DE102018129960A1 - Schleusenvorrichtung, Schleusensystem und Verfahren zu einem Betrieb einer Schleusenvorrichtung - Google Patents

Schleusenvorrichtung, Schleusensystem und Verfahren zu einem Betrieb einer Schleusenvorrichtung Download PDF

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Publication number
DE102018129960A1
DE102018129960A1 DE102018129960.5A DE102018129960A DE102018129960A1 DE 102018129960 A1 DE102018129960 A1 DE 102018129960A1 DE 102018129960 A DE102018129960 A DE 102018129960A DE 102018129960 A1 DE102018129960 A1 DE 102018129960A1
Authority
DE
Germany
Prior art keywords
lock
opening
chamber
coupling
lock device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102018129960.5A
Other languages
German (de)
English (en)
Inventor
Arthur Buechel
Eligio Belleri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
VAT Holding AG
Original Assignee
VAT Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VAT Holding AG filed Critical VAT Holding AG
Priority to DE102018129960.5A priority Critical patent/DE102018129960A1/de
Priority to PCT/EP2019/082660 priority patent/WO2020109349A1/de
Priority to CN201980077877.1A priority patent/CN113167409B/zh
Priority to KR1020217019533A priority patent/KR20210094614A/ko
Priority to JP2021529813A priority patent/JP7445655B2/ja
Publication of DE102018129960A1 publication Critical patent/DE102018129960A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/316—Guiding of the slide

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Packages (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
DE102018129960.5A 2018-11-27 2018-11-27 Schleusenvorrichtung, Schleusensystem und Verfahren zu einem Betrieb einer Schleusenvorrichtung Withdrawn DE102018129960A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102018129960.5A DE102018129960A1 (de) 2018-11-27 2018-11-27 Schleusenvorrichtung, Schleusensystem und Verfahren zu einem Betrieb einer Schleusenvorrichtung
PCT/EP2019/082660 WO2020109349A1 (de) 2018-11-27 2019-11-27 Schleusenvorrichtung, schleusensystem und verfahren zu einem betrieb einer schleusenvorrichtung
CN201980077877.1A CN113167409B (zh) 2018-11-27 2019-11-27 锁定装置、锁定系统以及用于操作锁定装置的方法
KR1020217019533A KR20210094614A (ko) 2018-11-27 2019-11-27 로크 장치, 로크 시스템, 및 로크 장치의 조작 방법
JP2021529813A JP7445655B2 (ja) 2018-11-27 2019-11-27 ロック装置、ロックシステム、及びロック装置の作動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102018129960.5A DE102018129960A1 (de) 2018-11-27 2018-11-27 Schleusenvorrichtung, Schleusensystem und Verfahren zu einem Betrieb einer Schleusenvorrichtung

Publications (1)

Publication Number Publication Date
DE102018129960A1 true DE102018129960A1 (de) 2020-05-28

Family

ID=68731981

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102018129960.5A Withdrawn DE102018129960A1 (de) 2018-11-27 2018-11-27 Schleusenvorrichtung, Schleusensystem und Verfahren zu einem Betrieb einer Schleusenvorrichtung

Country Status (5)

Country Link
JP (1) JP7445655B2 (ja)
KR (1) KR20210094614A (ja)
CN (1) CN113167409B (ja)
DE (1) DE102018129960A1 (ja)
WO (1) WO2020109349A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021117955A1 (de) 2021-07-12 2023-01-12 Vat Holding Ag Ventil

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0932966A (ja) * 1995-07-18 1997-02-07 Japan Steel Works Ltd:The 真空ロード・アンロード方法および真空ゲートバルブならびに真空搬送容器
CH699258B1 (de) * 2006-07-11 2010-02-15 Vat Holding Ag Vakuumventil und Verschlussteller
US9086173B2 (en) 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve
EP2876341B1 (de) 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
EP3450809A1 (de) * 2017-08-31 2019-03-06 VAT Holding AG Verstellvorrichtung mit spannzangenkupplung für den vakuumbereich

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004027752A1 (de) * 2004-06-08 2006-01-05 Leybold Optics Gmbh Schleusenvorrichtung
DE102015016081A1 (de) * 2015-12-10 2017-06-14 Applied Materials, Inc. (N.D.Ges.D. Staates Delaware) Verschluss- oder Schleusenvorrichtung für eine Vakuumkammer
TWI751273B (zh) * 2017-02-15 2022-01-01 瑞士商Ｖａｔ控股股份有限公司 真空閥

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0932966A (ja) * 1995-07-18 1997-02-07 Japan Steel Works Ltd:The 真空ロード・アンロード方法および真空ゲートバルブならびに真空搬送容器
CH699258B1 (de) * 2006-07-11 2010-02-15 Vat Holding Ag Vakuumventil und Verschlussteller
US9086173B2 (en) 2012-07-19 2015-07-21 Vat Holding Ag Vacuum valve
EP2876341B1 (de) 2013-11-21 2015-10-21 VAT Holding AG Verfahren zum Betrieb eines Ventils
EP3450809A1 (de) * 2017-08-31 2019-03-06 VAT Holding AG Verstellvorrichtung mit spannzangenkupplung für den vakuumbereich

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021117955A1 (de) 2021-07-12 2023-01-12 Vat Holding Ag Ventil
WO2023285091A1 (de) * 2021-07-12 2023-01-19 Vat Holding Ag Ventil

Also Published As

Publication number Publication date
WO2020109349A1 (de) 2020-06-04
JP2022510636A (ja) 2022-01-27
CN113167409A (zh) 2021-07-23
JP7445655B2 (ja) 2024-03-07
KR20210094614A (ko) 2021-07-29
CN113167409B (zh) 2023-08-18

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Date Code Title Description
R163 Identified publications notified
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee