DE102018109217A1 - Vorrichtung zum Beschichten von Hohlkörpern mit mindestens einer Beschichtungsstation - Google Patents

Vorrichtung zum Beschichten von Hohlkörpern mit mindestens einer Beschichtungsstation Download PDF

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Publication number
DE102018109217A1
DE102018109217A1 DE102018109217.2A DE102018109217A DE102018109217A1 DE 102018109217 A1 DE102018109217 A1 DE 102018109217A1 DE 102018109217 A DE102018109217 A DE 102018109217A DE 102018109217 A1 DE102018109217 A1 DE 102018109217A1
Authority
DE
Germany
Prior art keywords
gas lance
housing
fluid
cleaning
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE102018109217.2A
Other languages
German (de)
English (en)
Inventor
Wilfried EHMER
Sebastian Kytzia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KHS GmbH
Original Assignee
KHS Corpoplast GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KHS Corpoplast GmbH filed Critical KHS Corpoplast GmbH
Priority to DE102018109217.2A priority Critical patent/DE102018109217A1/de
Priority to EP19717304.0A priority patent/EP3781722A1/fr
Priority to CN201980028789.2A priority patent/CN112041479A/zh
Priority to PCT/EP2019/059001 priority patent/WO2019201684A1/fr
Priority to JP2020556970A priority patent/JP2021521340A/ja
Publication of DE102018109217A1 publication Critical patent/DE102018109217A1/de
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4407—Cleaning of reactor or reactor parts by using wet or mechanical methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0071—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by heating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
    • B08B7/0092—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by cooling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
DE102018109217.2A 2018-04-18 2018-04-18 Vorrichtung zum Beschichten von Hohlkörpern mit mindestens einer Beschichtungsstation Pending DE102018109217A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102018109217.2A DE102018109217A1 (de) 2018-04-18 2018-04-18 Vorrichtung zum Beschichten von Hohlkörpern mit mindestens einer Beschichtungsstation
EP19717304.0A EP3781722A1 (fr) 2018-04-18 2019-04-10 Dispositif de revêtement de corps creux à l'aide d'au moins un poste de revêtement ainsi que procédé de nettoyage d'une lance à gaz
CN201980028789.2A CN112041479A (zh) 2018-04-18 2019-04-10 用于借助至少一个涂布站来涂布空心体的设备及用于清洁气体喷枪的方法
PCT/EP2019/059001 WO2019201684A1 (fr) 2018-04-18 2019-04-10 Dispositif de revêtement de corps creux à l'aide d'au moins un poste de revêtement ainsi que procédé de nettoyage d'une lance à gaz
JP2020556970A JP2021521340A (ja) 2018-04-18 2019-04-10 少なくとも１つのコーティングステーションを有する、中空品をコーティングするための装置、及びガスランスを洗浄するための方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102018109217.2A DE102018109217A1 (de) 2018-04-18 2018-04-18 Vorrichtung zum Beschichten von Hohlkörpern mit mindestens einer Beschichtungsstation

Publications (1)

Publication Number Publication Date
DE102018109217A1 true DE102018109217A1 (de) 2019-10-24

Family

ID=66165975

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102018109217.2A Pending DE102018109217A1 (de) 2018-04-18 2018-04-18 Vorrichtung zum Beschichten von Hohlkörpern mit mindestens einer Beschichtungsstation

Country Status (5)

Country Link
EP (1) EP3781722A1 (fr)
JP (1) JP2021521340A (fr)
CN (1) CN112041479A (fr)
DE (1) DE102018109217A1 (fr)
WO (1) WO2019201684A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112077079A (zh) * 2020-09-04 2020-12-15 深圳市汇泽激光科技有限公司 一种陶瓷表面镀层的清洗装置及方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020119167A1 (de) * 2020-07-21 2022-01-27 Krones Aktiengesellschaft Vorrichtung zum Beschichten von Behältnissen mit Wechseleinrichtung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997041270A1 (fr) * 1996-05-01 1997-11-06 Ltv Steel Company Lance a plusieurs usages
DE69527661T2 (de) * 1994-04-20 2003-02-20 Tokyo Electron Ltd Vorrichtung und Verfahren zur Substratbehandlung mittels Plasma
EP1507893A1 (fr) 2002-05-24 2005-02-23 SIG Technology Ltd. Procede et dispositif pour le traitement au plasma de pieces
DE102010023119A1 (de) 2010-06-07 2011-12-22 Khs Corpoplast Gmbh Vorrichtung zur Plasmabehandlung von Werkstücken

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29621800U1 (de) * 1996-12-18 1998-04-16 Iss Gradewald Ind Schiffs Serv Handgerät zur Reinigung von Oberflächen
JP2001132586A (ja) * 1999-11-11 2001-05-15 Komatsu Ltd 燃料噴射装置
JP2001335946A (ja) * 2000-05-24 2001-12-07 Mitsubishi Shoji Plast Kk Ｃｖｄ成膜装置及びｃｖｄ成膜方法
JP2002121667A (ja) * 2000-10-12 2002-04-26 Mitsubishi Shoji Plast Kk プラスチック容器内へのｄｌｃ膜連続成膜装置及び連続成膜方法
WO2002049925A1 (fr) * 2000-12-21 2002-06-27 Mitsubishi Shoji Plastics Corporation Appareil de fabrication de recipients de plastique revetus de dlc leur procede de fabrication associe et procede de nettoyage de l'electrode interieure
JP2003073832A (ja) * 2001-09-04 2003-03-12 Kamimaru Co Ltd 薄膜形成装置の治具類洗浄における堆積膜の除去方法
JP3958080B2 (ja) * 2002-03-18 2007-08-15 東京エレクトロン株式会社 プラズマ処理装置内の被洗浄部材の洗浄方法
JP3595334B2 (ja) * 2002-06-05 2004-12-02 三菱商事プラスチック株式会社 Ｃｖｄ成膜装置に使用する原料ガス導入管の清掃方法及びその装置
JP2004068124A (ja) * 2002-08-08 2004-03-04 Mitsubishi Heavy Ind Ltd ノズルクリーニング装置及びノズルクリーニング方法
KR20080013352A (ko) * 2006-08-08 2008-02-13 류동영 혼합기화기를 세정하기 위한 세정장치
CN102108504A (zh) * 2009-12-29 2011-06-29 北京北方微电子基地设备工艺研究中心有限责任公司 去除工艺过程中产生的薄膜污染物的方法及pecvd系统

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69527661T2 (de) * 1994-04-20 2003-02-20 Tokyo Electron Ltd Vorrichtung und Verfahren zur Substratbehandlung mittels Plasma
WO1997041270A1 (fr) * 1996-05-01 1997-11-06 Ltv Steel Company Lance a plusieurs usages
EP1507893A1 (fr) 2002-05-24 2005-02-23 SIG Technology Ltd. Procede et dispositif pour le traitement au plasma de pieces
DE102010023119A1 (de) 2010-06-07 2011-12-22 Khs Corpoplast Gmbh Vorrichtung zur Plasmabehandlung von Werkstücken

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112077079A (zh) * 2020-09-04 2020-12-15 深圳市汇泽激光科技有限公司 一种陶瓷表面镀层的清洗装置及方法

Also Published As

Publication number Publication date
CN112041479A (zh) 2020-12-04
JP2021521340A (ja) 2021-08-26
EP3781722A1 (fr) 2021-02-24
WO2019201684A1 (fr) 2019-10-24

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Legal Events

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R012 Request for examination validly filed
R082 Change of representative

Representative=s name: EISENFUEHR SPEISER PATENTANWAELTE RECHTSANWAEL, DE

R081 Change of applicant/patentee

Owner name: KHS GMBH, DE

Free format text: FORMER OWNER: KHS CORPOPLAST GMBH, 22145 HAMBURG, DE

R082 Change of representative

Representative=s name: EISENFUEHR SPEISER PATENTANWAELTE RECHTSANWAEL, DE

R082 Change of representative

Representative=s name: EISENFUEHR SPEISER PATENTANWAELTE RECHTSANWAEL, DE