A (ja) 光電変換装置
JP7841069B2 (ja) 光電変換装置、光検出システム
JP2023178687A (ja) 光電変換装置、光電変換システム
US20240355863A1 (en) Photoelectric conversion apparatus, photoelectric conversion system, and moving body
DE102022124036A1 (de) Photoelektrische Umwandlungsvorrichtung, photoelektrisches Umwandlungssystem und beweglicher Körper
US20230215959A1 (en) Photoelectric conversion apparatus, photoelectric conversion system, and moving body
JP7817835B2 (ja) 光電変換装置および光電変換システム
US20260107074A1 (en) Photoelectric conversion apparatus and photoelectric conversion system
US20250287716A1 (en) Photoelectric conversion apparatus, photoelectric conversion system, moving body, and equipment
JP2024164697A (ja) 光電変換装置および機器
DE112022006809T5 (de) Optische detektionseinheit, elektronische vorrichtung und optisches detektionssystem

Legal Events

Date Code Title Description
R012 Request for examination validly filed
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: H01L0027140000

Ipc: H10F0019500000

R016 Response to examination communication