DE102016112869A1 - Transport arrangement and processing arrangement and method for operating this - Google Patents

Abstract

According to various embodiments, a transport assembly (100, 300) may include a plurality of rotatably mounted coiled-sleeve couplings (112a, 112b, 112c, 112d) of which two corrugated-sleeve couplings are adapted for coupling winding cores between which a flexible substrate (102) is to be wrapped , and of which at least one additional winding tube coupling is arranged for coupling at least one additional winding tube, by means of which an intermediate layer (104) is to be received and / or held; at least one rotatably mounted guide roller (122) defining a curved transport path (111) along which the wrapping takes place; wherein the plurality of winding tube clutches (112a, 112b, 112c, 112d) are arranged substantially similar, so that the winding tubes are interchangeable with each other.

Description

The invention relates to a transport arrangement and a processing arrangement and a method for operating this.

In general, a substrate, for example a glass substrate, a metal substrate and / or a polymer substrate, may be treated (processed), e.g. be coated so that the chemical and / or physical properties of the substrate can be changed. For coating a substrate, various coating methods such as vapor deposition, e.g. a chemical vapor deposition (CVD) or a physical vapor deposition (PVD).

In general, flexible substrates in the form of a tape (e.g., metal tape, foil tape or glass ribbon) may be processed in a continuous line, e.g. coated (and / or otherwise treated) in a film coater. In this case, for example, a belt substrate can be transported through a coating area by means of a transport arrangement. For example, the transport assembly may be configured to process the tape substrate from roll-to-roll (also referred to as R2R) wherein the tape substrate is unwound from a first substrate roll, transported through the coating region, and after coating a second substrate roll is rewound (also referred to as wrapping). In this case, the coating system may have a vacuum chamber, so that the tape substrate can be coated in a vacuum. The substrate winding can for example be introduced into the vacuum chamber or be discharged therefrom, so that the vacuum chamber must be cyclically ventilated to replace the tape substrate.

For example, a vacuum deposition system can be used to deposit one or more layers on a tape substrate by means of chemical and / or physical vapor deposition. In order to realize a large-area deposition on correspondingly large-area tape substrates efficiently, the tape substrate can be wrapped by guide rollers through several coating areas, wherein during the transport of the substrate through the system in each coating region of the coating system, a coating process can be performed.

Conventionally, an R2R vacuum coating system (also referred to as a vacuum coater) is designed individually for the intended purpose. For this purpose, in a first step, a concept for the wrapping system is configured, which meets the requirements of the application purpose. For example, certain requirements for the maximum bending radius, the maximum height, the required space for large substrate windings or processual peculiarities can be made. Subsequently, a vacuum chamber is configured which accommodates the wrapping system and the components needed for coating, taking into account multiple feedthroughs in the vacuum chamber to operate the wrapping system and components. Subsequently, the interfaces for all additional resources, such as gas supply, pump access, sensors, etc., are arranged in the unoccupied open spaces. This configuration process leads to a compact R2R vacuum coating system whose wrapping system can not be easily changed or hardly changed. For example, the preconfigured Umwickelsystem determine the mounting position of the guide rollers and the substrate winding, so that the course of the transport path can be adjusted later hardly or not at all. If the system is nevertheless subsequently changed, it must frequently be accepted that the subsequent changes can often only be carried out with greater inaccuracy, which can result in the guide rollers no longer being exactly parallel to the axis so that the substrate guided over them drifts , curls or gets damaged in the worst case.

In addition, for each purpose different approaches come into consideration, as the corresponding wrapping of the substrate should be implemented constructively, so that even the Umwickelsysteme whose concept is geared to the same purpose, are rarely compatible. Therefore, it may be that newer systems can not be easily combined with existing systems.

According to various embodiments, it has been recognized that for a wide range of applications in question, the associated constructive variety of possible concepts for wrapping a substrate has synergistic similarities. These synergetic similarities can be exploited to find the configuration of the wrapping system for each individual use, which has the least constructive differences compared to the remaining uses. On the basis of the intersection of the configurations thus selected, it is finally possible to identify those structural features which would have to be variable in order to cover the possible purposes.

According to various embodiments, a transport arrangement, a Processing arrangement and a method for operating these provided, which unite the synergistic similarities and thus allow the greatest possible flexibility. Due to the high degree of flexibility, it is possible to avoid having to replace an already existing system or, if that is possible at all, require costly conversion in order to meet the requirements of a new application. For example, especially in pilot plants, laboratory machines, or other research and development facilities (also referred to as R & D facilities), it is difficult to predict which processes and coating materials could play a role in the future and / or which specifications could be required.

Clearly, according to various embodiments, it is possible to change the position of individual guide rollers, to exchange these for other guide roller types and / or to change their number. Thus, the configuration of a plant can be changed and adapted more easily, which saves costs and effort on the economic side, and on the process technology side, the spectrum for possible applications, processes and materials for which the plant can be used, extended. Further, the preconfigured mounting positions allow for high axis parallelism, which reduces the risk of substrate breakage, particularly with a sensitive substrate (e.g., a glass sheet).

According to various embodiments, there is provided a transport assembly, a processing assembly, and a method of operating the same, which are structurally designed to allow the plant operator (e.g., pilot plant) to implement variable web guides, thus increasing the feasible process variety. This also allows future, previously unknown applications to be realized in an existing plant.

According to various embodiments, a transport arrangement may comprise: a plurality of rotatably mounted winding tube couplings of which two winding tube couplings for coupling winding tubes, between which a flexible substrate is to be wrapped, are arranged, and of which at least one additional winding tube coupling for coupling at least one additional winding tube, by means of which an intermediate layer is to be accommodated and / or stored; at least one rotatably mounted guide roller defining a curved transport path along which wrapping takes place (also referred to as web travel); wherein the plurality of winding tube clutches are arranged substantially similar, so that the winding tubes are interchangeable with each other.

According to various embodiments, a transport arrangement may comprise: at least three rotatably mounted winding tube couplings for coupling two winding tubes, between which a flexible substrate is to be wrapped, and for coupling at least one additional winding tube, by means of which an intermediate layer is to be received and / or held; at least one rotatably mounted guide roller defining a curved transport path along which the wrapping takes place; wherein the three corrugated sleeve clutches are arranged substantially similar, so that the cores are interchangeable with each other.

According to various embodiments, the transport assembly may further include: a plurality (e.g., at least three) drives, each of which is coupled to exactly one winding sleeve coupling of the plurality of winding tube couplings; wherein the plurality of drives are arranged substantially similarly, so that they rotate synchronously (e.g., bi-directionally) the plurality of coiled-sleeve clutches with similar drive. Synchronous (e.g., tape-synchronous) may be understood, for example, as having the plurality of coiled-sleeve couplings undergo a similar motion, e.g. with the same direction of rotation (direction of rotation), in common mode, with simultaneous change of motion and / or with the same speed.

According to various embodiments, the transport assembly may further include: a controller for driving each of the plurality of drives according to a wrapping configuration, comprising: a take-up configuration for driving that wrap sleeve clutch by which the substrate is wound; and / or an unwinding configuration for driving that winding tube clutch by means of which the substrate is unwound; wherein the controller is configured to selectively control each drive of the plurality of drives according to the rewind configuration and / or the unwind configuration.

According to various embodiments, the controller may be configured to adjust a rotational speed of at least one of the coiled-tube clutches between which the substrate is rewound to a size representing a transport characteristic (e.g., a transportation progress).

According to various embodiments, the controller may be configured to adjust a rotational speed of the at least one guide roller to a size representing a transportation characteristic (e.g., a transportation progress).

According to various embodiments, each winding sleeve coupling of the plurality of winding sleeve couplings may comprise a tensioning device (eg comprising a sleeve tension mandrel, a mandrel, an expanding mandrel, a cone tensioning element, and / or a segment clamping mandrel) for clamping the respective winding sleeve.

According to various embodiments, the transport area may comprise at least one processing section in which the transport path is rectilinear or has a constant curvature along a length of more than one quarter of the circumference of the at least one guide roller.

According to various embodiments, the plurality of rotatably mounted corespug couplings may be configured in a first overwrapping configuration to rewind a substrate between a first cored sleeve clutch of the plurality of corrugated sleeve couplings and a second cored sleeve clutch of the plurality of corrugated sleeve couplings; in a second wrapping configuration, wrapping a substrate between a first winding sleeve clutch of the plurality of winding sleeve couplings and a third winding sleeve coupling of the plurality of winding sleeve couplings.

According to various embodiments, the plurality of rotatably mounted corespug clutches may be configured in a third overwrap configuration to rewind a substrate between the third corrugated sleeve clutch and the second corrugated sleeve clutch.

Optionally, the first wrap configuration, the second wrap configuration, and / or the third wrap configuration may include: unwrapping an intermediate layer with the substrate (ie, unwrapping a substrate roll), and / or wrapping an intermediate layer with the substrate (ie, wrapping in the substrate roll) ,

According to various embodiments, the transport assembly may further include: a guide roller support providing a first mounting position in which the at least one guide roller is mounted in the first wrapping configuration; and which provides a second mounting position in which the at least one guide roller is mounted in the second wrapping configuration.

According to various embodiments, a vacuum arrangement may include: a vacuum chamber; and a transport assembly according to one or more embodiments, wherein a plurality of winding tube clutches are arranged in the vacuum chamber.

According to various embodiments, the vacuum chamber may have a plurality of rotary feedthroughs, of which each rotary feedthrough is aligned with exactly one corrugated sleeve coupling of the plurality of corrugated sleeve clutches.

According to various embodiments, the vacuum chamber may have a chamber wall with a plurality of rotary feedthroughs, each of which rotary feedthrough is coupled to exactly one corrugated sleeve coupling of the plurality of corrugated sleeve couplings for transmitting a torque to the corrugated sleeve coupling by means of the rotary feedthrough from outside the vacuum chamber.

According to various embodiments, a method of operating a transport assembly including at least a first cored sleeve clutch, a second cored sleeve clutch, and a third corrugated sleeve clutch may include: processing a substrate in a first overwrapping configuration in which the substrate is wrapped between two cores which are rewound by means of the first winding sleeve clutch and the second winding sleeve clutch are mounted; and processing a substrate in a second wrapping configuration in which the substrate is wrapped between two cores which are supported by the third corrugated sleeve clutch and the first corrugated sleeve clutch.

According to various embodiments, the method may further include: reconfiguring the transport assembly between the first wrap configuration and the second wrap configuration.

According to various embodiments, a transport arrangement may comprise: a transport area; a plurality of rotatably mounted winding tube couplings for coupling each one winding tube (for example, a substrate winding tube); at least one rotatably mounted guide roller disposed in the transport area for guiding a flexible substrate along a curved transport path extending between the plurality of winding tube couplings; a guide roller carrier having within the transport area a plurality of attachment structures arranged in a predefined regular pattern and each attachment structure defining an assembly position; at least one bearing arrangement, by means of which the at least one guide roller is mounted; wherein the bearing assembly comprises a mounting base that is configured complementary to each mounting structure of the plurality of mounting structures so that the bearing assembly can be selectively secured in any of the mounting positions.

The mounting base does not necessarily have to be designed to be complementary to all attachment structures of the guide roller carrier. In other words, the guide roller carrier may optionally include a plurality of additional attachment structures (eg, arranged in a predefined regular additional pattern), each attachment structure of which differs from the plurality of attachment structures. For example, the guide roller carrier have a plurality of groups of attachment structures that differ from each other. For example, the guide roller carrier may have a plurality of columns and / or rows of attachment structures which differ from each other.

Alternatively or additionally, not all attachment structures of the plurality of attachment structures need to be configured identically. Illustratively, the plurality of attachment structures may be configured in a similar manner such that the one of the mounting sockets may be attached to each attachment structure of the plurality of attachment structures. For example, the transport arrangement may comprise at least one additional bearing arrangement, by means of which the at least one guide roller is mounted; wherein the additional bearing assembly has an additional mounting base that is configured complementary to each mounting structure of the plurality of additional fastening structures. For example, the plurality of additional attachment structures and the plurality of attachment structures may provide for a different allowable maximum load or a different grid.

A regular pattern can be understood as a spatially one-dimensional or spatially two-dimensional periodic repetition, for example a common property of all attachment structures. The periodic repetition may be generated by at least one of the following symmetry operations: rotation, point mirroring, sliding mirroring, translation, and / or plane mirroring. In other words, the pattern may have at least one of the following symmetries: rotational symmetry; Gleitspiegelsymmetrie; Translational symmetry; and / or plane mirror symmetry. The plurality of attachment structures may or may not be arranged in a common plane.

According to various embodiments, the corrugated sleeve clutches (also referred to as sleeve end bearings) may be arranged for rotatably supporting the cores.

According to various embodiments, the transport assembly may further comprise: a drive system for driving the plurality of coiled-tube clutches.

According to various embodiments, the plurality of winding tube couplings may each comprise a clamping device for clamping the respective substrate winding tube.

According to various embodiments, the transport region may have at least one section in which the transport path is rectilinear or has a constant curvature, the section having a length of more than one quarter of the circumference of the at least one guide roller.

In other words, the transport path can have at least one constantly curved or rectilinear section which has a length of more than one quarter of the circumference of the at least one guide roller.

According to various embodiments, the transport arrangement may further comprise: a processing roller, which is arranged in the processing section of the transport area and has a temperature control device.

According to various embodiments, at least some of the plurality of attachment structures may be disposed in the processing section of the transportation area.

According to various embodiments, the transport area may comprise at least one feed section and a discharge section, which are arranged between the processing section and the plurality of winding tube couplings; wherein the plurality of mounting structures are arranged in a plurality of groups, a first group of which is arranged in the feed section and a second group is arranged in the discharge section.

According to various embodiments, the attachment structure of the first group and the attachment structure of the second group may be arranged mirror-symmetrically with respect to a mirror plane extending between the plurality of bobbin clutches.

According to various embodiments, each attachment structure of the plurality of attachment structures may include a plurality of interlocking elements, wherein a scheme in which the plurality of interlocking elements of each attachment structure of the plurality of attachment structures are arranged is the same. For example, a distance between mutually adjacent positive-locking elements can be the same.

Each mounting structure of the guide roller carrier can be assigned to exactly one mounting position (ie, unique).

According to various embodiments, at least two attachment structures of the plurality of attachment structures may have at least one common positive engagement element. The interlocking elements of each attachment structure may serve to mount the guide roller in the mounting position associated with the attachment structure. At least some form-locking elements can serve for fastening in the guide roller in a plurality of mounting positions.

According to various embodiments, at least some of the plurality of interlocking elements of each attachment structure may be provided by means of a through opening in the carrier plate. In other words, at least some of the plurality of attachment structures may be provided by a plurality of through holes in the carrier plate.

According to various embodiments, the guide roller carrier may comprise at least one group of the plurality of attachment structures; wherein each attachment structure of the group is provided by means of a plurality of through holes in the guide roller carrier.

According to various embodiments, the guide roller carrier may comprise a carrier plate having the at least one group of the plurality of attachment structures (i.e., one or more groups). For example, each attachment structure of the group may be provided by means of a plurality of through openings in the carrier plate.

According to various embodiments, the plurality of attachment structures may include a plurality of attachment structure pairs, each attachment structure pair having two attachment structures opposing each other such that the bearing assembly is mountable therebetween.

The attachment structures of each attachment structure pair may be part of the same group of attachment structures.

The attachment structures of each attachment structure pair (also referred to as attachment structure and counter attachment structure) may be associated with the same mounting position.

According to various embodiments, the guide roller carrier may comprise a plurality of counter-attachment structures, each counter-attachment structure having a attachment structure of the plurality of attachment structures forming a fastener structure pair between which the bearing assembly is mountable.

According to various embodiments, the guide roller carrier may comprise two carrier plates, each carrier plate having a fastening structure of each attachment structure pair.

According to various embodiments, the guide roller carrier may comprise an additional carrier plate having at least one group of the plurality of counter-attachment structures; wherein each counter-attachment structure of the additional carrier plate is provided by means of a plurality of through-openings in the additional carrier plate.

According to various embodiments, the bearing assembly may include an alignment device configured to adjust an orientation of a rotational axis of the bearing assembly.

According to various embodiments, at least one winding tube coupling of the plurality of winding tube couplings may be arranged for rotatably supporting an intermediate layer winding tube.

According to various embodiments, a vacuum arrangement may include: a vacuum chamber; and a transport assembly according to one or more embodiments, the transport region of which is disposed in the vacuum chamber.

According to various embodiments, a method of operating a transport assembly may be arranged, comprising: a guide roller carrier having a plurality of attachment structures arranged in a predefined regular pattern and each attachment structure defining an assembly position; at least one bearing arrangement, by means of which the at least one guide roller is mounted. The method may include deflecting a substrate by means of the guide roller in a first wrapping configuration in which the bearing assembly is brought to a first mounting position, and deflecting a substrate by means of the guide roller in a second wrapping configuration in which the bearing assembly is different from the second mounting position first mounting position is brought.

According to various embodiments, the at least one guide roller may be at least one of the following guide roller types: a deflection roller; a spreader roller; a measuring roller; and / or a pull roll. At least the pull roll may be a driven (ie active) guide roll. Alternatively or additionally, the deflection roller; the spreader roller and / or the measuring roller is a non-driven (ie passive) guide roller.

According to various embodiments, the plurality of corrugated sleeve clutches may be arranged substantially similar, so that the cores are interchangeable with each other. Essentially the same may be understood to be identical or at least so similar that the differences between the plurality of cortex clutches are so small or few that the interchangeability of the cores remains intact. In other words, optional minor differences between the several winding tube clutches may exist, which, however, does not affect their functionality relative to the cores. For example, the cores can be arranged substantially similar.

For example, the corrugated tube clutches may have the same outer diameter or be adjustable to this. This may provide that a winding tube having the proper inner diameter will fit each winding tube coupling of the plurality of winding tube couplings, e.g. if several cores with uniform inner diameter are used.

If, however, winding cores are used which differ in their inner diameter, winding sleeve couplings with an adjustable outer diameter can be used, e.g. by the outer diameter is adjustable by means of a clamping device. Even if cores are used with a uniform inner diameter, winding sleeve couplings can be used with adjustable outer diameter, which clearly facilitates the insertion of the cores.

If the plurality of winding sleeve couplings have an adjustable outer diameter (for example adjustable by means of a tensioning device), the setting areas in which the outer diameter of each winding sleeve coupling of the several winding sleeve couplings is adjustable can overlap one another. In other words, each winding sleeve coupling of the plurality of winding sleeve couplings may have an adjustment range in which their outer diameter is adjustable, with the adjustment ranges of all the winding sleeve couplings of the plurality of winding sleeve couplings overlapping (i.e., their intersection is not zero). The inner diameter of each winding tube may be in the overlap of the adjustment ranges, so that they are interchangeable.

For example, the corrugated sleeve clutches can have at least similar clamping devices.

By analogy, the multiple drives can be set up so that they can mutually assume their functionality. For example, the multiple drives may have similar operating points, e.g. a same torque, a same drive power and / or a same speed, e.g. based on a supplied electric power and / or their frequency. Alternatively or additionally, the plurality of drives may match in their permitted electrical power.

According to various embodiments, a transport arrangement may comprise a wrapping area in which the winding up and / or unwinding of the substrate and / or the intermediate layer takes place and may furthermore have an adjacent transport area through which the substrate is transported. The plurality of corrugated sleeve clutches may be disposed in the wrapping area.

According to various embodiments, a processing arrangement may include: a vacuum assembly; a processing source for processing a substrate in a processing section of the vacuum assembly.

The spacing of adjacent coiled-tubing clutches of the plurality of coiled-tubing clutches may be in a range of about 1 meter to about 2 meters, according to various embodiments.

Embodiments of the invention are illustrated in the figures and are explained in more detail below.

Show it

1A a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

1B . 2A and 2 B in each case the transport arrangement 1A in different configurations;

3A a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

3B . 4A and 4B in each case the transport arrangement 3A in different configurations;

5A . 5B and 5C in each case a transport arrangement according to various embodiments in a schematic detail view;

6A and 6B in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

7A and 7B in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

8A and 8B each a vacuum arrangement according to various embodiments in a schematic side view or cross-sectional view;

9A and 9B each a vacuum arrangement according to various embodiments in a schematic side view or cross-sectional view;

10 a method according to various embodiments in a schematic flow diagram;

11A and 11B in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

12A and 12B in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

13A and 13B in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

14A and 14B in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

15A . 15B and 15C each a fastening structure according to various embodiments in a schematic side view or cross-sectional view;

16A . 16B and 16C each a fastening structure according to various embodiments in a schematic side view or cross-sectional view;

17A and 17B in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

18A a bearing assembly according to various embodiments in a schematic side view or cross-sectional view;

18B a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

19 a method according to various embodiments in a schematic flow diagram;

20 and 21 in each case a transport arrangement according to various embodiments in a schematic perspective view;

22A and 22B each a processing arrangement according to various embodiments in a schematic side view or cross-sectional view;

23 a processing arrangement according to various embodiments in a schematic side view or cross-sectional view;

24 a guide roller carrier according to various embodiments in a schematic side view or cross-sectional view;

25 and 26 in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

27 and 28 in each case a transport arrangement according to various embodiments in a schematic side view or cross-sectional view;

29A and 29B a transport arrangement according to various embodiments in each Umwickelkonfigurationen different from each other;

30A and 30B a transport arrangement according to various embodiments in each Umwickelkonfigurationen different from each other;

31A and 31B a transport arrangement according to various embodiments in each Umwickelkonfigurationen different from each other;

32A and 32B a transport arrangement according to various embodiments in each different Umwickelkonfigurationen; and

33A and 33B a transport arrangement according to various embodiments in each Umwickelkonfigurationen different.

In the following detailed description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology such as "top", "bottom", "front", "back", "front", "rear", etc. is used with reference to the orientation of the described figure (s). Because components of embodiments can be positioned in a number of different orientations, the directional terminology is illustrative and is in no way limiting. It should be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. It should be understood that the features of the various exemplary embodiments described herein may be combined with each other unless specifically stated otherwise. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.

In the context of this description, the terms "connected", "connected" and "coupled" are used to describe both a direct and an indirect connection (eg ohmic and / or electrically conductive, eg an electrically conductive connection), a direct or indirect connection and a direct or indirect coupling. In the figures, identical or similar elements are provided with identical reference numerals, as appropriate.

According to various embodiments, the term "coupled" or "coupling" may be used in the sense of (e.g., mechanical, hydrostatic, thermal and / or electrical), e.g. direct or indirect, connection and / or interaction. For example, multiple elements may be coupled together along an interaction chain. According to various embodiments, "coupled" may be understood in terms of mechanical (e.g., physical) coupling, e.g. by means of a direct physical contact. A clutch may be configured to transmit a mechanical interaction (e.g., force, torque, etc.).

In the context of vacuum generating or vacuum sustaining vacuum components (e.g., a pump, a chamber, a conduit, a valve, etc.), the term "coupled" or "coupling" may be understood to mean a connection to a common vacuum system. The components of the vacuum system may be configured to exchange a gas with one another by means of the coupling, wherein the coupling may be gas-separated from an exterior of the vacuum system.

According to various embodiments, a controller may include a forward control path, and thus illustratively implement a flow control that converts an input into an output. The control path can also be part of a control loop, so that a control is implemented. The control has, in contrast to the pure forward control on a continuous influence of the output variable on the input variable, which is effected by the control loop (feedback). In other words, as an alternative or in addition to the control, a regulation can be used or, alternatively or in addition to the control, a regulation can take place.

According to various embodiments, the substrate may or may not be coated with a coating material. The coating material may comprise or be formed from at least one material of the following materials: a metal; a transition metal, an oxide (e.g., a metal oxide or a transition metal oxide); a dielectric; a polymer (e.g., a carbon-based polymer or a silicon-based polymer); an oxynitride; a nitride; a carbide; a ceramic; a semi-metal (e.g., carbon); a perovskite; a glass or glassy material (e.g., a sulfidic glass); a semiconductor; a semiconductor oxide; a semi-organic material, and / or an organic material. The coating material for coating the substrate may or may not be provided by means of a coating material source.

The coating material source, according to various embodiments, may be configured to coat at least one substrate (ie, one or more substrates) that is transported through the processing section, for example. For example, the coating material source may be configured to provide a gaseous coating material (eg, a material vapor) and / or liquid coating material, which may be deposited, for example, on the at least one substrate to form a layer. A coating material source may comprise at least one of: a sputtering device, a thermal evaporation device (eg, a laser beam evaporator, an arc evaporator, an electron beam evaporator and / or a thermal evaporator), a precursor gas source, a liquid phase atomizer. A sputtering apparatus may be arranged to atomize the coating material by means of a plasma. A thermal evaporation device may be configured to transfer the coating material to a gaseous state by means of thermal energy. Depending on the nature of the coating material, a sublimation and / or evaporation of the coating material can take place. In other words, the thermal evaporation device can also sublimate the coating material. A liquid phase sprayer may be adapted to apply a coating material from the liquid phase, eg having a dye or formed therefrom.

According to various embodiments, the substrate may comprise or be formed of at least one of a ceramic, a glass, a semiconductor (eg an amorphous, polycrystalline or monocrystalline semiconductor, eg silicon), a metal (eg aluminum, copper, iron, steel, Platinum, gold, etc.) a polymer (eg plastic) and / or a mixture of different materials, such as a composite material (e.g., carbon fiber reinforced carbon, or carbon fiber reinforced plastic).

According to various embodiments, the substrate may include or be formed from a plastic film, a semiconductor foil, a metal foil, and / or a glass foil, and optionally be coated. Optionally, the substrate may comprise fibers, e.g. Glass fibers, carbon fibers, metal fibers and / or plastic fibers, e.g. in the form of a woven fabric, a net, a knitted fabric, a knitted fabric, or as a felt or fleece.

According to various embodiments, a substrate may be transported as a ribbon (also referred to as a ribbon substrate) from roll-to-roll. The tape substrate may have a width (dimension transverse to the transport direction) in a range of about 30 cm to about 500 cm, or a width of more than about 500 cm. Furthermore, the tape substrate can be flexible. Illustratively, a tape substrate can be any substrate that can be wound onto a roll and / or processed, for example, roll-to-roll. The tape substrate may have a material thickness (also referred to as substrate thickness) in a range of about a few micrometers (e.g., from about 1 μm) to about a few millimeters (e.g., to about 10 mm), e.g., about 10 mm, depending on the elasticity of the material used. in a range of about 0.01 mm to about 3 mm. The guide rollers may be longer than the substrate is wide.

According to various embodiments, the transport arrangement described herein may be arranged, e.g. one or more concave guide rollers (or rollers), that the tape substrate is smooth (even) transported and the tape substrate does not undulate or warp illustratively, e.g. by means of so-called spreader rollers. Further, the transport assembly described herein may be configured to apply a predefined tension to the tape substrate, e.g. at least in the processing section. For example, due to the predefined mass of the roller, a guide roller of the transport arrangement can generate a predefined tension and / or its speed can be controlled and / or regulated.

According to various embodiments, processing (also referred to as treating) a tape substrate may include at least one of: cleaning the tape substrate, coating the tape substrate, irradiating (eg, by light, coherent light, ultraviolet light, particles, electrons, ions, etc.) of the tape substrate, modifying the surface of the tape substrate, heating the tape substrate, etching the tape substrate and smoldering the tape substrate.

As used herein, a metal (also referred to as a metallic material) may comprise (or be formed of) at least one metallic element (i.e., one or more metallic elements), e.g. at least one element from the following group of elements: copper (Cu), iron (Fe), titanium (Ti), nickel (Ni), silver (Ag), chromium (Cr), platinum (Pt), gold (Au), Magnesium (Mg), Aluminum (Al), Zirconium (Zr), Tantalum (Ta), Molybdenum (Mo), Tungsten (W), Vanadium (V), Barium (Ba), Indium (In), Calcium (Ca), Hafnium (Hf), samarium (Sm), silver (Ag), and / or lithium (Li). Further, a metal may include or be formed of a metallic compound (e.g., an intermetallic compound or an alloy), e.g. a compound of at least two metallic elements (e.g., the group of elements), e.g. Bronze or brass, or e.g. a compound of at least one metallic element (e.g., the group of elements) and at least one non-metallic element (e.g., carbon), e.g. Stole.

According to various embodiments, a chamber housing may have one or more chambers. For example, to provide a negative pressure or a vacuum (ie, configured as a vacuum chamber housing), the chamber housing can be coupled to a pump arrangement, eg, a vacuum pump arrangement (eg, gas-conducting) and can be stably set up to withstand the action of the air pressure in the pumped-down state. The pump arrangement (Having at least one vacuum pump, eg a high vacuum pump, eg a turbomolecular pump) may allow some of the gas to be pumped out of the interior of the processing chamber, eg from the vacuum area. Accordingly, one or more vacuum chambers may be provided in a chamber housing. In other words, the chamber housing may be configured as a vacuum chamber housing.

According to various embodiments, a chamber housing, eg, a vacuum chamber provided therein, may be configured to provide pressure in a range of about 10 mbar to about 1 mbar (in other words, rough vacuum) and / or pressure in a range from about 1 mbar to about 10 ^-3 mbar (in other words, fine vacuum), and / or a pressure in a range of about 10 ^-3 mbar to about 10 ^-7 mbar (in other words high vacuum) and / or a pressure of less as a high vacuum, eg less than about 10 ^-7 mbar.

According to various embodiments, a transport arrangement and a processing arrangement and a method for operating these are provided, which are economically attractive for the operators, since they offer a great possible flexibility.

According to various embodiments, there is provided a transport assembly and a processing assembly therefor comprising at least three, e.g. has four, identical winding drives. These can optionally be used as substrate winder or interleaf winder (also referred to as interlayer winder). The winding drives can be set up to drive the respective winders (also referred to as winding sleeve clutches) in both directions of rotation.

The storage of the winder may vary depending on the Umwickelkonfiguration (clearly plant configuration). With a small substrate width cantilevered cantilever winder may be used, e.g. at a substrate width up to about 400 mm. For a larger substrate width, e.g. from 300 mm or more (e.g., about 600 mm), a front board may be provided which allows for double-sided support of the winder.

A guide roller (also referred to as a guide roller) may, depending on the purpose and configuration, be designed differently or become. For example, a leadership role may be set up as passive guidance of the transport path. Such a passive guide roller may, for example, be unpowered and caused to rotate by the movement of the substrate, e.g. in the case of a pulley. The passive guide roller may, for example, have a metal surface (e.g., a steel roller) and / or be ground or polished. Thus, mechanical stress on the substrate by the guide roller and / or by slippage may be minimized.

Alternatively, a guide roller may be or may be configured as a pull roller (also referred to as a pull roller). A pull roll may have a rubberized surface, e.g. This can be coated with a rubber or be.

Optionally, a guide roller can be or will be set up as a measuring roller. The measuring roller may comprise at least one sensor which may be arranged to detect a mechanical quantity, the mechanical quantity representing a mechanical stress in the substrate. The mechanical size may, for example, have a mechanical interaction with the substrate, e.g. a mechanical force to or from the substrate (e.g., a torque). Alternatively or additionally, the mechanical variable may have a rotational speed of the measuring roller. In other words, the measuring roller may be configured to detect a mechanical quantity representing a mechanical tensile stress in the substrate and / or its gradients and / or transients.

Optionally, the transport arrangement can have one or more train control systems (for decoupling of the train). The or each train rule stretch may comprise at least one measuring roll, a pull roll and a controller. The controller may be configured to control and / or regulate a rotational speed and / or torque of the tension roller based on the mechanical magnitude, e.g. according to a specification. The controller may also be used to control and / or regulate multiple train control paths in common. By means of the or each train controlled system, the mechanical tensile stress (also referred to as web tension) which is transmitted from the guide rollers and / or winders to the substrate can be controlled and / or regulated in the case of a sensitive substrate.

After reconfiguring the transport assembly (i.e., reconfiguring the web run), it may be necessary to accurately set and metrologically check the new web run. In particular, if the substrate comprises flexible glass or is formed therefrom, there are high demands on the axis parallelism of the corresponding guide rollers and corrugated sleeve clutches.

Optionally, the transport arrangement can have a substrate position sensor which can be set up to detect a measured variable which represents a position of the substrate transversely to the transport direction. By way of example, the substrate position sensor can have a web edge sensor system which is set up to detect an edge of the substrate. By means of the substrate position sensor, a positional deviation of the substrate in the axial direction can be detected and / or it can be detected when the substrate breaks (also referred to as web break).

The position and / or orientation of a processing source (also referred to as a process component) or multiple processing sources can be set up in such a way that as few disturbing particles as possible (parasitic particles, i.e., clearly undesirable particles) are deposited on the substrate. For example, the or each processing source may have a processing direction (e.g., a coating direction), wherein a first directional component of the processing direction may be directed against the direction of gravity and may be smaller than a second directional component of the processing direction transverse to the direction of gravity.

According to various embodiments, a free-hanging (also referred to as freespan) processing of the substrate may take place. In general, a Freespan arrangement can offer the possibility of varying the freely suspended path length and its orientation relative to the direction of gravity (also referred to as orientation) and adapting them to the respective conditions. Alternatively, the substrate may be processed on a processing roll.

In conventional plant designs, powered winders can be preconfigured positioned assemblies, which typically limit the variability of possible web runs. In other words, possible variants can already be defined in the machine design and later can no longer be changed. According to various embodiments, four identical winders may or may be provided which, due to the optional functionality, allow for a variety of possible web guiding variants and thus may be the basis for great process flexibility.

1A illustrates a transport arrangement 100 According to various embodiments in a schematic side view or cross-sectional view (eg, viewed along a rotation axis direction 101 the transport arrangement 100 ) and 1B the transport arrangement 100 with inserted substrate 102 in a first wrap configuration 100b ,

According to various embodiments, the transport arrangement 100 a plurality of rotatably mounted corrugated sleeve clutches 112a . 112b . 112c have, for example, at least three corrugated tube clutches 112a . 112b . 112c , Each winding sleeve clutch 112a . 112b . 112c the several winding tube clutches 112a . 112b . 112c can be set up for receiving and storing (coupling) a winding tube. Each corrugated sleeve clutch of the several corrugated sleeve clutches 112a . 112b . 112c can be about a rotation axis 101 be rotatably mounted.

A winding tube (also referred to as a coil) can be understood as a tubular carrier, by means of which a flexible material in the form of a winding stored or wrapped, ie wound into a winding or unwound from a winding can be. The flexible material may be, for example, a substrate 102 form or at least be part of it, which can be processed later. For example, by means of a winding tube, a substrate 102 wrapped, eg wound on or unwound from, are (also referred to as a substrate winding tube). The flexible substrate 102 can be between two corrugated tube couplings 112a . 112b the several winding tube clutches 112a . 112b . 112c be wrapped, for example, from a first substrate winding tube to a second substrate winding tube.

Alternatively or additionally, a flexible material may be an optional interlayer 104 form or at least be part of this. The intermediate layer can be between individual layers of a winding 102w of the substrate 102 (also as a substrate winding 102w to be arranged). In other words, the substrate can 102 and the intermediate layer 104 be wrapped or become one another. By means of the intermediate layer 104 may be a physical contact of individual layers of the substrate winding 102w prevents what the substrate 102 and / or protects its coating.

According to various embodiments, by means of an additional winding tube, the optional intermediate layer 104 wrapped, eg wound on or unwound from, are (also referred to as intermediate layer winding tube). An additional winding sleeve coupling 112c the several winding tube clutches 112a . 112b . 112c may be provided, the optional intermediate layer 104 Umwickeln, ie from a substrate winding 102w out and / or into a substrate winding 102w to wrap in it. The intermediate layer 104 may for example be an interlayer winding 104w wound up and / or handled by this. Alternatively, the intermediate layer 104 between the two substrate coils 102w be wrapped.

Furthermore, the transport arrangement 100 at least one rotatably mounted guide roller 122 exhibit. The at least one leading role 122 can be about a rotation axis 101 be rotatably mounted.

The leadership 122 can have a curved transport path 111 define (various options illustrated by dashed lines) along which the wrapping 111w can be done. The substrate 102 can by means of at least one rotatably mounted guide roller 122 be diverted, managed and / or pulled. The transport path 111 can be in a transportation area 111b be arranged.

The redirecting of the transport path 111 by means of each guide roller of the at least one rotatably mounted guide roller 122 can have an angle (clearly the difference between the incoming transport path and the expiring transport path). The angle can also be referred to as a minimum wrap. The angle may be greater than about 10 °, eg greater than about 20 °, eg greater than about 30 °.

According to various embodiments, the plurality of winding tube couplings 112a . 112b . 112c be arranged substantially similar, so that the cores are interchangeable with each other. In other words, a winding tube, for example a substrate winding tube or an intermediate layer winding tube, on each winding tube coupling of the plurality of winding tube clutches 112a . 112b . 112c fit.

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c be configured in the first Umwickelkonfiguration the substrate 102 between a first winding sleeve clutch 112a the several winding tube clutches 112a . 112b . 112c and a second winding sleeve clutch 112b to wrap the several winding tube clutches.

Optionally, in the first wrapping configuration 100b the intermediate layer 104 by means of a third corrugated sleeve coupling 112c the several winding tube clutches 112a . 112b . 112c be wrapped, for example, from the first winding sleeve clutch 112a and / or to the second corrugated sleeve clutch 112b , For example, the intermediate layer 104 by means of the third winding sleeve clutch 112c between the first winding sleeve clutch 112a and the second winding tube clutch 112b wrapped (also known as rewinding).

The third winding sleeve clutch 112c can between the second winding tube clutch 112b and the first winding sleeve clutch 112a be arranged or become. Alternatively or additionally, the third corrugated sleeve coupling 112c a greater distance to the at least one leadership role 122 have as the second cores clutch 112b and / or as the first winding sleeve clutch 112a ,

The axes of rotation 101 the winding sleeve couplings 112a . 112b . 112c can be parallel to each other, eg parallel to the rotation axis direction 101 , The rotation axis 101 the at least one leadership role 122 can be axially parallel to the axes of rotation 101 the winding sleeve couplings 112a . 112b . 112c be, for example, parallel to the rotation axis direction 101 ,

2A illustrates the transport arrangement 100 in a second exemplary wrap configuration 200a and 2 B the transport arrangement 100 in a third exemplary wrap configuration 200b ,

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c be established in the second wrapping configuration 200a the substrate 102 between the first winding sleeve clutch 112a and the third winding sleeve clutch 112c to rewind. Optionally, in the second wrapping configuration 200a the intermediate layer 104 by means of the second winding sleeve clutch 112b be wrapped.

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c be set up in the third wrap around configuration 200b the substrate 102 between the second winding tube clutch 112b and the third winding sleeve clutch 112c to rewind. Optionally, in the third wrapping configuration 200b the intermediate layer 104 by means of the first winding sleeve clutch 112a be wrapped.

3A illustrates a transport arrangement 300 According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 300 ), which four winding sleeve clutch 112a . 112b . 112c . 112d having; and 3B . 4A such as 4B the transport arrangement 300 in different wrapping configurations 300b . 400a . 400b ,

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c . 112d be set up in the first wrapping configuration 300b the substrate 102 between the first winding sleeve clutch 112a and the second winding tube clutch 112b to rewind. Optionally, in the first wraparound 300b a first intermediate layer 104 by means of the third winding sleeve clutch 112c and / or a second intermediate layer 104 by means of a fourth winding sleeve clutch 112d the several winding tube clutches 112a . 112b . 112c . 112d be wrapped or become.

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c . 112d be configured in the second Umwickelkonfiguration (not shown), the substrate 102 between the first winding sleeve clutch 112a and the third winding sleeve clutch 112c to rewind. Optionally, in the second wrapping configuration, the first intermediate layer 104 by means of the second winding sleeve clutch 112b be wrapped or become.

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c . 112d be set up in the third wrap around configuration 400a the substrate 102 between the second winding tube clutch 112b and the third winding sleeve clutch 112c to rewind. Optionally, in the third wrapping configuration 400a the first intermediate layer 104 by means of the first winding sleeve clutch 112a and / or the second intermediate layer 104 by means of the fourth winding sleeve clutch 112d be wrapped or become.

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c . 112d be set up in a fourth wrapping configuration 400b the substrate 102 between the first winding sleeve clutch 112a and the fourth winding sleeve clutch 112d to rewind. Optionally, in the fourth wrapping configuration 400b the first intermediate layer 104 by means of the second winding sleeve clutch 112b and the second intermediate layer 104 by means of the third winding sleeve clutch 112c be wrapped or become.

According to various embodiments, the plurality of rotatably mounted coiled-tube couplings 112a . 112b . 112c . 112d be configured in a fifth Umwickelkonfiguration (not shown), the substrate 102 between the third winding sleeve clutch 112c and the fourth winding sleeve clutch 112d to rewind. Optionally, in the fifth wrapping configuration, the first intermediate layer 104 by means of the first winding sleeve clutch 112a and / or a second intermediate layer 104 by means of the second winding sleeve clutch 112b the several winding tube clutches 112a . 112b . 112c . 112d be wrapped or become.

The first intermediate layer 104 may for example consist of a first substrate winding 102w be unwrapped and / or the second intermediate layer 104 may, for example, in a second substrate winding 102w be wrapped or become.

Alternatively to the in 300b . 400a . 400b illustrate spatial arrangement of the plurality of winding tube clutches 112a . 112b . 112c . 112d can be the first corrugated tube clutch 112a and the third corrugated sleeve clutch 112c be arranged reversed or be and / or can the second cores coupling 112b and the fourth winding tube clutch 112d be arranged reversed or become.

5A illustrates a transport arrangement according to various embodiments in a schematic detail view 500a (with view across the axis of rotation 101 ).

According to various embodiments, a winding tube 502 , For example, a substrate winding tube 502 and / or an interlayer winding tube 502 on a winding tube coupling 112a . 112b . 112c . 112d plugged 501 be or become. The plugging can be done along the axis of rotation 101 respectively. The winding tube 502 can have an inside diameter 502w which is equal to or larger than an outer diameter 112r the winding sleeve clutch 112a . 112b . 112c . 112d ,

5B illustrates a transport arrangement according to various embodiments in a schematic detail view 500b (with view across the axis of rotation 101 ).

According to various embodiments, one or each winding tube coupling 112a . 112b . 112c . 112d a tensioning device 504 have for clamping the respective winding tube. The tensioning device 504 may comprise at least one mandrel (eg a sleeve mandrel and / or a segment clamping mandrel) and / or at least one expanding mandrel or be formed therefrom. By means of the tensioning device 504 can the outer diameter 112r or outer circumference of the winding tube coupling 112a . 112b . 112c . 112d be adjustable.

For example, the tensioning device 504 in a tensioned state against an attached winding tube 502 Press (also as clamping of the winding tube 502 designated).

The tensioning device 504 may be arranged, a rotational movement and / or torque on or from a (s) clamped (s) winding tube 502 forward. The clamping by means of the clamping device 504 (by being operated) can optionally by hand (manually operated clamping device 504 ), eg via a clamping nut or clamping screw, done. Alternatively, clamping by means of the clamping device 504 (mechanical clamping device 504 ) by machine (for example automated), eg hydraulically or pneumatically, for example by means of a clamping cylinder. Optionally, the tensioning device 504 be centered or be centered over a cylindrical or conical receptacle.

The winding tube coupling 112a . 112b . 112c . 112d can be a rotatably mounted shaft 112w (eg a machine spindle 112w ), by means of which the tensioning device 504 is stored. The rotatably mounted shaft 112w can be the minimum outer diameter 112r the winding sleeve clutch 112a . 112b . 112c . 112d define. The adjustment range of the clamping device 504 can the maximum outside diameter 112r the winding sleeve clutch 112a . 112b . 112c . 112d define.

According to various embodiments, the outer diameter 112r the winding sleeve clutch 112a . 112b . 112c . 112d are in a range of about 30 mm to about 150 mm, for example about 100 mm. For example, the clamping range of the winding tube coupling 112a . 112b . 112c . 112d in a range of about 30 mm to about 150 mm.

5C illustrates a transport arrangement according to various embodiments in a schematic detail view 500c (with view across the axis of rotation 101 ).

According to various embodiments, the transport arrangement may have multiple drives 506 (also as winding drives 506 have), each of which drive with exactly one winding tube coupling of the plurality of winding tube clutches 112a . 112b . 112c . 112d is coupled. The or each drive of the multiple drives 506 may be arranged for generating a rotational movement and / or a torque, which on the respective winding tube coupling of the plurality of winding tube clutches 112a . 112b . 112c . 112d is transmitted. The or each drive of the multiple drives 506 can be an electric drive 506 have or be formed from it.

In each case a pair of drive 506 and coupled to this winding sleeve coupling 112a can a winder 506 . 112a (Illustratively a driven corrugated sleeve clutches 506 . 112a ) or at least be part of it.

The or each drive of the multiple drives 506 can by means of a controller 508 be controlled or regulated, for example by means of one of the controller 508 generated control signal. The control signal may, for example, a rotational behavior of the or each drive of the plurality of drives 506 represent, for example, a direction of rotation, a speed and / or a generated torque. For example, the control signal may be one of the following electrical characteristics of the or each drive of the plurality of drives 506 have or define: an electrical power consumption, an electrical current consumption, an applied electrical voltage and / or their frequency.

Every drive of the several drives 506 can be set up substantially similar. By this it can be understood that each drive of the multiple drives 506 with identical control has the same rotational behavior. For example, each drive of the multiple drives 506 rotate synchronously with similar control, ie in the same direction of rotation at the same speed and / or with simultaneous movement change. Alternatively or additionally, each drive of the multiple drives 506 with identical control the same torque (eg with the same sense of direction) produce. The similar control can be understood, for example, as that the or each drive of the multiple drives 506 the same control signal is coupled. This can be a driving the multiple drives 506 be relieved.

Alternatively or additionally, a controller 508 , by means of which the several drives 506 be controlled, have a control circuit which is set up, a deviation of the rotational behavior of the or each drive of the plurality of drives 506 from a specification and / or among each other. Furthermore, the controller 508 be set up, the or each drive of the multiple drives 506 to control based on the deviation, for example, such that the deviation is reduced and / or that each drive of the plurality of drives 506 has the same rotational behavior. This can be achieved that tolerance-related or constructive differences of the drives 506 and / or the storage of the winding tube clutches 112a . 112b . 112c . 112d can be compensated. Alternatively, therefore different drives from each other 506 be operated, which is a later replacement of a drive 506 relieved if, for example, his model has expired. This increases the maintenance compatibility of the transport arrangement.

The or each drive of the multiple drives 506 can optionally be set up for bidirectional operation, eg by inverting the control signal. This allows greater flexibility to be achieved.

Optionally, the controller 508 for driving each drive of the plurality of drives 506 set up according to a wrapping configuration be. The wrap-around configuration may have a take-up configuration and / or an unwind configuration.

The take-up configuration can have at least one parameter which is used to drive the winding tube coupling 112a . 112b . 112c . 112d (or the coupled with this drive 506 ) is used, by means of which the substrate 102 is wound up. Optionally, the take-up configuration may have at least one additional parameter which is used to drive the winding tube coupling 112a . 112b . 112c . 112d (or the coupled with this drive 506 ) is used, by means of which the second intermediate layer is unwound.

The unwind configuration may have at least one parameter which is used to drive the coiled-tube clutch 112a . 112b . 112c . 112d (or the coupled with this drive 506 ) is used, by means of which the substrate 102 is handled. Optionally, the unwind configuration may have at least one additional parameter which is used to drive that coiled-tube clutch 112a . 112b . 112c . 112d (or the coupled with this drive 506 ) is used, by means of which the first intermediate layer is wound up.

The at least one parameter can be the rotational behavior of the corresponding winding sleeve clutch 112a when unwinding or winding up the substrate 102 represent, for example, the torque, the speed, the direction of rotation and / or their time dependence. The at least one additional parameter can be the rotational behavior of the corresponding winding sleeve coupling 112a during unwinding or winding up of the intermediate layer, for example the torque, the rotational speed, the direction of rotation and / or their time dependency. According to the at least one parameter and / or the at least one additional parameter, the controller 508 provide the control signal, such as that in the or each drive of the multiple drives 506 coupled-in electrical power.

According to various embodiments, the controller may 508 be set up, each drive of the multiple drives 506 optionally, according to the take-up configuration or according to the unwinding configuration to control. For example, the controller 508 a first driven corrugated sleeve clutches 506 . 112a Assign to the rewind configuration and control it according to the rewind configuration. Alternatively or additionally, the controller 508 a second driven corrugated sleeve clutches 506 . 112b Assign the unwind configuration and control it according to the unwind configuration. Optionally, the controller 508 be set up to swap the assignment of the unwind configuration and the assignment of the Aufwickel configuration.

According to various embodiments, the controller may 508 be set, a rotational behavior (eg, a speed) of one or each winding sleeve clutch 112a . 112b . 112c . 112d to be adapted to a size which is a transport characteristic of the substrate 102 represents. The transport characteristic may be a transport progress and / or a mechanical tension caused thereby in the substrate 102 have, for example, their time dependence. The transport progress may have a transport speed and / or an already traveled transport path.

For example, when unwinding the substrate 102 the diameter of the substrate winding 102w decrease, which by a faster turning of the corresponding winding sleeve clutch 112a . 112b . 112c . 112d can be compensated. Alternatively or additionally, a mechanical tensile stress in the substrate 102 generated and / or maintained to prevent the substrate 102 vividly sagging or curling. Alternatively or additionally, a mechanical tensile stress in the substrate 102 be generated and / or maintained, which is smaller than a predetermined threshold value, which clearly represents the mechanical stress at which a substrate fracture threatens.

6A illustrates a transport arrangement 600a According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 600a ).

According to various embodiments, the transport area 111b at least one processing section 601 in which the transport path 111 (ie its section 111k ) has a constant curvature, eg along a length of more than the quarter of the circumference, eg more than half the circumference, of the at least one guide roller 122 by means of which the transport path 111 is curved. Along the constant curved section 111k (Transport path portion 111k ) may be the substrate 102 on a processing roll 122p rest. The processing role 122p can be an active (eg driven and / or tempered) leadership role 122 be.

According to various embodiments, the processing role 122p have a diameter in a range of about 0.5 m (meter) to about 1 m, for example in a range of about 0.7 m to about 0.8 m.

6B illustrates a transport arrangement 600b According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 600b ).

According to various embodiments, the transport area 111b at least one processing section 601 in which the transport path 111 (ie its section 111g ) extends in a straight line along a length of more than half the circumference of the at least one guide roller 122 , For example, the at least one leadership role 122 two passive guide rollers 122 between which the transport path 111 (ie its section 111g ) runs straight. Along the straight-line section 111g (Transport path portion 111g ) may be the substrate 102 be transported without contact or become (eg free-hanging).

Each of the two passive leadership roles 122 may have a diameter in a range of about 50 mm to about 0.3 m, for example in a range of about 80 mm to about 0.2 m.

7A illustrates a transport arrangement 700a according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement 700a ).

According to various embodiments, the transport arrangement 700a a guide-carrier 702 having a first mounting position 701 and a second mounting position 701b for the at least one leadership role 122 provides. The at least one leading role 122 can optionally in the first mounting position 701 and the second mounting position 701b be mountable, as will be described in more detail below.

According to various embodiments, a method may include reconfiguring the transport assembly 700a the at least one leadership role 122 in the first mounting position 701 or in the second mounting position 701b bring to 701 (eg umzumontieren 701 ), as will be described in more detail below.

7B illustrates a transport arrangement 700b according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement 700b ).

The leadership vehicle 702 can for each winding sleeve coupling of the plurality of rotatably mounted winding tube clutches 112a . 112b . 112c . 112d exactly one mounting position W1, W2, W3, W4 (also referred to as a winding sleeve clutch mounting position W1, W2, W3, W4), which is assigned to this. The leadership vehicle 702 may be arranged such that the plurality of rotatably mounted corrugated tube clutches 112a . 112b . 112c . 112d interchangeable with each other can be mounted, ie that their assignment to the winding tube coupling mounting positions W1, W2, W3, W4 can be reversed. The or each drive of the multiple drives 506 can by means of a wave 112w with the respective winding sleeve coupling of the plurality of winding sleeve clutches 112a . 112b . 112c . 112d be coupled. At each winding sleeve clutch mounting position W1, W2, W3, W4 can have a through hole 702o be arranged, through which in each case a wave 112w the multiple waves 112w is extended therethrough.

8A and 8B each illustrate a vacuum arrangement 800a . 800b according to various embodiments in a schematic side view or cross-sectional view (viewed along the axis of rotation 101 ).

The processing (eg coating) of the substrate 102 can be done in a vacuum according to various embodiments, for example in a vacuum arrangement 800a . 800b ,

According to various embodiments, the vacuum arrangement 800a . 800b a vacuum chamber housing 802 in which a vacuum can be generated and / or obtained. The vacuum chamber housing 802 can be, for example, airtight, dustproof and / or vacuum-tight set up or become. The vacuum chamber housing 802 may have one or more vacuum chambers. The or each vacuum chamber may have one or more vacuum areas 306b . 308b provide. The multiple vacuum chambers and / or the multiple vacuum areas 306b . 308b of the vacuum chamber housing 802 may optionally be at least partially gas-separated from each other.

Furthermore, the vacuum chamber housing 802 with a pump system 804 (comprising at least one rough-action vacuum pump and optionally at least one high-vacuum pump). The pump system 804 can be set up, the vacuum chamber housing 802 to withdraw a gas (eg the process gas), so that within the vacuum chamber housing 802 a vacuum (ie, a pressure less than 0.3 bar) and / or a pressure in a range of about 1 mbar to about 10 ^-3 mbar (in other words, a fine vacuum) and / or a pressure in a range of about 10 ^-3 mbar to about 10 ^-7 mbar (in other words high vacuum) or a pressure of less than high vacuum, eg less than about 10 ^-7 mbar (in other words ultrahigh vacuum) may or may not be provided.

According to various embodiments, the vacuum arrangement 800a . 800b a gas supply 1716 exhibit. By means of the gas supply 1716 can the vacuum chamber housing 802 a process gas is supplied to form a process atmosphere in the vacuum chamber housing 802 , The process gas may include, for example, an inert gas or be formed therefrom. Alternatively or additionally, the process gas may comprise or be formed from a reactive gas, for example oxygen, nitrogen, hydrogen, argon and / or carbon. The process pressure can be formed from a balance of process gas, which by means of the gas supply 1716 supplied and by means of the pump system 804 is withdrawn.

Furthermore, the vacuum chamber housing 802 be set up so that the vacuum conditions (the process conditions) within the vacuum chamber housing 802 (Eg process pressure, process temperature, chemical process gas composition, etc.) can be made or regulated (eg locally), eg by means of a controller 508 , For example, by means of the vacuum chamber housing 802 several vacuum areas 306b . 308b be provided with mutually different vacuum conditions. For example, the controller 508 for controlling and / or regulating the gas supply 1716 and / or the pump system 804 be set so that a process pressure and / or a process gas composition can be controlled and / or regulated. For example, the controller 508 be arranged for controlling and / or regulating a standard volume flow of process gas, which by means of the gas supply 1716 supplied and / or by means of the pump system 804 is withdrawn.

According to various embodiments, the controller may 508 for controlling and / or regulating an optional substrate temperature control device 1124 (eg comprising a heating device and / or a cooling device), so that a process temperature (eg of the substrate 102 and / or the process gas), for example during processing (eg during coating), can be controlled and / or regulated. For example, the controller 508 be set up to control and / or regulating a thermal power, which by means of the substrate temperature control device 1124 supplied and / or withdrawn by means of this.

Optionally, the vacuum arrangement 800a . 800b a supply device for supplying the tempering device 1124 have, for example, to supply with a tempered fluid or electrical energy. For example, the supply device outside the processing chamber 802 be arranged. For example, a heating or a cooling medium to the temperature control 1124 (eg the processing role 122p ) and removed from this again.

In the vacuum chamber housing 802 (eg in a first vacuum chamber) can be at least one vacuum region 306b , eg a first vacuum area 306b be arranged. Further, in the vacuum chamber housing 802 (eg in the first vacuum chamber) a first processing source 306 , eg a source of coating material 306 be arranged. The coating material source 306 can be used to emit a gaseous coating material in the first vacuum area 306b be set up in it. With the coating material, the substrate 102 be coated or be. In other words, the coating of the substrate 102 done in a vacuum. The first vacuum area 306b can be a coating area 306b be.

In the vacuum chamber housing 802 (For example, in a second vacuum chamber or in the first vacuum chamber), at least a second vacuum region 308b be arranged. Further, in the vacuum chamber housing 802 (eg in the second vacuum chamber) a second processing source 308 , eg an exposure device 308 be arranged. The second processing source 308 may be arranged to process the coating material with which the substrate 102 is coated or is, for example by means of light. For example, the processing source 308 be configured for structuring or chemical conversion of the coating material with which the substrate 102 is or will be coated. The second vacuum area 308b can be a editing area 308b be.

According to various embodiments, the vacuum chamber housing 802 a chamber opening for exposing the interior of the vacuum chamber housing 802 exhibit. The chamber opening may be the interior of the vacuum chamber housing 802 for example in the direction of rotation 101 uncover. For closing the chamber opening, the vacuum chamber housing 802 have a chamber lid.

For example, the second processing source 308 at least one exposure device, for example a light source (eg a laser, a lamp, a flash lamp or an X-ray source), a heat radiation source or a Particle source (eg an electron source or a proton source or an ion source).

The second processing source 308 may be a pulsed or continuously operated second processing source 308 be. For example, by means of the second processing source 308 a (eg pulsed or continuous) radiation 402 (For example, electromagnetic radiation, such as light, heat radiation and / or particle radiation, such as electron radiation and / or ion radiation) are generated, for example, a continuous electron beam 402 by means of an electron beam gun (eg by means of a linear source) or a pulsed flash of light by means of a flash lamp (eg a gas discharge lamp or a light emitting diode).

The second processing source 308 For example, it may include or be formed from one or more flash lamps. The or each flashlamp may comprise a gas discharge lamp which may or may be pulsed, for example by means of the controller 508 , For pulsed operation of the or each gas discharge lamp, a current pulse may be discharged through the gas discharge lamp.

According to various embodiments, the controller may 508 for controlling and / or regulating the first processing source 306 and / or the second second processing source 308 be set up, for example by controlling a quantity of material and / or thermal energy (eg radiation energy) and / or regulate which per time in the direction 105 of the substrate 102 is emitted.

Furthermore, the vacuum arrangement 800a . 800b a winding tube coupling 112a . 112b for unwinding a substrate 102 (also referred to as unwinding roller), so that the substrate 102 in the at least one vacuum area 306b . 308b is brought in. Furthermore, the vacuum arrangement 800a . 800b a winding tube coupling 112c . 112d for winding up the substrate 102 have (also as a take-up roller 112c . 112d designated), which from the at least one vacuum region 306b . 308b is brought out. In other words, the substrate 102 be processed by roll-to-roll.

Furthermore, the vacuum arrangement 800a . 800b several guide rollers 122 which have a transport path 111 along which the substrate is defined 102 (eg a belt-shaped substrate) between the unwinding roll 112a . 112b and the take-up roller 112c . 112d through the at least one vacuum area 306b . 308b is transported through, for example in a transport direction 111w (Which perpendicular to the rotation axis direction 101 can be).

The vacuum arrangement 800a can have at least two guide rollers 122 between which a rectilinear section 111g the transport path 111 is spanned. The rectilinear section 111g the transport path 111 can in the at least one vacuum area 306b . 308b be arranged, in which the substrate 102 is processed. The at least one vacuum area 306b . 308b can within the processing section 601 be arranged or become.

The vacuum arrangement 800b can exactly be a leader 122p have, which the tempering 1124 has, ie which as a processing role 122p is set up by means of the substrate 102 tempered, eg heated and / or cooled, can be. By means of the processing role 122p can be the constant curved section 111k the transport path 111 (also as transport path section 111k be provided). The constantly curved transport path section 111k can in the at least one vacuum area 306b . 308b be arranged, in which the substrate 102 is processed. The at least one vacuum area 306b . 308b can within the processing section 601 be arranged or become.

Furthermore, the vacuum arrangement 800a . 800b a drive system 518 having at least part of the plurality of rollers 112a . 112b . 112c . 112d . 122 coupled 518k is, for example, at least part of the multiple leadership roles 122 and with each corrugated sleeve clutch of the plurality of corrugated sleeve clutches 112a . 112b . 112c . 112d , The drive system 518 Can the multiple drives 506 exhibit. For example, the drive system 518 by means of waves, 518k chain 518k , Straps 518k or gears 518k with the part of the variety of roles 112a . 112b . 112c . 112d . 122 be coupled, which are driven. The drive system 518 and part of the variety of roles 112a . 112b . 112c . 112d . 122 may be part of a positioning device used to position the substrate 102 is set up.

The control 508 can to control 518k and / or rules 518k of the drive system 518 be set up, for example, to control 518k and / or rules 518k a transport characteristic, for example a transport speed, a mechanical tension on the substrate 102 , and / or a position of the substrate 102 , The taxes 518k and / or rules 518k of the drive system 518 can during the processing of the substrate 102 take place, for example during the coating and / or irradiation, for example on the basis of a processing progress (eg a coating progress and / or a structuring progress) and / or on the basis of a transport characteristic.

According to various embodiments, the vacuum arrangement 800a . 800b optionally at least one substrate pretreatment device 310 (ie, one or more substrate pretreatment devices 310 ) for pretreating the substrate 102 , eg for chemically activating the substrate 102 , For example, the at least one substrate pretreatment device 310 be set up the substrate 102 to chemically activate, for example, to chemically activate its surface, the substrate 102 to clean and / or the substrate 102 to etch. For example, the at least one substrate pretreatment device 310 have an etching device or be formed therefrom for etching the substrate 102 , Alternatively or additionally, the at least one substrate pretreatment device 310 at least one sputter etching source, at least one plasma source, at least one glow device and / or at least one etching gas source have or be formed therefrom. For example, the pretreatment of the substrate 102 have the substrate 102 by sputter etching; Ion etching and / or glowing to treat.

Optionally, by means of the at least one substrate pretreatment device 310 a water film from the substrate 102 be removed. Alternatively or additionally by means of the substrate pretreatment device 310 a number of open chemical bonds of the substrate 102 (Also referred to as chemical activation) are increased, which, for example, the adhesion and the formation of the coating on the substrate 102 can improve.

Alternatively or additionally, a substrate aftertreatment device 310 used to the substrate 102 , which is coated with the coating material to post-treat, eg similar to the pretreatment. For example, the substrate 102 having the coating with the coating material selectively heated (eg tempered) and / or etched.

9A and 9B each illustrate a vacuum arrangement 900a . 900b according to various embodiments in a schematic side view or cross-sectional view (viewed in a direction transverse to the axis of rotation 101 ).

According to various embodiments, the vacuum chamber 802 a chamber wall 902 which are at a distance from the guide roller carrier 702 is arranged.

Alternatively or additionally, the vacuum chamber 802 a chamber wall 902 with several rotary feedthroughs 902o have, of which each rotary feedthrough 902o with exactly one winding sleeve coupling of the several winding sleeve clutches 112a . 112b . 112c . 112d is coupled. By means of or each rotary union 902o may be a rotational movement and / or torque to the plurality of winding tube clutches 112a . 112b . 112c . 112d be transmitted. The rotational movement and / or the torque can outside the vacuum chamber 802 be generated or be, for example by means of multiple drives 506 ,

According to various embodiments, the chamber wall 902 a smaller thickness (extension along the rotation axis direction 101 ) as the guide roller carrier 702 , or its support plate 702p , For example, the guide roller carrier 702 (eg its carrier plate 702 ) have a thickness in a range of about 40 mm to about 50 mm. Alternatively or additionally, the chamber wall 902 have a thickness in a range of about 20 mm to about 40 mm. Optionally, the chamber wall 902 have additional stiffening rib.

10 illustrates a method 1000 for operating a transport arrangement according to various embodiments in a schematic flowchart.

The procedure 1000 can in 1001 comprising: processing a substrate in a first wrapping configuration in which the substrate is wrapped between two cores which are supported by the first corrugated sleeve clutch and the second corrugated sleeve clutch.

The procedure 1000 can also be found in 1003 comprising: processing a substrate in a second wrapping configuration in which the substrate is wrapped between two cores which are supported by the third corrugated sleeve clutch and the first corrugated sleeve clutch.

The processing can be done in 1001 at least one of the following processing types: coating the substrate, etching the substrate, and / or irradiating the substrate. The processing can be done in 1003 at least one of the following processing types: coating the substrate, etching the substrate and / or irradiation of the substrate.

The procedure 1000 can be optional in 1005 comprising: reconfiguring the transport arrangement between the first wrapping configuration and the second wrapping configuration.

The reconfiguration of the transport assembly may optionally include bringing a guide roller from a first mounting position to a second mounting position or vice versa.

Processing in 1001 and processing in 1003 can optionally differ from each other, eg in at least one processing type. Then, the reconfiguring may optionally include: replacing and / or reconfiguring a processing source.

The procedure 1000 can be optional in 1007 comprising: processing a substrate in a third wrapping configuration in which the substrate is wrapped between two cores which are supported by the third corrugated sleeve clutch and the second corrugated sleeve clutch. The procedure 1000 can be optional in 1007 comprising: reconfiguring the transport arrangement between the first wrapping configuration and the third wrapping configuration. The reconfiguration of the transport arrangement can in 1007 optionally, to bring a guide roller from the first mounting position to a third mounting position or vice versa.

The procedure 1000 can be optional in 1009 comprising: processing a substrate in a fourth wrapping configuration in which the substrate is wrapped between two cores which are supported by the fourth corrugated sleeve clutch and the first corrugated sleeve clutch. The procedure 1000 can be optional in 1009 comprising: reconfiguring the transport arrangement between the first wrapping configuration and the fourth wrapping configuration. The reconfiguration of the transport arrangement can in 1009 optionally, to bring a guide roller from the first mounting position to a fourth mounting position or vice versa.

The processing can be done in 1007 at least one of the following processing types: coating the substrate, etching the substrate, and / or irradiating the substrate. The processing can be done in 1009 at least one of the following processing types: coating the substrate, etching the substrate and / or irradiation of the substrate.

Processing in 1007 and processing in 1009 can be optional from each other or from processing in 1001 differ, eg in at least one processing type. Then, the reconfiguring may optionally include: replacing and / or reconfiguring a processing source.

The reconfiguring may include bringing the transport assembly into the first wrapping configuration, the second wrapping configuration, the third wrapping configuration, or the fourth wrapping configuration.

11A illustrates a transport arrangement 1100a according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement 1100a ) and 11B the transport arrangement 1100a in a transverse schematic side view 1100b or cross-sectional view 1100b (eg with a view along the rotation axis direction 101 the transport arrangement 1100a ).

The transport arrangement 1100a can the transport area 111b and a plurality of rotatably mounted corrugated tube clutches 112a . 112b . 112c . 112d for coupling one substrate winding tube each (eg two substrate winding tubes).

Furthermore, the transport arrangement 1100a at least one rotatably mounted guide roller 122 which are in the transport area 111b is arranged. The at least one leading role 122 Depending on the position, it can have a curved transport path 111 define along which a flexible substrate 102 can be performed. The transport path 111 can be between the several corrugated tube couplings 112a . 112b . 112c . 112d run from one to the other (from roll-to-roll configuration).

Furthermore, the transport arrangement 1100a a guide-carrier 702 exhibit. The leadership vehicle 702 can have several attachment structures 712a . 712b . 722a . 722b which are within the transport area 111b are arranged, for example, at least four, five, six, seven, eight, nine, ten attachment structures 712a . 712b . 722a . 722b or more than ten attachment structures 712a . 712b . 722a . 722b , eg twenty, eg thirty attachment structures 712a . 712b . 722a . 722b or more attachment structures 712a . 712b . 722a . 722b , The several attachment structures 712a . 712b . 722a . 722b can be arranged in a predefined regular pattern. Furthermore, each attachment structure of the plurality of attachment structures 712a . 712b . 722a . 722b a mounting position 701 . 701b define. For example, the guide roller carrier 702 at least a first mounting position 701 , a second 701b to provide a third mounting position and a fourth mounting position.

Furthermore, the transport arrangement 1100a at least one bearing arrangement 122l by means of which the at least one guide roller 122 is stored. The bearing arrangement 122w For example, may have a rotatably mounted shaft, by means of which the guide roller 122 be or can be supported. Alternatively or additionally, the bearing assembly 122w have one or more bearings, which is the leading role 122 rotatably support, at least by means of the shaft.

The bearing arrangement 122w can have a mounting base 1102 which is complementary (eg, opposing and / or mating) to each attachment structure of the plurality of attachment structures 712a . 712b . 722a . 722b is set up. In other words, the mounting base 1102 at each attachment structure of the plurality of attachment structures 712a . 712b . 722a . 722b to be assembled. This can be achieved that the bearing assembly 122w optionally in each of the mounting positions 701 . 701b can be attached (eg mounted, plugged in, screwed, clamped, etc.).

For example, each attachment structure of the plurality of attachment structures 712a . 712b . 722a . 722b have at least one positive locking element (eg, a bore), ie, a positive locking element or more positive locking elements. The mounting base can have at least one complementary positive-locking element, ie a complementary positive-locking element or a plurality of complementary positive-locking elements. The at least one positive-locking element and the at least one complementary positive-locking element can form a form-locking pair, which is set up for positive connection with one another. For example, a plurality of interlocking elements in the same pattern (eg, the same Bormuster) may be arranged as the plurality of complementary interlocking elements. Alternatively or additionally, the at least one interlocking element may have the same contour and / or the same profile as the at least one complementary interlocking element. For example, a positive engagement pair may include at least one of the following complementary ones: a recess and a projection (ie recess and complementary projection), a through hole and a pin, an internal thread and an external thread, a threaded hole and a screw, a threaded hole and a spindle, a nut and a screw, a nut and a spindle, a groove and a spring.

According to various embodiments, the mounting base 1102 have a flange or be formed from it. Alternatively or additionally, the mounting base 1102 have four positive locking elements or more, eg four through holes or more.

According to various embodiments, to reconfigure the transport assembly, first the mounting base 1102 by means of the respective attachment structure 712a in the mounting position on the guide roller carrier 702 be or be mounted. Subsequently, the guide roller on the bearing assembly 122l be plugged or be, for example, on the shaft.

According to various embodiments, each corrugated sleeve clutch of the plurality of corrugated sleeve clutches 112a . 112b . 112c . 112d (Also referred to as a sleeve bearing) be designed for rotatable storage a winding tube, such as a substrate winding tube and / or an intermediate layer winding tube.

12A illustrates a transport arrangement 1200a according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement 1200a ).

According to various embodiments, the transport arrangement may further comprise: a drive system 518 , which is used to drive the several winding tube clutches 112a . 112b . 112c . 112d is set up. The drive system 518 can have multiple drives 506 have, each of which drive 506 with exactly one winding sleeve coupling of the several winding sleeve clutches 112a . 112b . 112c . 112d is coupled.

12B illustrates a transport arrangement 1200b According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 1200b ).

According to various embodiments, the transport assembly may include at least some of the plurality of attachment structures 712a . 712b . 722a . 722b be arranged in the processing section, for example, at least a first group 1402a fastening structures 712a . 712b . 722a . 722b and / or a second group 1402b fastening structures 712a . 712b . 722a . 722b ,

13A illustrates a transport arrangement 1300a according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement 1300a ).

According to various embodiments, the guide roller carrier 702 at least one rotary union 902o have, which between two attachment structures 712a . 712b the several attachment structures 712a . 712b . 722a . 722b is arranged. Thus, optionally, a passive (eg a non-powered) leadership role 122 in at least one of the two mounting positions 701 . 701b or be an active (eg a driven) leadership role 122 (eg a processing role 122p ), which by means of the rotary feedthrough 902o can be supplied, for example by means of drive energy or with a medium.

13B illustrates a transport arrangement 1300b according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement 1300b ).

According to various embodiments, the transport arrangement 1300a a processing role 122p which are in the processing section 601 is arranged and a tempering device 1124 having. The processing role 122p can be a lateral surface 1302 over which the substrate 102 about the processing role 122p is guided around.

The tempering device 1124 may comprise a heat source for supplying thermal energy to the shell surface. Alternatively or additionally, the temperature control 1124 a heat sink for removing thermal energy from the lateral surface. By means of the tempering device 1124 may be a heat flow from the substrate 102 away or be set towards this, eg controlled and / or regulated by means of the controller 508 ,

According to various embodiments, a medium supply device may further be provided 1312 have, which with the temperature control 1124 is coupled. The medium supply device 1312 can to supply the temperature control 1124 be configured with, for example, a fluid, such as a cooling fluid and / or a heating fluid.

14A and 14B each illustrate a transport arrangement 1400a . 1400b According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 1400a ).

According to various embodiments, the transport area 111b at least one feed section 1401z which, between the processing section 601 and the unwinding cores clutches 112a (ie the winding tube coupling 112a in unwind configuration). Furthermore, the transport area 111b at least one discharge section 1401a which, between the processing section 601 and the winding cores clutches 112b (ie the winding tube coupling 112a in take-up configuration). The transport path 111 can through the Abführabschnitt 1401a and the feeding section 1401z pass through.

According to various embodiments, the plurality of attachment structures 722a . 722b . 712a . 712b in several groups 1402a . 1402b be arranged, of which a first group 1402a in the feeding section 1401z is arranged and a second group 1402b in the discharge section 1401a is arranged. The first group 1402a and / or the second group 1402b can have more than three attachment structures 712a . 712b . 722a . 722b For example, at least four, five, six, seven, eight, nine, ten attachment structures 712a . 712b . 722a . 722b or more than ten attachment structures 712a . 712b . 722a . 722b , eg twenty, eg thirty attachment structures 712a . 712b . 722a . 722b or more attachment structures 712a . 712b . 722a . 722b ,

Optionally, the attachment structures 722a . 722b . 712a . 712b the first group 1402a and the attachment structures 722a . 722b . 712a . 712b the second group 1402b mirror-symmetric with respect to a mirror plane 1411 be arranged. This allows symmetrically arranged mounting positions 701 . 701b be provided, so that a tape is facilitated with high precision. The mirror plane 1411 can be parallel to the axis of rotation 101 stand.

15A . 15B and 15C each illustrate a spatial arrangement 1500a . 1500b . 1500c of fastening structures according to various embodiments as well 16A . 16B and 16C each illustrate a spatial arrangement 1600a . 1600b . 1600c of fastening structures according to various embodiments, each in a schematic side view or cross-sectional view (eg, viewed along the rotation axis direction 101 the transport arrangement).

According to various embodiments, each attachment structure may be of the plurality of attachment structures 712a . 712b several positive locking elements 1502 . 1502g exhibit. The several positive locking elements 1502 . 1502g each attachment structure of the plurality of attachment structures 712a . 712b may be arranged according to a geometric figure or be, for example, on the contour and / or vertices, such as a triangle, a quadrangle (eg, a square), a hexagon, etc.

According to various embodiments, at least two attachment structures of the plurality of attachment structures 712a . 712b at least one common positive locking element 1502g exhibit. This allows a smaller grid of mounting positions 701 . 701b (ie, a smaller distance of these from each other) can be achieved.

One or each form-fitting element 1502 . 1502g the several attachment structures 712a . 712b may be at least one of the following positive locking elements 1502 . 1502g comprise: a recess, a projection, a through hole, a pin, an internal thread, an external thread, a threaded bore, a screw, a spindle, a nut, a groove and / or a spring.

According to various embodiments, the guide roller carrier 702 a carrier plate 702p which have at least one group 1402a . 1402b having the plurality of attachment structures.

For example, each form-locking element 1502 . 1502g the group 1402a . 1402b a recess (eg a passage opening or a groove) in the carrier plate 702p exhibit. Alternatively, each positive-locking element 1502 . 1502g the group 1402a . 1402b a projection (eg a pin or a spring) of the carrier plate 702p exhibit. Optionally, each form-locking element 1502 . 1502g the group 1402a . 1402b have a thread.

17A and 17B each illustrate a transport arrangement 1700a . 1700b according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement).

According to various embodiments, the guide roller carrier 702 a first carrier plate 702p and a second carrier plate 1702p (also as additional carrier plate 1702p designated), which face each other. The first carrier plate 1702p can the multiple attachment structures 712a . 712b exhibit. The second carrier plate 1702p can have several counter-attachment structures 1712a . 1712b exhibit. Each attachment structure of the plurality of attachment structures 712a . 712b may be exactly one counter-attachment structure of the multiple counter-attachment structures 1712a . 1712b be assigned, which is opposite to this.

Each attachment structure of the plurality of attachment structures 712a . 712b can with the associated counter-mounting structure of the plurality of counter-attachment structures 1712a . 1712b a fixing structure pair 712a . 1712a form, between which the bearing assembly 122l can be mounted. For example, the bearing assembly 122l two mounting sockets 1102 . 1102 ' of which have a first mounting base 1102 with the several attachment structures 712a . 712b is mountable and a second mounting base 1102 ' with the several counter-attachment structures 1712a . 1712b can be mounted.

The several attachment structures 712a . 712b and the plurality of counter-attachment structures 1712a . 1712b may be mirror-symmetric with respect to a mirror plane 1711 be arranged, which between the first support plate 702p and the second carrier plate 1702p is arranged. The mirror plane 1711 can be perpendicular to the axis of rotation 101 the leadership role 122 stand. For example, the plurality of attachment structures 712a . 712b a group and the several counter-attachment structures 1712a . 1712b form an additional group, which are arranged mirror-symmetrically to each other.

Optionally, the processing role 122p and / or each corrugated sleeve coupling of the plurality of corrugated sleeve clutches 112a . 112b . 112c . 112d between the first carrier plate 702p and the second carrier plate 1702p be stored, for example in a predefined mounting position W1, W2, W3, W4, CD (see 24 ).

By means of the first carrier plate 702p and the second carrier plate 1702p can be a two-sided storage (also referred to as two-sided configuration) of the at least one leadership role 122 . 112p and optionally the plurality of winding tube coupling 112a . 112b . 112c . 112d respectively.

A role (eg a leadership role 122 . 112p and / or a winding sleeve clutch 112a . 112b . 112c . 112d ), which is mounted on exactly one side can also be referred to as a cantilever role, ie be stored in a cantilever configuration or be.

The or each roll can be up to a length (extension along the axis of rotation 101 ) of 0.3 m in cantilever configuration. The or each roll can be from a length (extension along the axis of rotation 101 ) of 0.3 m in double-sided configuration.

18A illustrates a bearing assembly 122l according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement).

According to various embodiments, the bearing assembly 122l an alignment device 1802 having, which for adjusting an orientation of a rotation axis 101 the bearing arrangement 122l is set up. The alignment device 1802 For example, it may have a hinge which is the guide roller 122 With the mounting base 1102 couples, eg displaceable and / or rotatable. The alignment device 1802 For example, at least one of the following joints can have or be formed from the following joints: a sliding joint, a pivot joint, a screw joint, a rotary shear joint and / or a ball joint. Optionally, the alignment device 1802 have a fixing device, which is set up the axis of rotation 101 to fix in the misaligned orientation.

The fixation device may, for example, have one or more set screws or be formed therefrom.

18B illustrates a transport arrangement 1800b according to various embodiments in a schematic side view or cross-sectional view (eg with a view transverse to the rotation axis direction 101 the transport arrangement).

Analogous to the bearing arrangement 122l can the processing role 122p and / or one or each winding tube coupling of the plurality of winding tube clutches 112a . 112b . 112c . 112d by means of an alignment device 1802 be stored.

19 illustrates a method 1900 for operating a transport arrangement according to various embodiments in a schematic flowchart.

The procedure 1900 can in 1901 comprising: deflecting a substrate by means of a guide roller in a first Umwickelkonfiguration in which the bearing assembly is brought into a first mounting position.

The procedure 1900 can also be found in 1903 comprising: deflecting a substrate by means of a guide roller in a second Umwickelkonfiguration in which the bearing assembly is brought to a second mounting position.

The procedure 1900 can be optional in 1905 comprising: reconfiguring the transport arrangement between the first wrapping configuration and the second wrapping configuration.

The procedure 1900 can be optional in 1907 comprise: processing the substrate before or after the redirecting. The processing may include at least one of the following processing types of the first wrapping configuration: coating the substrate, etching the substrate, and / or irradiating the substrate. The processing may include at least one of the following processing types of the second wrapping configuration: coating the substrate, etching the substrate, and / or irradiating the substrate.

The processing in the first wrapping configuration and the processing in the second wrapping configuration may optionally differ from one another, e.g. in at least one processing type. Then reconfiguration may optionally include: replacing a processing source

The substrate in the first wrap configuration and the substrate in the second wrap configuration may differ from one another, e.g. in a breaking strength, a chemical composition, a mechanical hardness and / or in a modulus of elasticity.

The deflecting can be carried out according to various embodiments in a transport area, for example in its discharge section and / or in its feed section 1401z , The processing can take place in the transport area, for example in its processing section.

20 illustrates a transport arrangement 2000 according to various embodiments in a schematic perspective view and 21 illustrates a transport arrangement 2100 According to various embodiments in a schematic perspective view, in which the second carrier plate 1702p hidden or omitted.

According to various embodiments, the plurality of guide rollers 122 and the several winding tube couplings 112a . 112b . 112c . 112d on both sides by means of the guide roller carrier 702 be stored.

The transport arrangement 2100 can enable a variable and compact design, which is inexpensive and easy to maintain. By means of the two-sided storage, wider substrates 102 be guided more easily.

According to various embodiments, the plurality of guide rollers 122 and optionally the multiple corrugated tube couplings 112a . 112b . 112c . 112d on both sides by means of the guide roller carrier 702 be stored.

Will the second carrier plate 1702p (also as a front board 1702p omitted), a one-sided storage of the plurality of guide rollers 122 and optionally the plurality of corrugated sleeve couplings 112a . 112b . 112c . 112d be provided (ie a cantilever configuration). The cantilever configuration can be easier to adjust and align than the two-sided storage.

The transport arrangement 2000 . 2100 can be inside a chamber housing 802 be arranged or become. For example, the guide roller carrier 702 by means of the chamber housing 802 be or be supported.

The transport arrangement 2000 . 2100 can enable a variable and compact design, which is inexpensive and easy to maintain.

22A and 22B each illustrate a processing arrangement 2200a . 2200b According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the processing arrangement).

According to various embodiments, the processing arrangement 2200a . 2200b a processing chamber 802 comprising a plurality of gas-separated sections 2202a . 2202b (also referred to as compartments). The sections 2202a . 2202b can by means of a surface element 106 (For example, a partition) to be separated from each other. The processing chamber 802 For example, by means of a vacuum chamber housing 802 be or be provided. In the or each section 2202a . 2202b can be a vacuum area 306b . 308b be or be provided.

The processing arrangement 2200a . 2200b Furthermore, at least one transport arrangement with at least one rotatably mounted guide roller 122 . 122p exhibit. The leadership 122 . 122p can be about a rotation axis 101 be rotatably mounted. The leadership 122 . 122p may be for transporting a substrate (not shown) in and / or through the processing chamber 802 be established through, for example, along a transport path 111 , The transport direction 111w can along the transport path 111 run. The transport arrangement may optionally be for bi-directional transport of the substrate 102 be furnished.

According to various embodiments, the plurality of sections 2202a . 2202b (also referred to as compartments) to a curved portion of the transport path 111 adjoin. The curved section 111k the transport path 111 For example, along a lateral surface of the guide roller 122 . 122p run.

According to various embodiments, the plurality of sections 2202a . 2202b be or be separated from each other. Processing the substrate 102 can in an externally shielded and gas-isolated vacuum area 306b . 308b take place, so that a disturbance of the processing, for example, by an interaction between different vacuum areas, vividly as low as possible. Complex processes may require efficient gas separation. For example, a coating of substrates with layers of different composition (eg, different materials) may require different process conditions (eg metallic versus reactive / oxidic or different reactive gas compositions such as Ar / N ₂ over Ar / O ₂ ) and, associated therewith, efficient gas separation of process conditions from each other, which reduces mixing of the different process conditions (gas separation).

The surface element 2206 can a gap 2206s provide through which the transport path 111 leads through. For example, the gap between the surface element 2206 and the leadership 122 . 122p or their lateral surface 1302 be formed. Alternatively, the gap 2206s by means of a passage opening in the surface element 2206 be formed. The gap 2206s can be vividly set up so large that one by means of the leadership role 122 . 122p transported substrate 102 through the gap 2206s fits through. The extent of the gap 2206s For example, it may be smaller than 10 cm, eg smaller than 5 cm, eg smaller than 1 cm.

The gas separation clearly describes a difference in gas pressure or in the gas composition between vacuum-related vacuum areas 306b . 308b (eg gas-separated areas), ie clearly a vacuum separation. The components (eg the parts of a gas separation structure) which contribute to gas separation can be set up such that the difference in gas pressure or in the gas composition between vacuum-connected vacuum regions 306b . 308b can be maintained (eg stable). In other words, a gas exchange between vacuum-technically interconnected and gas-separated vacuum areas 306b . 308b eg the larger the gas separation between the areas is.

The processing arrangement 2200a . 2200b may also be a first processing source 306 (eg, a first source of coating material 306 ), which in a first 2202a the several sections 2202a . 2202b be arranged or can be. The first processing source 306 For example, it may have one or more magnetron cathodes. Optionally, the processing arrangement 2200a . 2200b a second processing source 308 (eg, a second source of coating material 308 ), which in a second 2202b the several sections 2202a . 2202b be arranged or can be

According to various embodiments, in the processing chamber 802 by means of a coating material source 306 . 308 a coating process may be carried out in such a way that a substrate transported by means of the transport arrangement can be coated with at least one coating material (eg at least two coating materials, eg at least three coating materials). For example, any source of coating material 306 . 308 a coating material which is used to coat the substrate 102 evaporated and towards the substrate (ie in the direction of the transport path 111 ) is emitted. On the substrate 102 The emitted coating material can accumulate and form a layer. That in the direction of the substrate 102 emitted coating material of each coating material source 306 . 308 can be a layer or a layer stack on the substrate 102 form. For example, so many different layers on the substrate 102 be formed, such as coating material sources 306 . 308 be used.

According to various embodiments, the substrate 102 have or be formed from a film, eg a plastic film, a glass film (also referred to as flexible glass) and / or a metal foil. Alternatively or additionally, the substrate 102 comprise or be formed from a fabric. The substrate 102 can about leadership 122 . 122p be curious or become.

Optionally, the substrate 102 be transported by a conveyor belt. The conveyor belt can be over the guide roller 122 . 122p be curious or become. The conveyor belt may for example comprise or be formed from a fabric.

By means of the processing role 122p can be a constantly curved section 111k the transport path 111 be provided along which the substrate 102 is processed. By means of adjacent guide rollers 122 can be a straight-line section 111g the transport path 111 (also as transport path section 111g be provided), along which the substrate 102 is processed.

23 illustrates a processing arrangement 2300 According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the processing arrangement).

According to various embodiments, at least one substrate 102 by means of the processing arrangement 2300 (also referred to as vacuum arrangement) processed (treated). In this case, the processing arrangement 2300 be configured such that the substrate can be coated, heated, cooled, etched, exposed, structured and / or treated in any other way, for example. The treatment (processing) of the at least one substrate 102 For example, it can be done in vacuum (in a vacuum process chamber), at normal pressure (standard pressure or atmospheric pressure in an atmospheric pressure processing chamber), or under overpressure (in an overpressure process chamber).

For processing a substrate 102 in the processing chamber 802 the processing arrangement 2300 can in the processing chamber 802 the processing arrangement 2300 several processing sources 306 . 308 . 2306 . 2308 . 2310 be arranged. In each section of the several sections 2202a . 2202b . 2202c . 2202d . 2202e may be at least one processing source of the plurality of processing sources 306 . 308 . 2306 . 2308 . 2310 be arranged. The several sections 2202a . 2202b . 2202c . 2202d . 2202e can be or be separated from each other by gas.

A processing source 306 . 308 . 2306 . 2308 . 2310 For example, a source of coating material (a magnetron, a tube magnetron, or a double-tube magnetron, a planar magnetron, or double planar magnetron), an exposure device (a light source, a laser, a flashlamp, or a flashlamp assembly), a heat source (eg, a heater), an etching device (eg, an etching gas source or etching plasma source), a radiation source (eg, an electron beam source or ion beam source), or the like.

For coating (vapor deposition) of the at least one substrate 102 For example, a coating material source may be used which is arranged such that a sputtering method (sputtering method) can be performed by means of the coating material source. Sputtering techniques can be performed in a variety of ways, such as DC (DC) sputtering, medium frequency (MF) sputtering, radio frequency (RF) sputtering, each using one or more cathodes (targets), using a magnet system (FIG. Magnetron sputtering), using a reactive gas as reactive sputtering, high power pulse sputtering, and / or the like. Optionally, for coating (vapor deposition) the at least one substrate 102 For example, at least one of the following types of coatings may be used: chemical vapor deposition, physical vapor deposition, thermal evaporation, and / or electron beam evaporation.

24 illustrates a guide carrier 702 According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 2400 ), eg its first carrier plate 702p and / or its second carrier plate 1702p (also as boards 702p . 1702p designated).

According to various embodiments, the plurality of fastening structures or their form-locking elements 1502 in several groups 1402a . 1402b . 1402c . 1402d be arranged, which are spaced from each other at a distance.

According to various embodiments, the plurality of fastening structures or their form-locking elements 1502 in several groups 1402a . 1402b . 1402c . 1402d be arranged, of which a first group 1402a in the feeding section 1401z can be arranged a second group 1402b in the discharge section 1401a be arranged and two optional third groups 1402c . 1402d in the processing section 601 can be arranged. The first group 1402a and the second group (eg their form-locking elements 1502 ) can be mirror-symmetric with respect to the mirror plane 1411 be arranged and set up. Alternatively or additionally, the two optional third groups 1402c . 1402d (eg their form-locking elements 1502 ) mirror-symmetric with respect to the mirror plane 1411 be arranged.

According to various embodiments, the guide roller carrier 702 several through holes 1902o have for receiving rotary feedthroughs 902o or at least rotatably mounted shafts 112w , By means of the rotary unions 902o or at least rotatably mounted (and driven) shafts 112w In each case, outside of a vacuum chamber generates drive energy to each winding sleeve coupling of the plurality of winding tube clutches 112a . 112b . 112c . 112d be transferred or become.

By means of the multiple passage openings 1902o For example, the mounting positions W1, W2, W3, W4 of each winding tube coupling of the plurality of winding tube couplings 112a . 112b . 112c . 112d be predefined or become. The passage openings 1902o can be aligned with the corresponding passage opening of the chamber housing, so that the rotary feedthrough 902o can be led out of the chamber housing.

According to various embodiments, the guide roller carrier 702 an additional passage opening 1922o have for receiving an additional rotary feedthrough 902o or at least one additional rotatably mounted (and driven) shaft 112w , By means of the additional rotary feedthrough 902o or at least the extra wave 112w can drive energy generated outside a vacuum chamber to the processing role 122p be transferred or become. Optionally, the processing role 122p by means of the rotary union 902o be supplied with a tempering medium. By means of the additional passage opening 1922o can the mounting position CD of the processing roller 122p be predefined or become.

The passage openings 1902o . 1922o For example, a larger extent (transverse to the rotation axis direction 101 ) as the positive-locking elements 1502 , Alternatively or additionally, through openings 1902o . 1922o a greater distance from each other (transverse to the rotation axis direction 101 ) as the positive-locking elements 1502 , Eg more than twice the distance between the positive-locking elements 1502 from each other, for example, more than three times the distance form-locking elements 1502 from each other. Each group of the several groups 1402a . 1402b . 1402c . 1402d can more positive locking elements 1502 as the guide roller carrier 702 at passage openings 1902o . 1922o having.

According to various embodiments, the distance of adjacent positive-locking elements 1502 (eg mounting holes 1502 ) may be in a range of about 10 mm to about 100 mm, eg about 50 mm. Optionally, the mounting holes 1502 have a thread, eg M8 or M10. Alternatively or additionally, a distance between adjacent mounting positions 701 . 701b . 701c . 701d in a range of about 10 mm to about 100 mm.

The mounting positions 7x1y (see detailed view 2400 ) can be identified, for example, by a first index "x" (exemplarily x = 1 to 4) along a first direction 103 be referenced (illustratively column by column) and / or with a second index "y" (exemplarily y = a to d illustrated) along a second direction 105 (transverse to the first direction 103 ) be or be referenced (vivid line by line). Thus, for example, a two-dimensional grid (x, y) can be clamped, according to which the mounting positions 7x1y are arranged.

25 and 26 each illustrate a transport arrangement in different wrapping configurations 2500 . 2600 According to various embodiments in a schematic side view or cross-sectional view (eg with Viewing direction along the rotation axis direction 101 the transport arrangement).

The substrate 102 can from the third cores clutch 112c to the fourth winding sleeve clutch 112d be wrapped. An optional first intermediate layer 104 can from that of the third cores clutch 112c (or from the mounted thereon substrate winding 102w ) on the first winding tube clutch 112a be wrapped. An optional second intermediate layer 104 can from the second winding sleeve clutch 112b (or from the stored thereon intermediate layer winding 104w ) on the fourth winding tube clutch 112d be wrapped.

In the feeding section 1401z can have multiple (eg, two, three, four or more) leadership roles 122 be set up by means of which the transport path 111 be or can be bent several times. Alternatively or additionally, in the Abführabschnitt 1401a several (eg two, three, four or more) guide rollers 122 be set up by means of which the transport path 111 be or can be bent several times.

The transport arrangement can in 2500 a processing role 122p which are in the processing section 601 is arranged and therein a constant curved transport path section 111k provide. The transport arrangement in 2600 can have at least two guide rollers 112 which are in the processing section 601 are arranged and therein a plurality of rectilinear transport path section 111g provide.

According to various embodiments, the attachment of the guide rollers 122 (also referred to as rollers) on a base plate 702p (clearly a board) done. For one-sided storage (cantilever configuration) can be exactly one board 702p be used. With double-sided roller bearing can an additional board 1702p be used. By means of a predefined position grid of fixing holes 1502 it can be made possible, not fixed fixed guide rollers 122 Provide (eg guide rollers, measuring rollers, spreader rolls, etc.), which can be variably arranged, for example in the predefined grid of mounting positions. Through the predefined position grid of mounting holes 1502 in the board 702p (or the boards 702p . 1702p ) can be made possible according to various embodiments, non-stationary bonded guide rollers 122 in an alternative way (ie to reconfigure).

According to various embodiments, the distance of the mounting holes 1502 in a range of about 10 mm to about 100 mm, for example about 50 mm. Optionally, the mounting holes 1502 have a thread, eg M10 or M8. The position grid can extend over a defined area, which is determined after format investigation of the transport arrangement with regard to possible web runs, as a variable field. With one-sided storage (cantilever configuration), repositioning can be done relatively easily. The respective, one-sided screwed mounting base 1102 can be reattached to the desired position. For double-sided storage can be an opposite board 1702p to be necessary. This can have an identical hole pattern and be arranged congruently by means of a centering on the connecting trusses or be. Thus, the drilling patterns of the two boards 1702p . 702p aligned with each other.

When repositioning guide rollers 122 , A control of the angular position may be required, or a possible readjustment by means of the alignment device 1802 (eg by providing slots, adjusting screws XY at the bearing points). Cantilever-guide rollers 122 (Also referred to as Cantileverwalzen) may have an internal storage or a console with integrated storage. Rollers mounted on both sides can be fastened with half-shells in a low-cost version, or more conveniently with folding bearings. Depending on the respective web run geometry, roll diameters (extension transverse to the axis of rotation) can be used 101 ) in a range of about 80 mm (millimeters) to about 220 mm. For example, if a larger roll diameter becomes necessary for retrofitting (eg flexible glass), a rearrangement (reconfiguration) of these rolls can optionally be carried out.

The possibility of a variable roll arrangement can be a prerequisite for a high degree of flexibility with regard to the implementation of new production technologies and methods.

• • in den Bahnlauf soll zumindest eine zusätzliche Führungsrolle 122 (z.B. eine Breitstreckwalze) hinzugefügt sein oder werden kann;
• • aufgrund technologischer Vorgaben, beispielsweise wenn eine Seite des Substrats 102 berührungsfrei prozessiert werden soll (auch als „No Fronttouch“ bezeichnet);
• • wechselndes Substrat 102 oder wechselnder Substrattyp, beispielsweise wenn ein Umrüsten der Transportanordnung von Folie auf flexibles Glas erfolgen soll;
• • Wegfall der Prozesswalze 122p, d.h. wenn eine Umstellung auf Freespann erfolgen soll.

For example, an adjustment of the web run may be required or take place in at least the following scenarios:

• • in the web run should at least an additional leadership role 122 (eg a spreader roller) may or may not be added;
• • due to technological constraints, for example if one side of the substrate 102 to be processed without contact (also known as "No Fronttouch");
• • changing substrate 102 or changing substrate type, for example when a conversion the transport arrangement of film to be made on flexible glass;
• • Elimination of the process roller 122p , that is, if a change to Freespann is to take place.

The constantly curved transport path section 111k , which by means of the processing role 122p can provide an angle w111 with respect to the axis of rotation 101 the processing role 122p have, which is greater than 90 °. In other words, a length of the constant curved transport path section 111k greater than one-half (50%) of the circumference of the processing roll 122p , For example, the length of the constant curved transport path section 111k in a range of about 50% to about 90% of the circumference of the processing roll 122p eg, in a range of about 66% to about 83% of the scope of the processing roll 122p ,

The several straight-line transport path sections 111g , which by means of the multiple guide rollers 122 are provided in the processing section, a length l1, l2 (corresponds to the distance of the axes of rotation 101 the corresponding guide rollers 122 one another), which is greater than a quarter (25%) of the circumference of the guide rollers 122 , For example, the length of the straight-line transport path sections 111g in a range of about 25% to about 75% of the circumference of the guide rollers 122 For example, in a range of about 25% to about 50% of the circumference of the guide rollers 122 ,

The leadership roles 122 the transport arrangement in 2500 can have a small diameter (extension transverse to the axis of rotation 101 ) as the guide rollers 122 the transport arrangement in 2600 (also as big leadership roles 122 designated). For example, the diameter of the guide rollers 122 the transport arrangement in 2500 less than about 200 mm, eg less than about 150 mm. Alternatively or additionally, the diameter of the guide rollers 122 the transport arrangement in 2600 greater than about 200 mm, eg less than about 250 mm. The larger the diameter, the smaller the risk that the substrate 102 breaks, especially if the substrate is very brittle (such as flexible glass).

The transport path 111 can by any leadership role 122 the transport arrangement 2500 . 2600 be deflected, for example, by an angle w112 (clearly the difference from incoming transport path 111 and expiring transport path 111 ). The angle w122 can also be referred to as a minimum wrap. The angle w122 of the non-driven guide rollers 122 may be greater than about 10 °, eg greater than about 20 °, eg greater than about 30 °.

27 illustrates a transport arrangement 2700 According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 2700 ) in yet another wrap-around configuration in the four large guide rollers 122 and a processing role 122p the transport path 111 define. Such a wrap-around configuration can be used, for example, for processing flexible glass substrates.

The constantly curved transport path section 111k the transport path 111 , which by means of the processing role 122p can provide an angle w111 with respect to the axis of rotation 101 the processing role 122p have, which is greater than 90 °. In other words, a length of the constant curved transport path section 111k greater than a quarter (25%) of the circumference of the processing roll 122p , For example, the length of the constant curved transport path section 111k in a range of from about 25% to about 75% of the amount of processing roll 122p eg in a range of about 33% to about 66% of the circumference of the processing roll 122p ,

28 illustrates a transport arrangement 2800 According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 2800 ) in yet another wrap-around configuration, in which six large guide rollers 122 the transport path 111 define. Such a wrapping configuration can be used, for example, for processing a flexible glass substrate.

The transport arrangement 2800 is similar to the transport arrangement 2700 , with the difference that instead of the driven processing roll 122p two non-powered guide rollers 122 are used, of which, for example, at least one guide roller MR has a sensor (eg, a strain gauge). Analogous to this Umkonfiguration can in the Umwickelkonfigurationen described above, the processing role 122p and two guide rollers 122 be understood as interchangeable. By means of the two guide rollers 122 For example, a free-span configuration (also referred to as a "Freespann") may or may not be provided in which the transport path 111 several rectilinear sections 111g in the processing section 601 along which the substrate 102 is managed and / or processed.

The transport arrangement 2700 and the transport arrangement 2800 may be arranged such that the transport path 111 in exactly one Direction is curved. This can be achieved that a Hauptprozessierseite 102t of the substrate 102 which is processed (eg coated) by means of the guide rollers 122 Non-contact along the transport path 111 is guided (a so-called "No Fronttouch" configuration).

A unilaterally contactless transport of the substrate 102 For example, it can be used to process flexible glass.

In the following, more specific wrapping configurations will be described, which can be combined with the above wrapping configurations.

29A and 29B each illustrate a transport arrangement in mutually different Umwickelkonfigurationen 2900A . 2900B According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement).

UW denotes one for unwinding the substrate 102 used winding tube clutch (ie, according to the unwind configuration driven corrugated sleeve clutch).

RW denotes one for winding the substrate 102 used winding sleeve clutch (ie, according to the take-up configuration driven corrugated sleeve clutch).

I-UW denotes one for unwinding the interlayer 104 used winding sleeve clutch (eg according to the winding configuration driven winding sleeve coupling). I-RW denotes one for winding the intermediate layer 104 used winding sleeve clutch (eg according to the unwind configuration driven cores clutch). The winding tube coupling I-UW and / or the winding tube coupling I-RW may be optional.

GR denotes a leadership role 122 which are used to redirect the transport path 111 is set up (also as a deflection roller 122 or pulley 122 designated). The pulley 122 can be stored without drive.

SR denotes a leadership role 122 , which is designed for spreading (also as a spreader roller 122 or spreader roller 122 designated). The spreader roller 122 can be stored without drive and have a curved in the axial direction of the lateral surface (eg, a concave lateral surface or a convex lateral surface). For example, the spreader roller 122 a curvature along the axis of rotation 101 or have a bulbous shape.

MR denotes a leadership role 122 , which is set up for measuring (also as a measuring roller 122 or measuring roll 122 designated). The measuring roll 122 may be arranged to detect a mechanical quantity which has a mechanical tensile stress in the substrate 102 represents. The measuring roll 122 can be stored without drive.

TI is a leadership role 122 , which is set up for decoupling (also as a tension roller 122 or pull roll 122 designated). The tension roller can be driven or be, for example by means of a belt or by means of a shaft. A drive energy transmitted to the pulley (eg, torque or rotary motion transmitted thereto) may be controlled by the controller 508 controlled and / or regulated, for example on the basis of the measuring roller 122 recorded mechanical size.

A pull roll 122 and these two adjacent measuring rolls 122 between which the pull roll 122 is arranged, a unit (illustratively a decoupling roller assembly) form, which the transport path in two train-controlled systems (clearly before and after the draw roller 122 ), between which the web train by means of the draw roller 122 is equalized (ie a difference before and after the tension roller 122 is reduced).

By means of additional roles, the circulation of the processing role 102p be enlarged or become.

30A and 30B each illustrate a transport arrangement in mutually different Umwickelkonfigurationen 3000a . 3000b According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport assembly), which differed in the direction in which the plurality of winding tube clutches are rotated (ie, the sense of rotation or winding sense).

In the wrap-around configurations 3000a . 3000b can the transport path 111 be defined by large measuring rollers MR and pulleys GR.

31A and 31B each illustrate a transport arrangement in mutually different Umwickelkonfigurationen 3100a . 3100b According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport assembly), wherein the wrapping of the intermediate layer is omitted. This can, for example, in the case of a polymer substrate 102 be the case.

32A and 32B each illustrate a transport arrangement in mutually different Umwickelkonfigurationen 3200a . 3200b According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 3200a ).

33A and 33B each illustrate a transport arrangement in mutually different Umwickelkonfigurationen 3300A . 3300B According to various embodiments in a schematic side view or cross-sectional view (eg with a view along the rotation axis direction 101 the transport arrangement 3300A ), where the transport path 111 is set up such that the substrate 102 is curved in one direction only. In other words, a first side of the substrate 102 , which is processed (eg coated), non-contact along the transport path 111 to be led. The first side of the substrate 102 can use it along the transport path 111 none of the guide rollers 122 touch (ie in "No Fronttouch" configuration). One of the first side opposite side may be on the guide rollers 112 rest.

A unilaterally contactless transport of the substrate 102 For example, it can be used to process flexible glass.

The "No Fronttouch" configuration can be found in 3300A by means of small guide rollers 122 be or be provided and in 3300B by means of large guide rollers 122 be or be provided.

Claims (11)

Transport arrangement ( 100 . 300 ), comprising: • a plurality of rotatably mounted winding sleeve couplings ( 112a . 112b . 112c . 112d ), of which two corrugated sleeve couplings for coupling winding cores, between which a flexible substrate ( 102 ) are to be wrapped, and of which at least one additional winding tube coupling for coupling at least one additional winding tube, by means of which an intermediate layer ( 104 ) is established and / or is to be maintained; At least one rotatably mounted guide roller ( 122 ), which have a curved transport path ( 111 ), along which the wrapping takes place; Wherein the plurality of winding tube couplings ( 112a . 112b . 112c . 112d ) are arranged substantially similar, so that the cores are interchangeable with each other. Transport arrangement ( 100 . 300 ) according to claim 1, further comprising: a plurality of drives ( 506 ), of which each drive with exactly one winding sleeve coupling of the plurality of winding sleeve clutches ( 112a . 112b . 112c . 112d ) is coupled; where the multiple drives ( 506 ) are set up substantially identically, so that these, with similar control, the plurality of winding tube clutches ( 112a . 112b . 112c . 112d ) synchronously. Transport arrangement ( 100 . 300 ) according to claim 1 or 2, further comprising: a controller ( 508 ) for driving each drive of the plurality of drives ( 506 ) according to a wrapping configuration, comprising: a winding configuration for driving the winding tube coupling by means of which the substrate ( 102 ) is wound up; and / or an unwinding configuration for driving the winding tube coupling by means of which the substrate (FIG. 102 ) is settled; where the controller ( 508 ), each drive of the plurality of drives ( 506 ) optionally according to the take-up configuration and / or according to the unwind configuration. Transport arrangement ( 100 . 300 ) according to claim 3, wherein the controller ( 508 ), a rotational speed of at least one winding sleeve coupling of the plurality of winding sleeve couplings (US Pat. 112a . 112b . 112c . 112d ), between which the substrate ( 102 ) is adapted to fit a size representing a transport characteristic. Transport arrangement ( 100 . 300 ) according to one of claims 1 to 4, wherein each winding sleeve coupling of the plurality of winding sleeve couplings ( 112a . 112b . 112c . 112d ) a tensioning device ( 504 ) for clamping the respective winding tube. Transport arrangement ( 100 . 300 ) according to one of claims 1 to 5, wherein the transport area comprises at least one processing section ( 601 ), in which the transport path ( 111 ) along a length of more than the quarter of the circumference of the at least one guide roller ( 122 ) is rectilinear or has a constant curvature. Transport arrangement ( 100 . 300 ) according to one of claims 1 to 6, wherein the plurality of rotatably mounted corrugated tube clutches ( 112a . 112b . 112c . 112d ) are set up in a first wrap-around configuration ( 100b . 300b ) a substrate ( 102 ) between a first winding sleeve coupling of the plurality of winding sleeve couplings ( 112a . 112b . 112c . 112d ) and a second winding sleeve coupling of the plurality of winding sleeve couplings ( 112a . 112b . 112c . 112d to wrap up; In a second wrapping configuration ( 200a . 400a ) a substrate ( 102 ) between a first winding sleeve coupling of the plurality of winding sleeve couplings ( 112a . 112b . 112c . 112d ) and a third corrugated sleeve coupling of the plurality of corrugated sleeve clutches ( 112a . 112b . 112c . 112d ) umwickeln. Transport arrangement ( 100 . 300 ) according to claim 7, a guide roller carrier ( 702 ), which • a first mounting position ( 701 ), in which the at least one leadership role ( 122 ) in the first wrap-around configuration ( 100b . 300b ) is mounted; A second mounting position ( 701b ), in which the at least one leadership role ( 122 ) in the second wrap-around configuration ( 200a ) is mounted. Vacuum arrangement ( 800a . 800b ), comprising: a vacuum chamber ( 802 ); and a transport arrangement ( 100 . 300 ) according to one of claims 1 to 8, whose several winding sleeve couplings ( 112a . 112b . 112c . 112d ) in the vacuum chamber ( 802 ) are arranged. Vacuum arrangement ( 800a . 800b ) according to claim 9, wherein the vacuum chamber ( 802 ) has a plurality of rotary feedthroughs, of which each rotary feedthrough with exactly one corrugated sleeve coupling of the plurality of corrugated sleeve clutches ( 112a . 112b . 112c . 112d ) flees. Method for operating a transport arrangement ( 100 . 300 ), which at least one first corrugated sleeve clutch ( 112a ), a second winding sleeve clutch ( 112b ) and a third corrugated sleeve coupling ( 112c ), the method comprising: • processing a substrate ( 102 ) in a first wrap-around configuration ( 100b . 300b ), in which the substrate ( 102 ) is wound between two cores, which by means of the first corrugated sleeve coupling ( 112a ) and the second winding sleeve clutch ( 112b ) are stored; and • processing a substrate ( 102 ) in a second wrap-around configuration ( 100c ), in which the substrate ( 102 ) is wound around between two cores, which by means of the third corrugated sleeve coupling ( 112c ) and the first winding sleeve clutch ( 112a ) are stored.

Images